JP2008224582A5 - - Google Patents
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- Publication number
- JP2008224582A5 JP2008224582A5 JP2007066481A JP2007066481A JP2008224582A5 JP 2008224582 A5 JP2008224582 A5 JP 2008224582A5 JP 2007066481 A JP2007066481 A JP 2007066481A JP 2007066481 A JP2007066481 A JP 2007066481A JP 2008224582 A5 JP2008224582 A5 JP 2008224582A5
- Authority
- JP
- Japan
- Prior art keywords
- gas sensor
- axis
- idt electrode
- gas
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000007789 gas Substances 0.000 claims 24
- 239000000758 substrate Substances 0.000 claims 9
- 239000007809 chemical reaction catalyst Substances 0.000 claims 6
- 238000010897 surface acoustic wave method Methods 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 3
- 239000010453 quartz Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- 230000010355 oscillation Effects 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007066481A JP5061287B2 (ja) | 2007-03-15 | 2007-03-15 | ガスセンサ及び水素濃度検出システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007066481A JP5061287B2 (ja) | 2007-03-15 | 2007-03-15 | ガスセンサ及び水素濃度検出システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008224582A JP2008224582A (ja) | 2008-09-25 |
| JP2008224582A5 true JP2008224582A5 (https=) | 2010-05-13 |
| JP5061287B2 JP5061287B2 (ja) | 2012-10-31 |
Family
ID=39843375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007066481A Expired - Fee Related JP5061287B2 (ja) | 2007-03-15 | 2007-03-15 | ガスセンサ及び水素濃度検出システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5061287B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5535556B2 (ja) * | 2009-08-28 | 2014-07-02 | アズビル株式会社 | 酸素濃度センサ |
| KR101348834B1 (ko) * | 2011-09-05 | 2014-01-08 | 울산대학교 산학협력단 | 표면탄성파 수소센서 및 이의 제조방법 |
| CN105890661A (zh) * | 2016-05-10 | 2016-08-24 | 全球能源互联网研究院 | 一种基于多通道声表面波的多物理量传感器 |
| FR3100405B1 (fr) * | 2019-09-04 | 2021-12-31 | Frecnsys | Capteur à ondes acoustiques différentiel |
| FR3120488B1 (fr) | 2021-03-03 | 2023-09-15 | Frecnsys | Dispositif capteur a ondes acoustiques de surface |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3124138B2 (ja) * | 1992-12-16 | 2001-01-15 | 横河電機株式会社 | 熱測定型バイオセンサ |
| JP3575835B2 (ja) * | 1994-08-31 | 2004-10-13 | 株式会社リコー | ガスセンサシステム |
| JP4059152B2 (ja) * | 2002-10-16 | 2008-03-12 | セイコーエプソン株式会社 | 弾性表面波共振子 |
| JP2005098742A (ja) * | 2003-09-22 | 2005-04-14 | Oizumi Seisakusho:Kk | 接触燃焼式水素センサー |
| JP2006313092A (ja) * | 2005-05-06 | 2006-11-16 | Seiko Epson Corp | 弾性表面波センサ及び弾性表面波センサシステム |
| JP2006317196A (ja) * | 2005-05-10 | 2006-11-24 | Akihisa Inoue | 水素ガスセンサ |
| JP2007010378A (ja) * | 2005-06-28 | 2007-01-18 | Seiko Epson Corp | 弾性表面波素子及びその製造方法、弾性表面波センサ、並びに弾性表面波センサシステム |
| JP4852283B2 (ja) * | 2005-09-01 | 2012-01-11 | 敏嗣 植田 | ガスセンサ |
-
2007
- 2007-03-15 JP JP2007066481A patent/JP5061287B2/ja not_active Expired - Fee Related
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