JP5061287B2 - ガスセンサ及び水素濃度検出システム - Google Patents

ガスセンサ及び水素濃度検出システム Download PDF

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Publication number
JP5061287B2
JP5061287B2 JP2007066481A JP2007066481A JP5061287B2 JP 5061287 B2 JP5061287 B2 JP 5061287B2 JP 2007066481 A JP2007066481 A JP 2007066481A JP 2007066481 A JP2007066481 A JP 2007066481A JP 5061287 B2 JP5061287 B2 JP 5061287B2
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Japan
Prior art keywords
axis
hydrogen
gas
idt electrode
reaction catalyst
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Japanese (ja)
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JP2008224582A (ja
JP2008224582A5 (https=
Inventor
敏嗣 植田
雅子 田中
隆 山崎
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Seiko Epson Corp
Waseda University
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Seiko Epson Corp
Waseda University
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Priority to JP2007066481A priority Critical patent/JP5061287B2/ja
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Publication of JP2008224582A5 publication Critical patent/JP2008224582A5/ja
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JP2007066481A 2007-03-15 2007-03-15 ガスセンサ及び水素濃度検出システム Expired - Fee Related JP5061287B2 (ja)

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JP2007066481A JP5061287B2 (ja) 2007-03-15 2007-03-15 ガスセンサ及び水素濃度検出システム

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JP2007066481A JP5061287B2 (ja) 2007-03-15 2007-03-15 ガスセンサ及び水素濃度検出システム

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JP2008224582A JP2008224582A (ja) 2008-09-25
JP2008224582A5 JP2008224582A5 (https=) 2010-05-13
JP5061287B2 true JP5061287B2 (ja) 2012-10-31

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5535556B2 (ja) * 2009-08-28 2014-07-02 アズビル株式会社 酸素濃度センサ
KR101348834B1 (ko) * 2011-09-05 2014-01-08 울산대학교 산학협력단 표면탄성파 수소센서 및 이의 제조방법
CN105890661A (zh) * 2016-05-10 2016-08-24 全球能源互联网研究院 一种基于多通道声表面波的多物理量传感器
FR3100405B1 (fr) * 2019-09-04 2021-12-31 Frecnsys Capteur à ondes acoustiques différentiel
FR3120488B1 (fr) 2021-03-03 2023-09-15 Frecnsys Dispositif capteur a ondes acoustiques de surface

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3124138B2 (ja) * 1992-12-16 2001-01-15 横河電機株式会社 熱測定型バイオセンサ
JP3575835B2 (ja) * 1994-08-31 2004-10-13 株式会社リコー ガスセンサシステム
JP4059152B2 (ja) * 2002-10-16 2008-03-12 セイコーエプソン株式会社 弾性表面波共振子
JP2005098742A (ja) * 2003-09-22 2005-04-14 Oizumi Seisakusho:Kk 接触燃焼式水素センサー
JP2006313092A (ja) * 2005-05-06 2006-11-16 Seiko Epson Corp 弾性表面波センサ及び弾性表面波センサシステム
JP2006317196A (ja) * 2005-05-10 2006-11-24 Akihisa Inoue 水素ガスセンサ
JP2007010378A (ja) * 2005-06-28 2007-01-18 Seiko Epson Corp 弾性表面波素子及びその製造方法、弾性表面波センサ、並びに弾性表面波センサシステム
JP4852283B2 (ja) * 2005-09-01 2012-01-11 敏嗣 植田 ガスセンサ

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