JP2008209389A - 加速度センサ - Google Patents

加速度センサ Download PDF

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Publication number
JP2008209389A
JP2008209389A JP2007159832A JP2007159832A JP2008209389A JP 2008209389 A JP2008209389 A JP 2008209389A JP 2007159832 A JP2007159832 A JP 2007159832A JP 2007159832 A JP2007159832 A JP 2007159832A JP 2008209389 A JP2008209389 A JP 2008209389A
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JP
Japan
Prior art keywords
vibrating
acceleration sensor
additional mass
base
vibrating arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007159832A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008209389A5 (enrdf_load_stackoverflow
Inventor
Ryuta Nishizawa
竜太 西澤
Masako Tanaka
雅子 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007159832A priority Critical patent/JP2008209389A/ja
Publication of JP2008209389A publication Critical patent/JP2008209389A/ja
Publication of JP2008209389A5 publication Critical patent/JP2008209389A5/ja
Withdrawn legal-status Critical Current

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  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP2007159832A 2006-10-13 2007-06-18 加速度センサ Withdrawn JP2008209389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007159832A JP2008209389A (ja) 2006-10-13 2007-06-18 加速度センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006279508 2006-10-13
JP2007017439 2007-01-29
JP2007159832A JP2008209389A (ja) 2006-10-13 2007-06-18 加速度センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008253520A Division JP2009042240A (ja) 2006-10-13 2008-09-30 加速度センサ

Publications (2)

Publication Number Publication Date
JP2008209389A true JP2008209389A (ja) 2008-09-11
JP2008209389A5 JP2008209389A5 (enrdf_load_stackoverflow) 2010-07-22

Family

ID=39785793

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (ja) 2006-10-13 2007-06-18 加速度センサ
JP2007159831A Withdrawn JP2008209388A (ja) 2006-10-13 2007-06-18 加速度センサ
JP2008253520A Withdrawn JP2009042240A (ja) 2006-10-13 2008-09-30 加速度センサ
JP2008253519A Withdrawn JP2009042239A (ja) 2006-10-13 2008-09-30 加速度センサ

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2007159831A Withdrawn JP2008209388A (ja) 2006-10-13 2007-06-18 加速度センサ
JP2008253520A Withdrawn JP2009042240A (ja) 2006-10-13 2008-09-30 加速度センサ
JP2008253519A Withdrawn JP2009042239A (ja) 2006-10-13 2008-09-30 加速度センサ

Country Status (2)

Country Link
JP (4) JP2008209389A (enrdf_load_stackoverflow)
CN (1) CN101162237B (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011196822A (ja) * 2010-03-19 2011-10-06 Seiko Epson Corp 振動型ジャイロ素子、振動型ジャイロセンサー、振動型ジャイロセンサーによる角速度の検出方法および電子機器
JP2011203228A (ja) * 2010-03-26 2011-10-13 Toshiba Corp 加速度センサ
US8100016B2 (en) 2008-09-17 2012-01-24 Seiko Epson Corporation Vibratory sensor
JP2012129681A (ja) * 2010-12-14 2012-07-05 Seiko Epson Corp 電子機器

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
DE102010030878B4 (de) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung zur Messung einer Beschleunigung, eines Drucks und dergleichen
US9759739B2 (en) 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP2014052263A (ja) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd 外力検出装置及び外力検出センサー
CN103197101A (zh) * 2013-04-18 2013-07-10 厦门乃尔电子有限公司 非等截面悬臂梁压电式加速度传感器
JP2015179933A (ja) * 2014-03-19 2015-10-08 セイコーエプソン株式会社 振動素子、ジャイロセンサー素子、電子デバイス、電子機器および移動体
JP6044607B2 (ja) * 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
CN105429607B (zh) * 2014-09-16 2020-12-29 精工爱普生株式会社 振动装置、电子设备以及移动体
CN105865666B (zh) * 2016-05-03 2018-11-20 成都皆为科技有限公司 一种一体式双石英音叉谐振敏感元件及测力模块
GB2561887B (en) 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
DE102017217975A1 (de) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Mikromechanische Federstruktur
JP7331881B2 (ja) * 2021-04-20 2023-08-23 株式会社豊田中央研究所 加速度センサ及び加速度センサ装置
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器
CN113985067A (zh) * 2021-12-29 2022-01-28 山东利恩斯智能科技有限公司 一种平面挠曲式大灵敏度加速度传感器及制作方法
US11965907B2 (en) 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
US11953514B2 (en) * 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression
CN114814334B (zh) * 2022-04-14 2023-05-16 南京高华科技股份有限公司 电流传感器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
JPS61165624A (ja) * 1977-06-07 1986-07-26 マイクロ・モ−シヨン・インコ−ポレ−テツド 流量計
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
FR2574209B1 (fr) * 1984-12-04 1987-01-30 Onera (Off Nat Aerospatiale) Resonateur a lame vibrante
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode
JP3368744B2 (ja) * 1996-03-27 2003-01-20 株式会社豊田中央研究所 振動型加速度センサ
JP4806850B2 (ja) * 2001-01-24 2011-11-02 パナソニック株式会社 アクチュエータ
JP2003149261A (ja) * 2001-11-16 2003-05-21 Matsushita Electric Ind Co Ltd 加速度センサとこれを用いた自動車

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8100016B2 (en) 2008-09-17 2012-01-24 Seiko Epson Corporation Vibratory sensor
JP2011196822A (ja) * 2010-03-19 2011-10-06 Seiko Epson Corp 振動型ジャイロ素子、振動型ジャイロセンサー、振動型ジャイロセンサーによる角速度の検出方法および電子機器
JP2011203228A (ja) * 2010-03-26 2011-10-13 Toshiba Corp 加速度センサ
US8497672B2 (en) 2010-03-26 2013-07-30 Kabushiki Kaisha Toshiba Acceleration sensor
JP2012129681A (ja) * 2010-12-14 2012-07-05 Seiko Epson Corp 電子機器

Also Published As

Publication number Publication date
CN101162237A (zh) 2008-04-16
JP2009042240A (ja) 2009-02-26
CN101162237B (zh) 2011-11-09
JP2008209388A (ja) 2008-09-11
JP2009042239A (ja) 2009-02-26

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