JP2008209388A - 加速度センサ - Google Patents

加速度センサ Download PDF

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Publication number
JP2008209388A
JP2008209388A JP2007159831A JP2007159831A JP2008209388A JP 2008209388 A JP2008209388 A JP 2008209388A JP 2007159831 A JP2007159831 A JP 2007159831A JP 2007159831 A JP2007159831 A JP 2007159831A JP 2008209388 A JP2008209388 A JP 2008209388A
Authority
JP
Japan
Prior art keywords
vibrating
additional mass
acceleration sensor
vibrating arm
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007159831A
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English (en)
Japanese (ja)
Other versions
JP2008209388A5 (enExample
Inventor
Ryuta Nishizawa
竜太 西澤
Masako Tanaka
雅子 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007159831A priority Critical patent/JP2008209388A/ja
Priority to US11/860,946 priority patent/US7802475B2/en
Priority to CN2007101524273A priority patent/CN101162237B/zh
Publication of JP2008209388A publication Critical patent/JP2008209388A/ja
Publication of JP2008209388A5 publication Critical patent/JP2008209388A5/ja
Withdrawn legal-status Critical Current

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  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP2007159831A 2006-10-13 2007-06-18 加速度センサ Withdrawn JP2008209388A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007159831A JP2008209388A (ja) 2006-10-13 2007-06-18 加速度センサ
US11/860,946 US7802475B2 (en) 2006-10-13 2007-09-25 Acceleration sensor
CN2007101524273A CN101162237B (zh) 2006-10-13 2007-10-11 加速度传感器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006279508 2006-10-13
JP2007017439 2007-01-29
JP2007159831A JP2008209388A (ja) 2006-10-13 2007-06-18 加速度センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008253519A Division JP2009042239A (ja) 2006-10-13 2008-09-30 加速度センサ

Publications (2)

Publication Number Publication Date
JP2008209388A true JP2008209388A (ja) 2008-09-11
JP2008209388A5 JP2008209388A5 (enExample) 2010-07-22

Family

ID=39785793

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (ja) 2006-10-13 2007-06-18 加速度センサ
JP2007159831A Withdrawn JP2008209388A (ja) 2006-10-13 2007-06-18 加速度センサ
JP2008253519A Withdrawn JP2009042239A (ja) 2006-10-13 2008-09-30 加速度センサ
JP2008253520A Withdrawn JP2009042240A (ja) 2006-10-13 2008-09-30 加速度センサ

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (ja) 2006-10-13 2007-06-18 加速度センサ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2008253519A Withdrawn JP2009042239A (ja) 2006-10-13 2008-09-30 加速度センサ
JP2008253520A Withdrawn JP2009042240A (ja) 2006-10-13 2008-09-30 加速度センサ

Country Status (2)

Country Link
JP (4) JP2008209389A (enExample)
CN (1) CN101162237B (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010071714A (ja) * 2008-09-17 2010-04-02 Seiko Epson Corp 振動型センサ
JP2012159494A (ja) * 2011-02-02 2012-08-23 Honeywell Internatl Inc ピエゾ電気駆動部を備えるｍｅｍｓ振動ビーム加速度計
JP2015179933A (ja) * 2014-03-19 2015-10-08 セイコーエプソン株式会社 振動素子、ジャイロセンサー素子、電子デバイス、電子機器および移動体
GB2561887A (en) * 2017-04-27 2018-10-31 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器
JP2022165531A (ja) * 2021-04-20 2022-11-01 株式会社豊田中央研究所 加速度センサ及び加速度センサ装置

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
JP5703731B2 (ja) * 2010-12-14 2015-04-22 セイコーエプソン株式会社 電子機器
JP5560805B2 (ja) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
JP5341807B2 (ja) * 2010-03-26 2013-11-13 株式会社東芝 加速度センサ
DE102010030878B4 (de) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung zur Messung einer Beschleunigung, eines Drucks und dergleichen
JP2014052263A (ja) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd 外力検出装置及び外力検出センサー
CN103197101A (zh) * 2013-04-18 2013-07-10 厦门乃尔电子有限公司 非等截面悬臂梁压电式加速度传感器
JP6044607B2 (ja) * 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
CN105429607B (zh) * 2014-09-16 2020-12-29 精工爱普生株式会社 振动装置、电子设备以及移动体
CN105865666B (zh) * 2016-05-03 2018-11-20 成都皆为科技有限公司 一种一体式双石英音叉谐振敏感元件及测力模块
DE102017217975A1 (de) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Mikromechanische Federstruktur
CN113985067A (zh) * 2021-12-29 2022-01-28 山东利恩斯智能科技有限公司 一种平面挠曲式大灵敏度加速度传感器及制作方法
US11965907B2 (en) 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression
US11953514B2 (en) 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
CN114814334B (zh) * 2022-04-14 2023-05-16 南京高华科技股份有限公司 电流传感器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2162314A (en) * 1984-07-25 1986-01-29 Stc Plc Transducer
JPS61138115A (ja) * 1984-12-04 1986-06-25 クルーゼ 共鳴器
JPS61165624A (ja) * 1977-06-07 1986-07-26 マイクロ・モ−シヨン・インコ−ポレ−テツド 流量計
JPH09257830A (ja) * 1996-03-27 1997-10-03 Toyota Central Res & Dev Lab Inc 振動型加速度センサ
JP2002218771A (ja) * 2001-01-24 2002-08-02 Matsushita Electric Ind Co Ltd アクチュエータおよびその製造方法
JP2003149261A (ja) * 2001-11-16 2003-05-21 Matsushita Electric Ind Co Ltd 加速度センサとこれを用いた自動車

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61165624A (ja) * 1977-06-07 1986-07-26 マイクロ・モ−シヨン・インコ−ポレ−テツド 流量計
GB2162314A (en) * 1984-07-25 1986-01-29 Stc Plc Transducer
JPS61138115A (ja) * 1984-12-04 1986-06-25 クルーゼ 共鳴器
JPH09257830A (ja) * 1996-03-27 1997-10-03 Toyota Central Res & Dev Lab Inc 振動型加速度センサ
JP2002218771A (ja) * 2001-01-24 2002-08-02 Matsushita Electric Ind Co Ltd アクチュエータおよびその製造方法
JP2003149261A (ja) * 2001-11-16 2003-05-21 Matsushita Electric Ind Co Ltd 加速度センサとこれを用いた自動車

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010071714A (ja) * 2008-09-17 2010-04-02 Seiko Epson Corp 振動型センサ
US8100016B2 (en) 2008-09-17 2012-01-24 Seiko Epson Corporation Vibratory sensor
JP2012159494A (ja) * 2011-02-02 2012-08-23 Honeywell Internatl Inc ピエゾ電気駆動部を備えるｍｅｍｓ振動ビーム加速度計
US9759739B2 (en) 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP2015179933A (ja) * 2014-03-19 2015-10-08 セイコーエプソン株式会社 振動素子、ジャイロセンサー素子、電子デバイス、電子機器および移動体
GB2561887A (en) * 2017-04-27 2018-10-31 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
GB2561887B (en) * 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
US11604207B2 (en) 2017-04-27 2023-03-14 Cambridge Enterprise Limited High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
JP2022165531A (ja) * 2021-04-20 2022-11-01 株式会社豊田中央研究所 加速度センサ及び加速度センサ装置
JP7331881B2 (ja) 2021-04-20 2023-08-23 株式会社豊田中央研究所 加速度センサ及び加速度センサ装置
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器

Also Published As

Publication number Publication date
JP2008209389A (ja) 2008-09-11
JP2009042240A (ja) 2009-02-26
JP2009042239A (ja) 2009-02-26
CN101162237A (zh) 2008-04-16
CN101162237B (zh) 2011-11-09

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