CN101162237B - 加速度传感器 - Google Patents

加速度传感器 Download PDF

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Publication number
CN101162237B
CN101162237B CN2007101524273A CN200710152427A CN101162237B CN 101162237 B CN101162237 B CN 101162237B CN 2007101524273 A CN2007101524273 A CN 2007101524273A CN 200710152427 A CN200710152427 A CN 200710152427A CN 101162237 B CN101162237 B CN 101162237B
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CN
China
Prior art keywords
mentioned
shaker arm
additional mass
arm
acceleration transducer
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Expired - Fee Related
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CN2007101524273A
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English (en)
Chinese (zh)
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CN101162237A (zh
Inventor
西泽竜太
田中雅子
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Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN101162237A publication Critical patent/CN101162237A/zh
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  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
CN2007101524273A 2006-10-13 2007-10-11 加速度传感器 Expired - Fee Related CN101162237B (zh)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2006279508 2006-10-13
JP2006-279508 2006-10-13
JP2006279508 2006-10-13
JP2007017439 2007-01-29
JP2007-017439 2007-01-29
JP2007017439 2007-01-29
JP2007159831 2007-06-18
JP2007-159831 2007-06-18
JP2007159831A JP2008209388A (ja) 2006-10-13 2007-06-18 加速度センサ

Publications (2)

Publication Number Publication Date
CN101162237A CN101162237A (zh) 2008-04-16
CN101162237B true CN101162237B (zh) 2011-11-09

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Family Applications (1)

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CN2007101524273A Expired - Fee Related CN101162237B (zh) 2006-10-13 2007-10-11 加速度传感器

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JP (4) JP2008209389A (enExample)
CN (1) CN101162237B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105429607A (zh) * 2014-09-16 2016-03-23 精工爱普生株式会社 振动装置、电子设备以及移动体

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446187B2 (ja) * 2008-09-17 2014-03-19 セイコーエプソン株式会社 振動片および振動型センサ
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
JP5703731B2 (ja) * 2010-12-14 2015-04-22 セイコーエプソン株式会社 電子機器
JP5560805B2 (ja) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
JP5341807B2 (ja) * 2010-03-26 2013-11-13 株式会社東芝 加速度センサ
DE102010030878B4 (de) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung zur Messung einer Beschleunigung, eines Drucks und dergleichen
US9759739B2 (en) 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP2014052263A (ja) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd 外力検出装置及び外力検出センサー
CN103197101A (zh) * 2013-04-18 2013-07-10 厦门乃尔电子有限公司 非等截面悬臂梁压电式加速度传感器
JP2015179933A (ja) * 2014-03-19 2015-10-08 セイコーエプソン株式会社 振動素子、ジャイロセンサー素子、電子デバイス、電子機器および移動体
JP6044607B2 (ja) * 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
CN105865666B (zh) * 2016-05-03 2018-11-20 成都皆为科技有限公司 一种一体式双石英音叉谐振敏感元件及测力模块
GB2561887B (en) * 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
DE102017217975A1 (de) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Mikromechanische Federstruktur
JP7331881B2 (ja) * 2021-04-20 2023-08-23 株式会社豊田中央研究所 加速度センサ及び加速度センサ装置
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器
CN113985067A (zh) * 2021-12-29 2022-01-28 山东利恩斯智能科技有限公司 一种平面挠曲式大灵敏度加速度传感器及制作方法
US11959935B2 (en) 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression
US11953514B2 (en) 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11965907B2 (en) 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
CN114814334B (zh) * 2022-04-14 2023-05-16 南京高华科技股份有限公司 电流传感器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode

Family Cites Families (6)

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Publication number Priority date Publication date Assignee Title
JPS61165624A (ja) * 1977-06-07 1986-07-26 マイクロ・モ−シヨン・インコ−ポレ−テツド 流量計
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
FR2574209B1 (fr) * 1984-12-04 1987-01-30 Onera (Off Nat Aerospatiale) Resonateur a lame vibrante
JP3368744B2 (ja) * 1996-03-27 2003-01-20 株式会社豊田中央研究所 振動型加速度センサ
JP4806850B2 (ja) * 2001-01-24 2011-11-02 パナソニック株式会社 アクチュエータ
JP2003149261A (ja) * 2001-11-16 2003-05-21 Matsushita Electric Ind Co Ltd 加速度センサとこれを用いた自動車

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开2000-206141A 2000.07.28
JP特开2000-74673A 2000.03.14
JP特开2004-301734A 2004.10.28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105429607A (zh) * 2014-09-16 2016-03-23 精工爱普生株式会社 振动装置、电子设备以及移动体

Also Published As

Publication number Publication date
JP2009042240A (ja) 2009-02-26
JP2008209389A (ja) 2008-09-11
CN101162237A (zh) 2008-04-16
JP2009042239A (ja) 2009-02-26
JP2008209388A (ja) 2008-09-11

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Granted publication date: 20111109

Termination date: 20201011