JP2008123664A5 - - Google Patents
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- Publication number
- JP2008123664A5 JP2008123664A5 JP2007289673A JP2007289673A JP2008123664A5 JP 2008123664 A5 JP2008123664 A5 JP 2008123664A5 JP 2007289673 A JP2007289673 A JP 2007289673A JP 2007289673 A JP2007289673 A JP 2007289673A JP 2008123664 A5 JP2008123664 A5 JP 2008123664A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- dielectric layer
- stop
- stop layer
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 10
- 229920002120 photoresistant polymer Polymers 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 229910052703 rhodium Inorganic materials 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/595,654 US7757380B2 (en) | 2006-11-10 | 2006-11-10 | Methods for the manufacture of notched trailing shields |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008123664A JP2008123664A (ja) | 2008-05-29 |
| JP2008123664A5 true JP2008123664A5 (enExample) | 2010-12-09 |
Family
ID=39369704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007289673A Pending JP2008123664A (ja) | 2006-11-10 | 2007-11-07 | 切欠き後縁シールドを有する垂直書込みヘッドの製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7757380B2 (enExample) |
| JP (1) | JP2008123664A (enExample) |
| CN (1) | CN101178903B (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8276258B1 (en) | 2008-08-26 | 2012-10-02 | Western Digital (Fremont), Llc | Method for fabricating a magnetic recording transducer |
| US8166631B1 (en) | 2008-08-27 | 2012-05-01 | Western Digital (Fremont), Llc | Method for fabricating a magnetic recording transducer having side shields |
| US8720044B1 (en) | 2008-09-26 | 2014-05-13 | Western Digital (Fremont), Llc | Method for manufacturing a magnetic recording transducer having side shields |
| US8231796B1 (en) * | 2008-12-09 | 2012-07-31 | Western Digital (Fremont), Llc | Method and system for providing a magnetic recording transducer having side shields |
| US8196285B1 (en) | 2008-12-17 | 2012-06-12 | Western Digital (Fremont), Llc | Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask |
| US8254060B1 (en) | 2009-04-17 | 2012-08-28 | Western Digital (Fremont), Llc | Straight top main pole for PMR bevel writer |
| US8225488B1 (en) | 2009-05-22 | 2012-07-24 | Western Digital (Fremont), Llc | Method for providing a perpendicular magnetic recording (PMR) pole |
| US9346672B1 (en) | 2009-08-04 | 2016-05-24 | Western Digital (Fremont), Llc | Methods for fabricating damascene write poles using ruthenium hard masks |
| US8547661B2 (en) * | 2009-10-21 | 2013-10-01 | Headway Technologies, Inc. | MAMR head with self-aligned write element and microwave field generator |
| US8797686B1 (en) | 2010-12-23 | 2014-08-05 | Western Digital (Fremont), Llc | Magnetic recording transducer with short effective throat height and method of fabrication |
| US8790527B1 (en) | 2011-03-22 | 2014-07-29 | Western Digital (Fremont), Llc | Method and system for manufacturing tapered waveguide structures in an energy assisted magnetic recording head |
| US8468683B2 (en) * | 2011-10-31 | 2013-06-25 | HGST Netherlands B.V. | High bevel angle magnetic writer pole fabrication process |
| US8628672B1 (en) | 2012-06-27 | 2014-01-14 | Western Digital (Fremont), Llc | Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel |
| US9042051B2 (en) | 2013-08-15 | 2015-05-26 | Western Digital (Fremont), Llc | Gradient write gap for perpendicular magnetic recording writer |
| US9082423B1 (en) | 2013-12-18 | 2015-07-14 | Western Digital (Fremont), Llc | Magnetic recording write transducer having an improved trailing surface profile |
| US9053735B1 (en) | 2014-06-20 | 2015-06-09 | Western Digital (Fremont), Llc | Method for fabricating a magnetic writer using a full-film metal planarization |
| CN108292510B (zh) * | 2015-12-28 | 2019-11-01 | Hoya株式会社 | 圆环状的玻璃坯板及制造方法、圆环状的玻璃基板的制造方法和磁盘用玻璃基板的制造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000285409A (ja) * | 1999-03-29 | 2000-10-13 | Toshiba Corp | 磁気ヘッドの製造方法および磁気ヘッド |
| WO2000077777A1 (en) * | 1999-06-14 | 2000-12-21 | Fujitsu Limited | Thin-film magnetic write head and method of manufacture thereof |
| US6757141B2 (en) * | 2002-01-18 | 2004-06-29 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular recording write head with a ferromagnetic shaping layer |
| US7082016B2 (en) * | 2002-07-22 | 2006-07-25 | Seagate Technology Llc | Multilayer magnetic shields with compensated thermal protrusion |
| US7120988B2 (en) * | 2003-09-26 | 2006-10-17 | Hitachi Global Storage Technologies Netherlands B.V. | Method for forming a write head having air bearing surface (ABS) |
| US7009812B2 (en) * | 2003-09-29 | 2006-03-07 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic transducer for perpendicular magnetic recording with single pole write head with trailing shield |
| US7134182B2 (en) * | 2003-11-17 | 2006-11-14 | Headway Technologies, Inc. | Method to form an embedded micro-pedestal in a conductive layer |
| US7265941B2 (en) * | 2004-02-27 | 2007-09-04 | Hitachi Global Storage Technologies Netherlands B.V. | Self-aligned, notched trailing shield for perpendicular recording |
| US7441325B2 (en) * | 2004-04-30 | 2008-10-28 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular head with trailing shield and rhodium gap process |
| US7296337B2 (en) * | 2004-05-25 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Notched trailing shield for perpendicular write head |
| US7296338B2 (en) * | 2004-07-30 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
| JP2006134507A (ja) * | 2004-11-08 | 2006-05-25 | Tdk Corp | 磁気ヘッドの製造方法、磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリ、ヘッドスタックアセンブリ |
| US7081041B1 (en) * | 2005-02-28 | 2006-07-25 | Hitachi Global Storage Technologies Netherlands B.V. | Manufacturing method for forming a write head top pole using chemical mechanical polishing with a DLC stop layer |
-
2006
- 2006-11-10 US US11/595,654 patent/US7757380B2/en not_active Expired - Fee Related
-
2007
- 2007-11-07 JP JP2007289673A patent/JP2008123664A/ja active Pending
- 2007-11-12 CN CN2007101863304A patent/CN101178903B/zh not_active Expired - Fee Related
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