JP2008123664A - 切欠き後縁シールドを有する垂直書込みヘッドの製造方法 - Google Patents

切欠き後縁シールドを有する垂直書込みヘッドの製造方法 Download PDF

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Publication number
JP2008123664A
JP2008123664A JP2007289673A JP2007289673A JP2008123664A JP 2008123664 A JP2008123664 A JP 2008123664A JP 2007289673 A JP2007289673 A JP 2007289673A JP 2007289673 A JP2007289673 A JP 2007289673A JP 2008123664 A JP2008123664 A JP 2008123664A
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JP
Japan
Prior art keywords
layer
dielectric layer
stop layer
stop
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007289673A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008123664A5 (enExample
Inventor
Amanda Baer
アマンダ・ベアー
Hung-Chin Guthrie
ハン‐チン・ガスリー
Yimin Hsu
イーミン・スー
Ming Jiang
ミン・ジアン
Aron Pentek
アーロン・ペンテック
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HGST Netherlands BV
HGST Inc
Original Assignee
Hitachi Global Storage Technologies Netherlands BV
Hitachi Global Storage Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Global Storage Technologies Netherlands BV, Hitachi Global Storage Technologies Inc filed Critical Hitachi Global Storage Technologies Netherlands BV
Publication of JP2008123664A publication Critical patent/JP2008123664A/ja
Publication of JP2008123664A5 publication Critical patent/JP2008123664A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G11B5/11—Shielding of head against electric or magnetic fields
    • G11B5/112—Manufacture of shielding device
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
JP2007289673A 2006-11-10 2007-11-07 切欠き後縁シールドを有する垂直書込みヘッドの製造方法 Pending JP2008123664A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/595,654 US7757380B2 (en) 2006-11-10 2006-11-10 Methods for the manufacture of notched trailing shields

Publications (2)

Publication Number Publication Date
JP2008123664A true JP2008123664A (ja) 2008-05-29
JP2008123664A5 JP2008123664A5 (enExample) 2010-12-09

Family

ID=39369704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007289673A Pending JP2008123664A (ja) 2006-11-10 2007-11-07 切欠き後縁シールドを有する垂直書込みヘッドの製造方法

Country Status (3)

Country Link
US (1) US7757380B2 (enExample)
JP (1) JP2008123664A (enExample)
CN (1) CN101178903B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011090767A (ja) * 2009-10-21 2011-05-06 Headway Technologies Inc 磁気記録ヘッドおよびその製造方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8276258B1 (en) 2008-08-26 2012-10-02 Western Digital (Fremont), Llc Method for fabricating a magnetic recording transducer
US8166631B1 (en) 2008-08-27 2012-05-01 Western Digital (Fremont), Llc Method for fabricating a magnetic recording transducer having side shields
US8720044B1 (en) 2008-09-26 2014-05-13 Western Digital (Fremont), Llc Method for manufacturing a magnetic recording transducer having side shields
US8231796B1 (en) * 2008-12-09 2012-07-31 Western Digital (Fremont), Llc Method and system for providing a magnetic recording transducer having side shields
US8196285B1 (en) 2008-12-17 2012-06-12 Western Digital (Fremont), Llc Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask
US8254060B1 (en) 2009-04-17 2012-08-28 Western Digital (Fremont), Llc Straight top main pole for PMR bevel writer
US8225488B1 (en) 2009-05-22 2012-07-24 Western Digital (Fremont), Llc Method for providing a perpendicular magnetic recording (PMR) pole
US9346672B1 (en) 2009-08-04 2016-05-24 Western Digital (Fremont), Llc Methods for fabricating damascene write poles using ruthenium hard masks
US8797686B1 (en) 2010-12-23 2014-08-05 Western Digital (Fremont), Llc Magnetic recording transducer with short effective throat height and method of fabrication
US8790527B1 (en) 2011-03-22 2014-07-29 Western Digital (Fremont), Llc Method and system for manufacturing tapered waveguide structures in an energy assisted magnetic recording head
US8468683B2 (en) * 2011-10-31 2013-06-25 HGST Netherlands B.V. High bevel angle magnetic writer pole fabrication process
US8628672B1 (en) 2012-06-27 2014-01-14 Western Digital (Fremont), Llc Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel
US9042051B2 (en) 2013-08-15 2015-05-26 Western Digital (Fremont), Llc Gradient write gap for perpendicular magnetic recording writer
US9082423B1 (en) 2013-12-18 2015-07-14 Western Digital (Fremont), Llc Magnetic recording write transducer having an improved trailing surface profile
US9053735B1 (en) 2014-06-20 2015-06-09 Western Digital (Fremont), Llc Method for fabricating a magnetic writer using a full-film metal planarization
CN108292510B (zh) * 2015-12-28 2019-11-01 Hoya株式会社 圆环状的玻璃坯板及制造方法、圆环状的玻璃基板的制造方法和磁盘用玻璃基板的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000077777A1 (en) * 1999-06-14 2000-12-21 Fujitsu Limited Thin-film magnetic write head and method of manufacture thereof
US20050259355A1 (en) * 2004-04-30 2005-11-24 Yunxiao Gao Perpendicular head with trailing shield and rhodium gap process
JP2006134507A (ja) * 2004-11-08 2006-05-25 Tdk Corp 磁気ヘッドの製造方法、磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリ、ヘッドスタックアセンブリ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000285409A (ja) * 1999-03-29 2000-10-13 Toshiba Corp 磁気ヘッドの製造方法および磁気ヘッド
US6757141B2 (en) * 2002-01-18 2004-06-29 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular recording write head with a ferromagnetic shaping layer
US7082016B2 (en) * 2002-07-22 2006-07-25 Seagate Technology Llc Multilayer magnetic shields with compensated thermal protrusion
US7120988B2 (en) * 2003-09-26 2006-10-17 Hitachi Global Storage Technologies Netherlands B.V. Method for forming a write head having air bearing surface (ABS)
US7009812B2 (en) * 2003-09-29 2006-03-07 Hitachi Global Storage Technologies Netherlands B.V. Magnetic transducer for perpendicular magnetic recording with single pole write head with trailing shield
US7134182B2 (en) * 2003-11-17 2006-11-14 Headway Technologies, Inc. Method to form an embedded micro-pedestal in a conductive layer
US7265941B2 (en) * 2004-02-27 2007-09-04 Hitachi Global Storage Technologies Netherlands B.V. Self-aligned, notched trailing shield for perpendicular recording
US7296337B2 (en) * 2004-05-25 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Notched trailing shield for perpendicular write head
US7296338B2 (en) * 2004-07-30 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording
US7081041B1 (en) * 2005-02-28 2006-07-25 Hitachi Global Storage Technologies Netherlands B.V. Manufacturing method for forming a write head top pole using chemical mechanical polishing with a DLC stop layer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000077777A1 (en) * 1999-06-14 2000-12-21 Fujitsu Limited Thin-film magnetic write head and method of manufacture thereof
US20050259355A1 (en) * 2004-04-30 2005-11-24 Yunxiao Gao Perpendicular head with trailing shield and rhodium gap process
JP2006134507A (ja) * 2004-11-08 2006-05-25 Tdk Corp 磁気ヘッドの製造方法、磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリ、ヘッドスタックアセンブリ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011090767A (ja) * 2009-10-21 2011-05-06 Headway Technologies Inc 磁気記録ヘッドおよびその製造方法

Also Published As

Publication number Publication date
US20080113514A1 (en) 2008-05-15
CN101178903B (zh) 2011-12-14
CN101178903A (zh) 2008-05-14
US7757380B2 (en) 2010-07-20

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