CN101178903B - 制造带切口的尾屏蔽件的改进方法 - Google Patents

制造带切口的尾屏蔽件的改进方法 Download PDF

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Publication number
CN101178903B
CN101178903B CN2007101863304A CN200710186330A CN101178903B CN 101178903 B CN101178903 B CN 101178903B CN 2007101863304 A CN2007101863304 A CN 2007101863304A CN 200710186330 A CN200710186330 A CN 200710186330A CN 101178903 B CN101178903 B CN 101178903B
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CN
China
Prior art keywords
layer
stop layer
deposited
dielectric layer
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007101863304A
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English (en)
Chinese (zh)
Other versions
CN101178903A (zh
Inventor
阿曼达·贝尔
亨-钦·格思里
徐一民
江明
阿伦·彭泰克
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HGST Netherlands BV
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Hitachi Global Storage Technologies Inc
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Publication date
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Publication of CN101178903A publication Critical patent/CN101178903A/zh
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Publication of CN101178903B publication Critical patent/CN101178903B/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G11B5/11—Shielding of head against electric or magnetic fields
    • G11B5/112—Manufacture of shielding device
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
CN2007101863304A 2006-11-10 2007-11-12 制造带切口的尾屏蔽件的改进方法 Expired - Fee Related CN101178903B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/595,654 2006-11-10
US11/595,654 US7757380B2 (en) 2006-11-10 2006-11-10 Methods for the manufacture of notched trailing shields

Publications (2)

Publication Number Publication Date
CN101178903A CN101178903A (zh) 2008-05-14
CN101178903B true CN101178903B (zh) 2011-12-14

Family

ID=39369704

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101863304A Expired - Fee Related CN101178903B (zh) 2006-11-10 2007-11-12 制造带切口的尾屏蔽件的改进方法

Country Status (3)

Country Link
US (1) US7757380B2 (enExample)
JP (1) JP2008123664A (enExample)
CN (1) CN101178903B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8276258B1 (en) 2008-08-26 2012-10-02 Western Digital (Fremont), Llc Method for fabricating a magnetic recording transducer
US8166631B1 (en) 2008-08-27 2012-05-01 Western Digital (Fremont), Llc Method for fabricating a magnetic recording transducer having side shields
US8720044B1 (en) 2008-09-26 2014-05-13 Western Digital (Fremont), Llc Method for manufacturing a magnetic recording transducer having side shields
US8231796B1 (en) * 2008-12-09 2012-07-31 Western Digital (Fremont), Llc Method and system for providing a magnetic recording transducer having side shields
US8196285B1 (en) 2008-12-17 2012-06-12 Western Digital (Fremont), Llc Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask
US8254060B1 (en) 2009-04-17 2012-08-28 Western Digital (Fremont), Llc Straight top main pole for PMR bevel writer
US8225488B1 (en) 2009-05-22 2012-07-24 Western Digital (Fremont), Llc Method for providing a perpendicular magnetic recording (PMR) pole
US9346672B1 (en) 2009-08-04 2016-05-24 Western Digital (Fremont), Llc Methods for fabricating damascene write poles using ruthenium hard masks
US8547661B2 (en) * 2009-10-21 2013-10-01 Headway Technologies, Inc. MAMR head with self-aligned write element and microwave field generator
US8797686B1 (en) 2010-12-23 2014-08-05 Western Digital (Fremont), Llc Magnetic recording transducer with short effective throat height and method of fabrication
US8790527B1 (en) 2011-03-22 2014-07-29 Western Digital (Fremont), Llc Method and system for manufacturing tapered waveguide structures in an energy assisted magnetic recording head
US8468683B2 (en) * 2011-10-31 2013-06-25 HGST Netherlands B.V. High bevel angle magnetic writer pole fabrication process
US8628672B1 (en) 2012-06-27 2014-01-14 Western Digital (Fremont), Llc Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel
US9042051B2 (en) 2013-08-15 2015-05-26 Western Digital (Fremont), Llc Gradient write gap for perpendicular magnetic recording writer
US9082423B1 (en) 2013-12-18 2015-07-14 Western Digital (Fremont), Llc Magnetic recording write transducer having an improved trailing surface profile
US9053735B1 (en) 2014-06-20 2015-06-09 Western Digital (Fremont), Llc Method for fabricating a magnetic writer using a full-film metal planarization
CN108292510B (zh) * 2015-12-28 2019-11-01 Hoya株式会社 圆环状的玻璃坯板及制造方法、圆环状的玻璃基板的制造方法和磁盘用玻璃基板的制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6564445B1 (en) * 1999-03-29 2003-05-20 Kabushiki Kaisha Toshiba Magnetic head manufacturing method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000077777A1 (en) * 1999-06-14 2000-12-21 Fujitsu Limited Thin-film magnetic write head and method of manufacture thereof
US6757141B2 (en) * 2002-01-18 2004-06-29 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular recording write head with a ferromagnetic shaping layer
US7082016B2 (en) * 2002-07-22 2006-07-25 Seagate Technology Llc Multilayer magnetic shields with compensated thermal protrusion
US7120988B2 (en) * 2003-09-26 2006-10-17 Hitachi Global Storage Technologies Netherlands B.V. Method for forming a write head having air bearing surface (ABS)
US7009812B2 (en) * 2003-09-29 2006-03-07 Hitachi Global Storage Technologies Netherlands B.V. Magnetic transducer for perpendicular magnetic recording with single pole write head with trailing shield
US7134182B2 (en) * 2003-11-17 2006-11-14 Headway Technologies, Inc. Method to form an embedded micro-pedestal in a conductive layer
US7265941B2 (en) * 2004-02-27 2007-09-04 Hitachi Global Storage Technologies Netherlands B.V. Self-aligned, notched trailing shield for perpendicular recording
US7441325B2 (en) * 2004-04-30 2008-10-28 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular head with trailing shield and rhodium gap process
US7296337B2 (en) * 2004-05-25 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Notched trailing shield for perpendicular write head
US7296338B2 (en) * 2004-07-30 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording
JP2006134507A (ja) * 2004-11-08 2006-05-25 Tdk Corp 磁気ヘッドの製造方法、磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリ、ヘッドスタックアセンブリ
US7081041B1 (en) * 2005-02-28 2006-07-25 Hitachi Global Storage Technologies Netherlands B.V. Manufacturing method for forming a write head top pole using chemical mechanical polishing with a DLC stop layer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6564445B1 (en) * 1999-03-29 2003-05-20 Kabushiki Kaisha Toshiba Magnetic head manufacturing method

Also Published As

Publication number Publication date
US20080113514A1 (en) 2008-05-15
JP2008123664A (ja) 2008-05-29
CN101178903A (zh) 2008-05-14
US7757380B2 (en) 2010-07-20

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SE01 Entry into force of request for substantive examination
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Owner name: HGST NETHERLANDS BV

Free format text: FORMER NAME: HITACHI GLOBAL STORAGE TECH

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Termination date: 20151112

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