JP2008041896A5 - - Google Patents

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Publication number
JP2008041896A5
JP2008041896A5 JP2006213541A JP2006213541A JP2008041896A5 JP 2008041896 A5 JP2008041896 A5 JP 2008041896A5 JP 2006213541 A JP2006213541 A JP 2006213541A JP 2006213541 A JP2006213541 A JP 2006213541A JP 2008041896 A5 JP2008041896 A5 JP 2008041896A5
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JP
Japan
Prior art keywords
substrate
sensor
support member
detects
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006213541A
Other languages
English (en)
Japanese (ja)
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JP2008041896A (ja
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Publication date
Application filed filed Critical
Priority to JP2006213541A priority Critical patent/JP2008041896A/ja
Priority claimed from JP2006213541A external-priority patent/JP2008041896A/ja
Priority to KR1020070077693A priority patent/KR20080012779A/ko
Priority to TW096128624A priority patent/TWI428585B/zh
Priority to CN2007101402238A priority patent/CN101118864B/zh
Publication of JP2008041896A publication Critical patent/JP2008041896A/ja
Publication of JP2008041896A5 publication Critical patent/JP2008041896A5/ja
Pending legal-status Critical Current

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JP2006213541A 2006-08-04 2006-08-04 基板検知機構およびそれを用いた基板処理装置 Pending JP2008041896A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006213541A JP2008041896A (ja) 2006-08-04 2006-08-04 基板検知機構およびそれを用いた基板処理装置
KR1020070077693A KR20080012779A (ko) 2006-08-04 2007-08-02 기판 검지 기구 및 그것을 이용한 기판 처리 장치
TW096128624A TWI428585B (zh) 2006-08-04 2007-08-03 A substrate inspection mechanism, and a substrate processing apparatus using the same
CN2007101402238A CN101118864B (zh) 2006-08-04 2007-08-03 基板检测机构和使用其的基板处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006213541A JP2008041896A (ja) 2006-08-04 2006-08-04 基板検知機構およびそれを用いた基板処理装置

Publications (2)

Publication Number Publication Date
JP2008041896A JP2008041896A (ja) 2008-02-21
JP2008041896A5 true JP2008041896A5 (ko) 2009-07-09

Family

ID=39054894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006213541A Pending JP2008041896A (ja) 2006-08-04 2006-08-04 基板検知機構およびそれを用いた基板処理装置

Country Status (4)

Country Link
JP (1) JP2008041896A (ko)
KR (1) KR20080012779A (ko)
CN (1) CN101118864B (ko)
TW (1) TWI428585B (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010087343A (ja) * 2008-10-01 2010-04-15 Toray Eng Co Ltd 基板処理装置及び基板載置方法
JP5473820B2 (ja) * 2010-07-29 2014-04-16 株式会社日立ハイテクノロジーズ 基板保持具及び基板搬送システム
CN103839852A (zh) * 2012-11-20 2014-06-04 上海华虹宏力半导体制造有限公司 用于灰化机台的晶圆检测装置及方法
KR102092150B1 (ko) * 2013-08-30 2020-03-23 세메스 주식회사 기판처리장치 및 방법
JP6617963B2 (ja) * 2016-02-17 2019-12-11 株式会社Ｓｃｒｅｅｎホールディングス 基板保持状態の異常検査の検査領域の自動決定方法および基板処理装置
CN107610997A (zh) * 2017-07-20 2018-01-19 江苏鲁汶仪器有限公司 一种具有晶圆位置检测装置的气相腐蚀腔体
SG11202009058SA (en) * 2018-07-30 2020-10-29 Ulvac Techno Ltd Substrate lifting apparatus and substrate transferring method
CN111233313B (zh) * 2018-11-29 2022-11-01 塔工程有限公司 基板切割装置
JP7271211B2 (ja) * 2019-02-12 2023-05-11 ニデックインスツルメンツ株式会社 基板搬送装置および基板搬送装置の制御方法
JP7279406B2 (ja) * 2019-02-26 2023-05-23 東京エレクトロン株式会社 ロードロックモジュール、基板処理装置及び基板の搬送方法
CN111579365B (zh) * 2020-05-22 2022-12-27 常熟市江威真空玻璃有限公司 一种新型真空玻璃真空度降低减缓及强度检测装置
KR102396431B1 (ko) * 2020-08-14 2022-05-10 피에스케이 주식회사 기판 처리 장치 및 기판 반송 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065691B2 (ja) * 1987-09-26 1994-01-19 株式会社東芝 半導体素子の試験方法および試験装置
JPH11195695A (ja) * 1997-12-26 1999-07-21 Advanced Display Inc 電子デバイス製造装置
JP2003218187A (ja) * 2002-01-23 2003-07-31 Nec Kagoshima Ltd ガラス基板移載装置
CN1220256C (zh) * 2002-12-27 2005-09-21 友达光电股份有限公司 基板缺陷检知装置
JP4367165B2 (ja) * 2004-02-13 2009-11-18 株式会社デンソー 半導体力学量センサの検査方法

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