JP2008030314A - 液滴吐出ヘッド及び液滴吐出装置 - Google Patents
液滴吐出ヘッド及び液滴吐出装置 Download PDFInfo
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- JP2008030314A JP2008030314A JP2006206535A JP2006206535A JP2008030314A JP 2008030314 A JP2008030314 A JP 2008030314A JP 2006206535 A JP2006206535 A JP 2006206535A JP 2006206535 A JP2006206535 A JP 2006206535A JP 2008030314 A JP2008030314 A JP 2008030314A
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- 239000007788 liquid Substances 0.000 title claims abstract description 28
- 238000009429 electrical wiring Methods 0.000 claims description 22
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 description 58
- 239000002184 metal Substances 0.000 description 58
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 18
- 238000000034 method Methods 0.000 description 18
- 239000011347 resin Substances 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 229910052721 tungsten Inorganic materials 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 8
- 239000010937 tungsten Substances 0.000 description 8
- 239000005380 borophosphosilicate glass Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/18—Electrical connection established using vias
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
【解決手段】圧電体62と圧電体62の一方の側に設けられる第1電極64と圧電体62の他方の側に設けられる第2電極58とを有する圧電素子60と、一方の側に圧電素子60の第2電極58が設けられる第1の層54と、第1の層54の他方の側に設けられる第2の層44と、第1の層54と第2の層44との間に形成される第1の電気配線52と、第1の電気配線52と第2電極58とを接続する第2の電気配線56と、を有する液滴吐出ヘッド32とする。そして、それを備えた液滴吐出装置10とする。
【選択図】図5
Description
32 インクジェット記録ヘッド(液滴吐出ヘッド)
36 ノズル
40 シリコン基板
44 LOCOS膜(第2の層)
48 BPSG膜
50 駆動素子
52 金属配線(第1の電気配線)
53 金属配線(第4の電気配線)
54 TEOS膜(第1の層)
55 金属配線(ダミーの電気配線)
56 タングステン(第2の電気配線)
57 GND用金属配線(第1の電気配線/第4の電気配線)
58 下部電極(第2電極)
60 圧電素子
62 PZT膜(圧電体)
64 上部電極(第1電極)
68 タングステン
70 振動板
72 金属配線(第3の電気配線)
82 圧力室
90 インク供給路
N インク(液体)
Claims (12)
- 圧電体と該圧電体の一方の側に設けられる第1電極と該圧電体の他方の側に設けられる第2電極とを有する圧電素子と、
一方の側に前記圧電素子の前記第2電極が設けられる第1の層と、
前記第1の層の他方の側に設けられる第2の層と、
前記第1の層と前記第2の層との間に形成される第1の電気配線と、
前記第1の電気配線と前記第2電極とを接続する第2の電気配線と、
を有することを特徴とする液滴吐出ヘッド。 - 前記第1の電気配線が、平面視で前記圧電体を形成する領域内に形成されていることを特徴とする請求項1に記載の液滴吐出ヘッド。
- 前記第1の電気配線が接続され、前記圧電体間に配設される駆動素子と、
前記駆動素子と前記第1電極とを接続する第3の電気配線と、
を有することを特徴とする請求項1又は請求項2に記載の液滴吐出ヘッド。 - 前記圧電体と前記駆動素子は、同数設けられることを特徴とする請求項3に記載の液滴吐出ヘッド。
- 前記第1の層と前記第2の層との間に形成される第4の電気配線を有することを特徴とする請求項1乃至請求項4の何れか1項に記載の液滴吐出ヘッド。
- 前記第1の電気配線を個別配線としたことを特徴とする請求項1乃至請求項5の何れか1項に記載の液滴吐出ヘッド。
- 前記第1の電気配線を共通配線としたことを特徴とする請求項1乃至請求項5の何れか1項に記載の液滴吐出ヘッド。
- 前記第1の電気配線が形成される層に、ダミーの電気配線を形成したことを特徴とする請求項1乃至請求項7の何れか1項に記載の液滴吐出ヘッド。
- 前記圧電体を形成する領域の端部を除く断面形状が、前記ダミーの電気配線の形成により、ほぼ同様であることを特徴とする請求項8に記載の液滴吐出ヘッド。
- 前記圧電素子が、ノズルから吐出する液体が充填される圧力室に面していることを特徴とする請求項1乃至請求項9の何れか1項に記載の液滴吐出ヘッド。
- 前記第2の層が、ノズルから吐出する液体が充填される圧力室に面していることを特徴とする請求項1乃至請求項9の何れか1項に記載の液滴吐出ヘッド。
- 請求項1乃至請求項11の何れか1項に記載の液滴吐出ヘッドを備えたことを特徴とする液滴吐出装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006206535A JP5011871B2 (ja) | 2006-07-28 | 2006-07-28 | 液滴吐出ヘッド及び液滴吐出装置 |
US11/820,919 US7850279B2 (en) | 2006-07-28 | 2007-06-21 | Liquid droplet ejecting head and liquid droplet ejecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006206535A JP5011871B2 (ja) | 2006-07-28 | 2006-07-28 | 液滴吐出ヘッド及び液滴吐出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008030314A true JP2008030314A (ja) | 2008-02-14 |
JP5011871B2 JP5011871B2 (ja) | 2012-08-29 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2006206535A Expired - Fee Related JP5011871B2 (ja) | 2006-07-28 | 2006-07-28 | 液滴吐出ヘッド及び液滴吐出装置 |
Country Status (2)
Country | Link |
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US (1) | US7850279B2 (ja) |
JP (1) | JP5011871B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012179785A (ja) * | 2011-03-01 | 2012-09-20 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5768393B2 (ja) * | 2011-02-10 | 2015-08-26 | 株式会社リコー | インクジェットヘッド及び画像形成装置 |
JP2023164037A (ja) * | 2022-04-28 | 2023-11-10 | セイコーエプソン株式会社 | 圧電アクチュエーターおよびその製造方法、液滴吐出ヘッド、超音波デバイス |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003246061A (ja) * | 2002-02-27 | 2003-09-02 | Kyocera Corp | インクジェット記録ヘッド及びその製造方法 |
JP2004328972A (ja) * | 2003-04-28 | 2004-11-18 | Kyocera Corp | 圧電アクチュエータおよびインクジェット記録ヘッド |
JP2006041049A (ja) * | 2004-07-23 | 2006-02-09 | Nec Corp | 圧電素子搭載装置、およびこれを用いた液滴吐出装置、画像出力装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5604522A (en) * | 1992-06-11 | 1997-02-18 | Seiko Epson Corporation | Ink jet head and a method of manufacturing the ink jet head |
JP4403597B2 (ja) | 1999-04-08 | 2010-01-27 | 富士フイルム株式会社 | インクジェットヘッドの製造方法 |
JP3772886B2 (ja) * | 2003-12-22 | 2006-05-10 | ブラザー工業株式会社 | プリント基板及びインクジェットヘッド |
-
2006
- 2006-07-28 JP JP2006206535A patent/JP5011871B2/ja not_active Expired - Fee Related
-
2007
- 2007-06-21 US US11/820,919 patent/US7850279B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003246061A (ja) * | 2002-02-27 | 2003-09-02 | Kyocera Corp | インクジェット記録ヘッド及びその製造方法 |
JP2004328972A (ja) * | 2003-04-28 | 2004-11-18 | Kyocera Corp | 圧電アクチュエータおよびインクジェット記録ヘッド |
JP2006041049A (ja) * | 2004-07-23 | 2006-02-09 | Nec Corp | 圧電素子搭載装置、およびこれを用いた液滴吐出装置、画像出力装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012179785A (ja) * | 2011-03-01 | 2012-09-20 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
Also Published As
Publication number | Publication date |
---|---|
US20080024554A1 (en) | 2008-01-31 |
US7850279B2 (en) | 2010-12-14 |
JP5011871B2 (ja) | 2012-08-29 |
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