JP5011871B2 - 液滴吐出ヘッド及び液滴吐出装置 - Google Patents
液滴吐出ヘッド及び液滴吐出装置 Download PDFInfo
- Publication number
- JP5011871B2 JP5011871B2 JP2006206535A JP2006206535A JP5011871B2 JP 5011871 B2 JP5011871 B2 JP 5011871B2 JP 2006206535 A JP2006206535 A JP 2006206535A JP 2006206535 A JP2006206535 A JP 2006206535A JP 5011871 B2 JP5011871 B2 JP 5011871B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- droplet discharge
- wiring
- film
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009429 electrical wiring Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 description 58
- 239000002184 metal Substances 0.000 description 58
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 18
- 238000000034 method Methods 0.000 description 18
- 239000011347 resin Substances 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 229910052721 tungsten Inorganic materials 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 8
- 239000010937 tungsten Substances 0.000 description 8
- 239000005380 borophosphosilicate glass Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/18—Electrical connection established using vias
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
32 インクジェット記録ヘッド(液滴吐出ヘッド)
36 ノズル
40 シリコン基板
44 LOCOS膜(第2の層)
48 BPSG膜
50 駆動素子
52 金属配線(第1の電気配線)
53 金属配線(第4の電気配線)
54 TEOS膜(第1の層)
55 金属配線(ダミーの電気配線)
56 タングステン(第2の電気配線)
57 GND用金属配線(第1の電気配線/第4の電気配線)
58 下部電極(第2電極)
60 圧電素子
62 PZT膜(圧電体)
64 上部電極(第1電極)
68 タングステン
70 振動板
72 金属配線(第3の電気配線)
82 圧力室
90 インク供給路
N インク(液体)
Claims (8)
- 圧電体と該圧電体の一方の側に設けられた第1電極と該圧電体の他方の側に設けられた第2電極とを備えた複数の圧電素子と、
一方の側に前記各圧電素子の前記第2電極が設けられた第1の層と、
前記第1の層の他方の側に設けられた第2の層と、
前記第1の層と前記第2の層との間で、かつ平面視で前記各圧電素子上を通るように、前記各圧電素子が並ぶ方向に沿って伸び、前記各圧電素子の前記第2電極に個別配線として接続される複数の第1の電気配線と、
前記各第1の電気配線と前記各圧電素子の前記第2電極とを接続する複数の第2の電気配線と、
前記各第1の電気配線が形成される層に、平面視で前記各第1の電気配線と直線を成すように形成され、前記各第1の電気配線が通らない前記各圧電素子上を通る、電気的に接続されていない複数のダミーの電気配線と、
を有することを特徴とする液滴吐出ヘッド。 - 前記ダミーの電気配線の本数は、前記第1の電気配線の本数と等しいことを特徴とする請求項1に記載の液滴吐出ヘッド。
- 前記各ダミーの電気配線の幅は、前記各第1の電気配線の幅と等しいことを特徴とする請求項1又は請求項2に記載の液滴吐出ヘッド。
- 前記各第1の電気配線が接続され、平面視で前記各圧電素子間に配設された複数の駆動素子と、
前記各駆動素子と前記各圧電素子の前記第1電極とを接続する複数の第3の電気配線と、
を有することを特徴とする請求項1〜請求項3の何れか1項に記載の液滴吐出ヘッド。 - 前記第1の層と前記第2の層との間で、かつ前記第1の電気配線と上下にオフセットされた位置に形成された第4の電気配線を有することを特徴とする請求項1〜請求項4の何れか1項に記載の液滴吐出ヘッド。
- 前記圧電素子が、ノズルから吐出する液体が充填される圧力室に面していることを特徴とする請求項1〜請求項5の何れか1項に記載の液滴吐出ヘッド。
- 前記第2の層が、ノズルから吐出する液体が充填される圧力室に面していることを特徴とする請求項1〜請求項5の何れか1項に記載の液滴吐出ヘッド。
- 請求項1〜請求項7の何れか1項に記載の液滴吐出ヘッドを備えたことを特徴とする液滴吐出装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006206535A JP5011871B2 (ja) | 2006-07-28 | 2006-07-28 | 液滴吐出ヘッド及び液滴吐出装置 |
US11/820,919 US7850279B2 (en) | 2006-07-28 | 2007-06-21 | Liquid droplet ejecting head and liquid droplet ejecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006206535A JP5011871B2 (ja) | 2006-07-28 | 2006-07-28 | 液滴吐出ヘッド及び液滴吐出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008030314A JP2008030314A (ja) | 2008-02-14 |
JP5011871B2 true JP5011871B2 (ja) | 2012-08-29 |
Family
ID=38985750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006206535A Expired - Fee Related JP5011871B2 (ja) | 2006-07-28 | 2006-07-28 | 液滴吐出ヘッド及び液滴吐出装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7850279B2 (ja) |
JP (1) | JP5011871B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5768393B2 (ja) * | 2011-02-10 | 2015-08-26 | 株式会社リコー | インクジェットヘッド及び画像形成装置 |
JP2012179785A (ja) * | 2011-03-01 | 2012-09-20 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
JP2023164037A (ja) * | 2022-04-28 | 2023-11-10 | セイコーエプソン株式会社 | 圧電アクチュエーターおよびその製造方法、液滴吐出ヘッド、超音波デバイス |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993025390A1 (en) * | 1992-06-11 | 1993-12-23 | Seiko Epson Corporation | Ink jet head and method of manufacturing ink jet head |
JP4403597B2 (ja) | 1999-04-08 | 2010-01-27 | 富士フイルム株式会社 | インクジェットヘッドの製造方法 |
JP2003246061A (ja) * | 2002-02-27 | 2003-09-02 | Kyocera Corp | インクジェット記録ヘッド及びその製造方法 |
JP4330374B2 (ja) * | 2003-04-28 | 2009-09-16 | 京セラ株式会社 | 圧電アクチュエータおよびインクジェット記録ヘッド |
JP3772886B2 (ja) * | 2003-12-22 | 2006-05-10 | ブラザー工業株式会社 | プリント基板及びインクジェットヘッド |
JP4771042B2 (ja) * | 2004-07-23 | 2011-09-14 | ゲットナー・ファンデーション・エルエルシー | 圧電素子搭載装置、およびこれを用いた液滴吐出装置、画像出力装置 |
-
2006
- 2006-07-28 JP JP2006206535A patent/JP5011871B2/ja not_active Expired - Fee Related
-
2007
- 2007-06-21 US US11/820,919 patent/US7850279B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2008030314A (ja) | 2008-02-14 |
US7850279B2 (en) | 2010-12-14 |
US20080024554A1 (en) | 2008-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7448731B2 (en) | Liquid droplet ejecting head and liquid droplet ejecting device | |
KR101080824B1 (ko) | 액적 토출 헤드, 액적 토출 장치 및 화상 형성 장치 | |
JP5012043B2 (ja) | 液滴吐出ヘッド及びインクジェット記録装置 | |
US8173203B2 (en) | Method of manufacturing piezoelectric actuator and method of manufacturing liquid transporting apparatus | |
US7766461B2 (en) | Liquid droplet ejecting head, image forming device, and method of manufacturing liquid droplet ejecting head | |
JP4992414B2 (ja) | 液滴吐出ヘッド及び液滴吐出装置 | |
US8002390B2 (en) | Piezoelectric element substrate, liquid droplet ejecting head, liquid droplet ejecting device, and piezoelectric element substrate manufacturing method | |
JP2008094019A (ja) | 液滴吐出ヘッド及び液滴吐出装置 | |
JP5011871B2 (ja) | 液滴吐出ヘッド及び液滴吐出装置 | |
JP4386091B2 (ja) | 液滴吐出ヘッド及び画像形成装置 | |
US7448733B2 (en) | Liquid droplet ejecting head and liquid droplet ejecting device | |
JP2009208234A (ja) | 配線基板、液滴吐出ヘッド、液滴吐出装置、及び、配線基板の製造方法 | |
JP4826511B2 (ja) | 液滴吐出ヘッド及び液滴吐出装置 | |
JP2008173924A (ja) | 液滴吐出ヘッド | |
US20080143794A1 (en) | Piezoelectric element, liquid droplet ejecting head, image forming device, and method of manufacturing liquid droplet ejecting head | |
JP2006264079A (ja) | 液滴吐出ヘッド、液滴吐出装置、及び、液滴吐出ヘッド製造方法 | |
JP2008036870A (ja) | 液体吐出装置及びその製造方法 | |
JP2006088676A (ja) | インクジェット記録ヘッド、インクジェット記録装置及びインクジェット記録ヘッドの製造方法 | |
JP6295860B2 (ja) | 電子回路基板、及び、電子機器 | |
JP4639957B2 (ja) | 液滴吐出ヘッド及び液滴吐出装置 | |
JP2007168175A (ja) | 液滴吐出ヘッド及び液滴吐出装置 | |
JP2007160536A (ja) | 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド並びに液滴吐出装置 | |
JP4867402B2 (ja) | 圧電アクチュエータ及び液滴吐出装置及び圧電アクチュエータ製造方法 | |
JP2007331175A (ja) | 液滴吐出ヘッドの製造方法 | |
JP2007301740A (ja) | 液滴吐出ヘッドの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090212 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110520 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110524 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110720 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120508 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120521 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150615 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5011871 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |