JP2007522677A - 集積型iii族−窒化物電力デバイス - Google Patents
集積型iii族−窒化物電力デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 claims abstract description 62
- 229910002704 AlGaN Inorganic materials 0.000 claims description 3
- 238000002513 implantation Methods 0.000 claims description 2
- 230000010354 integration Effects 0.000 claims description 2
- 238000002955 isolation Methods 0.000 description 8
- 230000002457 bidirectional effect Effects 0.000 description 7
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 241000270295 Serpentes Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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Abstract
Description
Claims (22)
- 第1のIII族−窒化物ベースの半導体デバイスと、
第2のIII族−窒化物ベースの半導体デバイスとを備え、
前記第1のIII族−窒化物ベースの半導体デバイスおよび前記第2のIII族−窒化物ベースの半導体デバイスが、集積デバイスを形成するように共通のダイ内で形成されることを特徴とする集積半導体デバイス。 - 前記第1および前記第2の半導体デバイスは、高電子移動度トランジスタであることを特徴とする請求項1に記載の集積デバイス。
- 前記第1および前記第2の半導体デバイスは、ハーフブリッジを形成するように集積されることを特徴とする請求項1に記載の集積デバイス。
- 前記ハーフブリッジは、前記第1と前記第2のIII族−窒化物半導体デバイス両方に電気的に接続された、またそれらに共通な切替えノードパッドを含むことを特徴とする請求項3に記載の集積デバイス。
- 前記共通のダイ内で形成された第3のIII族−窒化物半導体デバイスおよび第4のIII族−窒化物半導体デバイスをさらに備えることを特徴とする請求項1に記載の集積デバイス。
- 前記第1、前記第2、前記第3、前記第4の半導体デバイスは、Hブリッジを形成するように相互接続された高電子移動度トランジスタであることを特徴とする請求項5に記載の集積デバイス。
- 前記第1、前記第2、前記第3、前記第4の半導体デバイスは、整流器ブリッジを形成するように相互接続されたショットキダイオードであることを特徴とする請求項5に記載の集積デバイス。
- 前記第1および前記第2のデバイスは、双方向であり、ハーフブリッジを形成するように相互接続され、前記第3および前記第4のデバイスは、共通ドレインを有するように相互接続された高電子移動度トランジスタであることを特徴とする請求項5に記載の集積デバイス。
- 前記第1および前記第2の半導体デバイスが第1のハーフブリッジを形成するように相互接続され、すべて共通のダイ内で形成された第3、第4、第5、第6のIII族−窒化物半導体デバイスをさらに備え、前記第4と前記第3と前記第4のデバイスが、第2のハーフブリッジを形成するように接続され、前記第5と前記第6の半導体デバイスが、第3のハーフブリッジを形成するように接続されることを特徴とする請求項1に記載の集積デバイス。
- 前記第1、前記第2、前記第3、前記第4、前記第5、前記第6のデバイスは、高電子移動度トランジスタであることを特徴とする請求項9に記載の集積デバイス。
- 各ハーフブリッジは、そのそれぞれのデバイスに共通の切替えノードパッドを含むことを特徴とする請求項9に記載の集積デバイス。
- 各ハーフブリッジが共通バスパッドおよび共通グランドパッドに接続されることを特徴とする請求項9に記載の集積デバイス。
- 前記III族−窒化物半導体デバイスが、第1の種類の第1のIII族半導体本体と第2の種類の第2の半導体本体とを含むダイ内で形成され、前記第2の半導体本体は、前記第1の半導体本体と異なるバンドギャップを有することを特徴とする請求項1に記載の集積デバイス。
- 前記各半導体デバイスは、2つの離隔されたオーミック電極と、ゲート電極とを含むことを特徴とする請求項13に記載の集積デバイス。
- 前記ゲート電極は、前記第2の半導体本体とショットキ接触することを特徴とする請求項14に記載の集積デバイス。
- 前記ゲート電極が、ゲート絶縁本体によって前記第2の半導体本体から絶縁されることを特徴とする請求項14に記載の集積デバイス。
- 前記半導体デバイスの少なくとも1つは、オーミック電極とショットキ電極とを含むことを特徴とする請求項13に記載の集積デバイス。
- 前記第1の半導体本体はGaNを含み、前記第2の半導体本体はAlGaNを含むことを特徴とする請求項13に記載の集積デバイス。
- 前記デバイスが互いに電気的に分離されることを特徴とする請求項13に記載の集積デバイス。
- 前記デバイスを電気的に分離するために、前記第2の半導体本体内で凹部が形成されることを特徴とする請求項19に記載の集積デバイス。
- 前記凹部は、前記第1の半導体本体に達することを特徴とする請求項20に記載の集積デバイス。
- 前記第2の半導体本体は、前記半導体デバイスを分離するために、注入領域を含むことを特徴とする請求項19に記載の集積デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US54462604P | 2004-02-12 | 2004-02-12 | |
US11/056,794 US7550781B2 (en) | 2004-02-12 | 2005-02-11 | Integrated III-nitride power devices |
PCT/US2005/004388 WO2005079293A2 (en) | 2004-02-12 | 2005-02-14 | Integrated iii-nitride power devices |
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Publication Number | Publication Date |
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JP2007522677A true JP2007522677A (ja) | 2007-08-09 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006553268A Pending JP2007522677A (ja) | 2004-02-12 | 2005-02-14 | 集積型iii族−窒化物電力デバイス |
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Country | Link |
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US (1) | US7550781B2 (ja) |
JP (1) | JP2007522677A (ja) |
KR (1) | KR100868103B1 (ja) |
DE (1) | DE112005000352T5 (ja) |
WO (1) | WO2005079293A2 (ja) |
Cited By (3)
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JP2010109322A (ja) * | 2008-09-30 | 2010-05-13 | Fuji Electric Systems Co Ltd | 窒化ガリウム半導体装置およびその製造方法 |
JP2012084743A (ja) * | 2010-10-13 | 2012-04-26 | Fujitsu Semiconductor Ltd | 半導体装置及び電源装置 |
US10510656B2 (en) | 2014-07-30 | 2019-12-17 | Panasonic Intellectual Property Management Co., Ltd. | Semiconductor device |
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Also Published As
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KR20060110357A (ko) | 2006-10-24 |
WO2005079293A2 (en) | 2005-09-01 |
KR100868103B1 (ko) | 2008-11-11 |
DE112005000352T5 (de) | 2007-03-01 |
US20050189562A1 (en) | 2005-09-01 |
US7550781B2 (en) | 2009-06-23 |
WO2005079293A3 (en) | 2006-04-06 |
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