JP2007521438A5 - - Google Patents
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- Publication number
- JP2007521438A5 JP2007521438A5 JP2006517209A JP2006517209A JP2007521438A5 JP 2007521438 A5 JP2007521438 A5 JP 2007521438A5 JP 2006517209 A JP2006517209 A JP 2006517209A JP 2006517209 A JP2006517209 A JP 2006517209A JP 2007521438 A5 JP2007521438 A5 JP 2007521438A5
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- purge valve
- open
- purge
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims 81
- 238000000034 method Methods 0.000 claims 40
- 239000003990 capacitor Substances 0.000 claims 11
- 230000010485 coping Effects 0.000 claims 4
- 230000002265 prevention Effects 0.000 claims 2
- 238000005086 pumping Methods 0.000 claims 2
- 230000000977 initiatory effect Effects 0.000 claims 1
- 230000008929 regeneration Effects 0.000 claims 1
- 238000011069 regeneration method Methods 0.000 claims 1
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/608,851 | 2003-06-27 | ||
| US10/608,770 US20040261424A1 (en) | 2003-06-27 | 2003-06-27 | Integration of automated cryopump safety purge with set point |
| US10/608,779 | 2003-06-27 | ||
| US10/608,851 US6920763B2 (en) | 2003-06-27 | 2003-06-27 | Integration of automated cryopump safety purge |
| US10/608,779 US6895766B2 (en) | 2003-06-27 | 2003-06-27 | Fail-safe cryopump safety purge delay |
| US10/608,770 | 2003-06-27 | ||
| PCT/US2004/018269 WO2005005833A2 (en) | 2003-06-27 | 2004-06-09 | Integration of automated cryopump safety purge |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007521438A JP2007521438A (ja) | 2007-08-02 |
| JP2007521438A5 true JP2007521438A5 (https=) | 2007-09-13 |
| JP4691026B2 JP4691026B2 (ja) | 2011-06-01 |
Family
ID=34069129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006517209A Expired - Lifetime JP4691026B2 (ja) | 2003-06-27 | 2004-06-09 | クライオポンプ自動安全パージの一体化 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7415831B2 (https=) |
| EP (3) | EP1649166B1 (https=) |
| JP (1) | JP4691026B2 (https=) |
| KR (1) | KR101084896B1 (https=) |
| AT (3) | ATE506540T1 (https=) |
| DE (3) | DE602004015858D1 (https=) |
| TW (1) | TWI322031B (https=) |
| WO (1) | WO2005005833A2 (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1649166B1 (en) * | 2003-06-27 | 2007-02-28 | Helix Technology Corporation | Integration of automated cryopump safety purge |
| IL180875A0 (en) * | 2007-01-22 | 2007-07-04 | Ricor Ltd | Gas purge method and apparatus |
| TWI490408B (zh) | 2008-04-04 | 2015-07-01 | Brooks Automation Inc | 利用錫鎵合金的低溫泵 |
| JP5084794B2 (ja) * | 2009-07-22 | 2012-11-28 | 住友重機械工業株式会社 | クライオポンプ、及びクライオポンプの監視方法 |
| US20110283737A1 (en) * | 2010-05-20 | 2011-11-24 | Siemens Medical Solutions Usa, Inc. | Process for separating gases at cryogenic temperatures |
| KR101554866B1 (ko) * | 2010-11-24 | 2015-09-22 | 브룩스 오토메이션, 인크. | 수소 가스 방출을 제어하는 저온 펌프 |
| KR102033142B1 (ko) * | 2011-02-09 | 2019-10-16 | 브룩스 오토메이션, 인크. | 극저온 펌프 |
| TWI646264B (zh) | 2011-03-04 | 2019-01-01 | 美商布魯克機械公司 | 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法 |
| JP5669658B2 (ja) * | 2011-04-11 | 2015-02-12 | 住友重機械工業株式会社 | クライオポンプシステム、圧縮機、及びクライオポンプの再生方法 |
| JP5679910B2 (ja) * | 2011-06-03 | 2015-03-04 | 住友重機械工業株式会社 | クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法 |
| JP5846966B2 (ja) * | 2012-03-01 | 2016-01-20 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
| JP6433365B2 (ja) * | 2015-04-03 | 2018-12-05 | 三菱電機株式会社 | 放射線モニタ |
| JP6819304B2 (ja) | 2017-01-12 | 2021-01-27 | 株式会社島津製作所 | 真空バルブ、真空ポンプおよび真空排気システム |
| JP2020510558A (ja) * | 2017-03-06 | 2020-04-09 | マンダック ホールディングス， エルエルシー | 冷却システムおよび方法 |
| WO2023145385A1 (ja) * | 2022-01-31 | 2023-08-03 | 住友重機械工業株式会社 | クライオポンプシステムおよび再生コントローラ |
| JP2024085232A (ja) * | 2022-12-14 | 2024-06-26 | 住友重機械工業株式会社 | クライオポンプおよびクライオポンプ再生方法 |
| CN116906297B (zh) * | 2023-09-12 | 2023-12-08 | 中国科学院合肥物质科学研究院 | 一种适用于托卡马克稳态运行的低温泵快再生系统及方法 |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3254871A (en) | 1963-10-31 | 1966-06-07 | Auto Tronic Control Co Inc | Time delay system |
| US3663299A (en) * | 1970-08-31 | 1972-05-16 | Gould Sonics Inc | Solid state electric cell having stabilized resistance |
| CA1089054A (en) | 1976-08-20 | 1980-11-04 | William F. Helwig, Jr. | Delay circuit |
| US4105900A (en) * | 1977-02-16 | 1978-08-08 | The Boeing Company | Signal selection apparatus for redundant signal sources |
| US4472176A (en) * | 1983-08-01 | 1984-09-18 | Resource Systems, Inc. | Apparatus and method for the production of pure hydrogen from a hydrogen-containing crude gas |
| US4555907A (en) | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
| US4718240A (en) | 1985-03-01 | 1988-01-12 | Helix Technology Corporation | Cryopump regeneration method and apparatus |
| US4735084A (en) | 1985-10-01 | 1988-04-05 | Varian Associates, Inc. | Method and apparatus for gross leak detection |
| EP0250613B1 (de) * | 1986-06-23 | 1991-07-17 | Leybold Aktiengesellschaft | Kryopumpe und Verfahren zum Betrieb dieser Kryopumpe |
| EP0336992A1 (de) | 1988-04-13 | 1989-10-18 | Leybold Aktiengesellschaft | Verfahren und Vorrichtung zur Überprüfung der Funktion einer refrigeratorbetriebenen Kryopumpe |
| US5443368A (en) | 1993-07-16 | 1995-08-22 | Helix Technology Corporation | Turbomolecular pump with valves and integrated electronic controls |
| US5157928A (en) * | 1988-09-13 | 1992-10-27 | Helix Technology Corporation | Electronically controlled cryopump |
| US4918930A (en) | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
| US6318093B2 (en) | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
| US5174364A (en) * | 1988-09-21 | 1992-12-29 | Nec Corporation | Cooling abnormality detection system for electronic equipment |
| JP2538796B2 (ja) | 1989-05-09 | 1996-10-02 | 株式会社東芝 | 真空排気装置および真空排気方法 |
| US5123277A (en) | 1990-06-04 | 1992-06-23 | Westinghouse Electric Corp. | Apparatus and method for analyzing gas dryer performance |
| JP2574586B2 (ja) | 1990-11-19 | 1997-01-22 | ライボルト アクチエンゲゼルシヤフト | クライオポンプを再生する方法及びこの方法を実施するのに適したクライオポンプ |
| US5305612A (en) | 1992-07-06 | 1994-04-26 | Ebara Technologies Incorporated | Cryopump method and apparatus |
| US5513499A (en) * | 1994-04-08 | 1996-05-07 | Ebara Technologies Incorporated | Method and apparatus for cryopump regeneration using turbomolecular pump |
| EP0684382B1 (en) * | 1994-04-28 | 2000-03-22 | Ebara Corporation | Cryopump |
| US5684463A (en) | 1994-05-23 | 1997-11-04 | Diercks; Richard Lee Roi | Electronic refrigeration and air conditioner monitor and alarm |
| US5517823A (en) | 1995-01-18 | 1996-05-21 | Helix Technology Corporation | Pressure controlled cryopump regeneration method and system |
| US5673514A (en) | 1995-09-29 | 1997-10-07 | Mckeon Rolling Steel Door Company, Inc. | Time delay release mechanism for a fire barrier |
| US5761090A (en) * | 1995-10-10 | 1998-06-02 | The University Of Chicago | Expert system for testing industrial processes and determining sensor status |
| JP4297975B2 (ja) * | 1996-03-20 | 2009-07-15 | ブルックス オートメーション インコーポレイテッド | クライオポンプのパージおよび低真空化による再生方法、クライオポンプおよび制御装置 |
| US5906102A (en) | 1996-04-12 | 1999-05-25 | Helix Technology Corporation | Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve |
| US5971711A (en) * | 1996-05-21 | 1999-10-26 | Ebara Corporation | Vacuum pump control system |
| US5799493A (en) | 1996-09-05 | 1998-09-01 | Helix Technology Corporation | Corrosion resistant cryopump |
| US5727392A (en) | 1996-12-19 | 1998-03-17 | Helix Technology Corporation | Convection-shielded cryopump |
| EP1012478A2 (en) | 1997-04-18 | 2000-06-28 | SAES PURE GAS, Inc. | In situ getter pump system and method |
| JP2942239B2 (ja) * | 1997-05-23 | 1999-08-30 | キヤノン株式会社 | 排気方法及び排気装置、それを用いたプラズマ処理方法及びプラズマ処理装置 |
| US5819545A (en) | 1997-08-28 | 1998-10-13 | Helix Technology Corporation | Cryopump with selective condensation and defrost |
| US6272400B1 (en) | 1998-07-13 | 2001-08-07 | Helix Technology Corporation | Vacuum network controller |
| US6216467B1 (en) | 1998-11-06 | 2001-04-17 | Helix Technology Corporation | Cryogenic refrigerator with a gaseous contaminant removal system |
| US6257001B1 (en) * | 1999-08-24 | 2001-07-10 | Lucent Technologies, Inc. | Cryogenic vacuum pump temperature sensor |
| JP4274648B2 (ja) | 1999-09-29 | 2009-06-10 | 住友重機械工業株式会社 | クライオポンプの制御装置 |
| US7041224B2 (en) * | 1999-10-26 | 2006-05-09 | Reflectivity, Inc. | Method for vapor phase etching of silicon |
| US6327863B1 (en) * | 2000-05-05 | 2001-12-11 | Helix Technology Corporation | Cryopump with gate valve control |
| US6341615B1 (en) * | 2000-09-13 | 2002-01-29 | Air Products And Chemicals, Inc. | Self-cleaning vacuum purge system |
| JP4071449B2 (ja) * | 2001-03-27 | 2008-04-02 | 株式会社東芝 | センサ異常検出方法及びセンサ異常検出装置 |
| US6427969B1 (en) | 2001-04-27 | 2002-08-06 | Helix Technology Inc. | Adjustable gate valve assembly for vacuum chamber |
| WO2002091410A1 (en) * | 2001-05-07 | 2002-11-14 | Cooper Technologies Company | Microfabricated electrochemical device separators |
| US6510697B2 (en) | 2001-06-07 | 2003-01-28 | Helix Technology Corporation | System and method for recovering from a power failure in a cryopump |
| US6866698B2 (en) * | 2003-03-19 | 2005-03-15 | Johnson Matthey Public Limited Company | Hydrogen purification apparatus |
| US6895766B2 (en) | 2003-06-27 | 2005-05-24 | Helix Technology Corporation | Fail-safe cryopump safety purge delay |
| US20040261424A1 (en) | 2003-06-27 | 2004-12-30 | Helix Technology Corporation | Integration of automated cryopump safety purge with set point |
| EP1649166B1 (en) | 2003-06-27 | 2007-02-28 | Helix Technology Corporation | Integration of automated cryopump safety purge |
| US6920763B2 (en) | 2003-06-27 | 2005-07-26 | Helix Technology Corporation | Integration of automated cryopump safety purge |
| CA2602123A1 (en) * | 2005-03-17 | 2006-09-21 | Hydrogenics Corporation | Method, system and apparatus for diagnostic testing of an electrochemical cell stack |
-
2004
- 2004-06-09 EP EP04754770A patent/EP1649166B1/en not_active Expired - Lifetime
- 2004-06-09 DE DE602004015858T patent/DE602004015858D1/de not_active Expired - Lifetime
- 2004-06-09 JP JP2006517209A patent/JP4691026B2/ja not_active Expired - Lifetime
- 2004-06-09 DE DE602004032399T patent/DE602004032399D1/de not_active Expired - Lifetime
- 2004-06-09 DE DE602004005047T patent/DE602004005047T2/de not_active Expired - Lifetime
- 2004-06-09 EP EP07075050A patent/EP1780414B1/en not_active Expired - Lifetime
- 2004-06-09 WO PCT/US2004/018269 patent/WO2005005833A2/en not_active Ceased
- 2004-06-09 AT AT08075586T patent/ATE506540T1/de not_active IP Right Cessation
- 2004-06-09 AT AT04754770T patent/ATE355461T1/de not_active IP Right Cessation
- 2004-06-09 KR KR1020057024952A patent/KR101084896B1/ko not_active Expired - Lifetime
- 2004-06-09 AT AT07075050T patent/ATE404792T1/de not_active IP Right Cessation
- 2004-06-09 EP EP08075586A patent/EP1980748B1/en not_active Expired - Lifetime
- 2004-06-14 TW TW093117014A patent/TWI322031B/zh not_active IP Right Cessation
-
2005
- 2005-05-23 US US11/136,325 patent/US7415831B2/en not_active Expired - Lifetime
-
2008
- 2008-07-22 US US12/177,737 patent/US9970427B2/en not_active Expired - Lifetime
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