TWI322031B - Integration of automated cryopump safety purge - Google Patents
Integration of automated cryopump safety purge Download PDFInfo
- Publication number
- TWI322031B TWI322031B TW093117014A TW93117014A TWI322031B TW I322031 B TWI322031 B TW I322031B TW 093117014 A TW093117014 A TW 093117014A TW 93117014 A TW93117014 A TW 93117014A TW I322031 B TWI322031 B TW I322031B
- Authority
- TW
- Taiwan
- Prior art keywords
- valve body
- cryopump
- purge
- open
- purge valve
- Prior art date
Links
- 238000010926 purge Methods 0.000 title claims abstract description 147
- 230000010354 integration Effects 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 70
- 238000000746 purification Methods 0.000 claims description 45
- 239000003990 capacitor Substances 0.000 claims description 31
- 238000011069 regeneration method Methods 0.000 claims description 19
- 230000007246 mechanism Effects 0.000 claims description 16
- 230000008929 regeneration Effects 0.000 claims description 13
- 230000004044 response Effects 0.000 claims description 11
- 235000013399 edible fruits Nutrition 0.000 claims description 8
- 238000005086 pumping Methods 0.000 claims description 6
- 230000008439 repair process Effects 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000005202 decontamination Methods 0.000 claims description 4
- 230000003588 decontaminative effect Effects 0.000 claims description 4
- 208000031872 Body Remains Diseases 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 238000013022 venting Methods 0.000 claims description 2
- 230000009471 action Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 70
- 238000011084 recovery Methods 0.000 description 23
- 239000001257 hydrogen Substances 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 238000004891 communication Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 231100001261 hazardous Toxicity 0.000 description 6
- 238000010792 warming Methods 0.000 description 6
- 241001070941 Castanea Species 0.000 description 5
- 235000014036 Castanea Nutrition 0.000 description 5
- 230000000977 initiatory effect Effects 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000001172 regenerating effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000012356 Product development Methods 0.000 description 1
- 241000239226 Scorpiones Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 210000000038 chest Anatomy 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000036461 convulsion Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- F04B37/085—Regeneration of cryo-pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2270/00—Control
- F05B2270/30—Control parameters, e.g. input parameters
- F05B2270/303—Temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Compressor (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/608,770 US20040261424A1 (en) | 2003-06-27 | 2003-06-27 | Integration of automated cryopump safety purge with set point |
| US10/608,851 US6920763B2 (en) | 2003-06-27 | 2003-06-27 | Integration of automated cryopump safety purge |
| US10/608,779 US6895766B2 (en) | 2003-06-27 | 2003-06-27 | Fail-safe cryopump safety purge delay |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200502034A TW200502034A (en) | 2005-01-16 |
| TWI322031B true TWI322031B (en) | 2010-03-21 |
Family
ID=34069129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093117014A TWI322031B (en) | 2003-06-27 | 2004-06-14 | Integration of automated cryopump safety purge |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7415831B2 (https=) |
| EP (3) | EP1649166B1 (https=) |
| JP (1) | JP4691026B2 (https=) |
| KR (1) | KR101084896B1 (https=) |
| AT (3) | ATE506540T1 (https=) |
| DE (3) | DE602004015858D1 (https=) |
| TW (1) | TWI322031B (https=) |
| WO (1) | WO2005005833A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI493106B (zh) * | 2011-04-11 | 2015-07-21 | Sumitomo Heavy Industries | Cryogenic pump system, compressor and cryogenic pump regeneration method |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1649166B1 (en) * | 2003-06-27 | 2007-02-28 | Helix Technology Corporation | Integration of automated cryopump safety purge |
| IL180875A0 (en) * | 2007-01-22 | 2007-07-04 | Ricor Ltd | Gas purge method and apparatus |
| TWI490408B (zh) | 2008-04-04 | 2015-07-01 | Brooks Automation Inc | 利用錫鎵合金的低溫泵 |
| JP5084794B2 (ja) * | 2009-07-22 | 2012-11-28 | 住友重機械工業株式会社 | クライオポンプ、及びクライオポンプの監視方法 |
| US20110283737A1 (en) * | 2010-05-20 | 2011-11-24 | Siemens Medical Solutions Usa, Inc. | Process for separating gases at cryogenic temperatures |
| KR101554866B1 (ko) * | 2010-11-24 | 2015-09-22 | 브룩스 오토메이션, 인크. | 수소 가스 방출을 제어하는 저온 펌프 |
| KR102033142B1 (ko) * | 2011-02-09 | 2019-10-16 | 브룩스 오토메이션, 인크. | 극저온 펌프 |
| TWI646264B (zh) | 2011-03-04 | 2019-01-01 | 美商布魯克機械公司 | 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法 |
| JP5679910B2 (ja) * | 2011-06-03 | 2015-03-04 | 住友重機械工業株式会社 | クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法 |
| JP5846966B2 (ja) * | 2012-03-01 | 2016-01-20 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
| JP6433365B2 (ja) * | 2015-04-03 | 2018-12-05 | 三菱電機株式会社 | 放射線モニタ |
| JP6819304B2 (ja) | 2017-01-12 | 2021-01-27 | 株式会社島津製作所 | 真空バルブ、真空ポンプおよび真空排気システム |
| JP2020510558A (ja) * | 2017-03-06 | 2020-04-09 | マンダック ホールディングス， エルエルシー | 冷却システムおよび方法 |
| WO2023145385A1 (ja) * | 2022-01-31 | 2023-08-03 | 住友重機械工業株式会社 | クライオポンプシステムおよび再生コントローラ |
| JP2024085232A (ja) * | 2022-12-14 | 2024-06-26 | 住友重機械工業株式会社 | クライオポンプおよびクライオポンプ再生方法 |
| CN116906297B (zh) * | 2023-09-12 | 2023-12-08 | 中国科学院合肥物质科学研究院 | 一种适用于托卡马克稳态运行的低温泵快再生系统及方法 |
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| US20040261424A1 (en) | 2003-06-27 | 2004-12-30 | Helix Technology Corporation | Integration of automated cryopump safety purge with set point |
| EP1649166B1 (en) | 2003-06-27 | 2007-02-28 | Helix Technology Corporation | Integration of automated cryopump safety purge |
| US6920763B2 (en) | 2003-06-27 | 2005-07-26 | Helix Technology Corporation | Integration of automated cryopump safety purge |
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-
2004
- 2004-06-09 EP EP04754770A patent/EP1649166B1/en not_active Expired - Lifetime
- 2004-06-09 DE DE602004015858T patent/DE602004015858D1/de not_active Expired - Lifetime
- 2004-06-09 JP JP2006517209A patent/JP4691026B2/ja not_active Expired - Lifetime
- 2004-06-09 DE DE602004032399T patent/DE602004032399D1/de not_active Expired - Lifetime
- 2004-06-09 DE DE602004005047T patent/DE602004005047T2/de not_active Expired - Lifetime
- 2004-06-09 EP EP07075050A patent/EP1780414B1/en not_active Expired - Lifetime
- 2004-06-09 WO PCT/US2004/018269 patent/WO2005005833A2/en not_active Ceased
- 2004-06-09 AT AT08075586T patent/ATE506540T1/de not_active IP Right Cessation
- 2004-06-09 AT AT04754770T patent/ATE355461T1/de not_active IP Right Cessation
- 2004-06-09 KR KR1020057024952A patent/KR101084896B1/ko not_active Expired - Lifetime
- 2004-06-09 AT AT07075050T patent/ATE404792T1/de not_active IP Right Cessation
- 2004-06-09 EP EP08075586A patent/EP1980748B1/en not_active Expired - Lifetime
- 2004-06-14 TW TW093117014A patent/TWI322031B/zh not_active IP Right Cessation
-
2005
- 2005-05-23 US US11/136,325 patent/US7415831B2/en not_active Expired - Lifetime
-
2008
- 2008-07-22 US US12/177,737 patent/US9970427B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI493106B (zh) * | 2011-04-11 | 2015-07-21 | Sumitomo Heavy Industries | Cryogenic pump system, compressor and cryogenic pump regeneration method |
Also Published As
| Publication number | Publication date |
|---|---|
| US20050262852A1 (en) | 2005-12-01 |
| DE602004015858D1 (de) | 2008-09-25 |
| EP1649166B1 (en) | 2007-02-28 |
| DE602004005047D1 (de) | 2007-04-12 |
| ATE404792T1 (de) | 2008-08-15 |
| WO2005005833A2 (en) | 2005-01-20 |
| US9970427B2 (en) | 2018-05-15 |
| US20090007574A1 (en) | 2009-01-08 |
| ATE355461T1 (de) | 2006-03-15 |
| WO2005005833A3 (en) | 2005-04-21 |
| ATE506540T1 (de) | 2011-05-15 |
| KR20060025571A (ko) | 2006-03-21 |
| TW200502034A (en) | 2005-01-16 |
| KR101084896B1 (ko) | 2011-11-17 |
| EP1980748A1 (en) | 2008-10-15 |
| EP1980748B1 (en) | 2011-04-20 |
| US7415831B2 (en) | 2008-08-26 |
| DE602004032399D1 (de) | 2011-06-01 |
| EP1780414B1 (en) | 2008-08-13 |
| JP4691026B2 (ja) | 2011-06-01 |
| DE602004005047T2 (de) | 2007-09-27 |
| EP1649166A2 (en) | 2006-04-26 |
| JP2007521438A (ja) | 2007-08-02 |
| EP1780414A1 (en) | 2007-05-02 |
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