ATE506540T1 - Integration einer automatisierten kryopumpensicherheitsspülung - Google Patents

Integration einer automatisierten kryopumpensicherheitsspülung

Info

Publication number
ATE506540T1
ATE506540T1 AT08075586T AT08075586T ATE506540T1 AT E506540 T1 ATE506540 T1 AT E506540T1 AT 08075586 T AT08075586 T AT 08075586T AT 08075586 T AT08075586 T AT 08075586T AT E506540 T1 ATE506540 T1 AT E506540T1
Authority
AT
Austria
Prior art keywords
cryopum
automated
integration
pump safety
cryopump
Prior art date
Application number
AT08075586T
Other languages
English (en)
Inventor
Paul E Amundsen
Maureen Buonpane
Doug Andrews
Jordan Jacobs
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/608,851 external-priority patent/US6920763B2/en
Priority claimed from US10/608,779 external-priority patent/US6895766B2/en
Priority claimed from US10/608,770 external-priority patent/US20040261424A1/en
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Application granted granted Critical
Publication of ATE506540T1 publication Critical patent/ATE506540T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/06—Valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F05B2270/303—Temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
AT08075586T 2003-06-27 2004-06-09 Integration einer automatisierten kryopumpensicherheitsspülung ATE506540T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/608,851 US6920763B2 (en) 2003-06-27 2003-06-27 Integration of automated cryopump safety purge
US10/608,779 US6895766B2 (en) 2003-06-27 2003-06-27 Fail-safe cryopump safety purge delay
US10/608,770 US20040261424A1 (en) 2003-06-27 2003-06-27 Integration of automated cryopump safety purge with set point

Publications (1)

Publication Number Publication Date
ATE506540T1 true ATE506540T1 (de) 2011-05-15

Family

ID=34069129

Family Applications (3)

Application Number Title Priority Date Filing Date
AT08075586T ATE506540T1 (de) 2003-06-27 2004-06-09 Integration einer automatisierten kryopumpensicherheitsspülung
AT04754770T ATE355461T1 (de) 2003-06-27 2004-06-09 Integration einer automatisierten kryopumpensicherheitsspülung
AT07075050T ATE404792T1 (de) 2003-06-27 2004-06-09 Automatisierung der sicherheits-regenerierung bei einer kryopumpe

Family Applications After (2)

Application Number Title Priority Date Filing Date
AT04754770T ATE355461T1 (de) 2003-06-27 2004-06-09 Integration einer automatisierten kryopumpensicherheitsspülung
AT07075050T ATE404792T1 (de) 2003-06-27 2004-06-09 Automatisierung der sicherheits-regenerierung bei einer kryopumpe

Country Status (8)

Country Link
US (2) US7415831B2 (de)
EP (3) EP1649166B1 (de)
JP (1) JP4691026B2 (de)
KR (1) KR101084896B1 (de)
AT (3) ATE506540T1 (de)
DE (3) DE602004015858D1 (de)
TW (1) TWI322031B (de)
WO (1) WO2005005833A2 (de)

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IL180875A0 (en) * 2007-01-22 2007-07-04 Ricor Ltd Gas purge method and apparatus
TWI585298B (zh) * 2008-04-04 2017-06-01 布魯克機械公司 利用錫銻合金的低溫泵及其使用方法
JP5084794B2 (ja) * 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
US20110283737A1 (en) * 2010-05-20 2011-11-24 Siemens Medical Solutions Usa, Inc. Process for separating gases at cryogenic temperatures
WO2012071540A2 (en) * 2010-11-24 2012-05-31 Brooks Automation, Inc. Cryopump with controlled hydrogen gas release
TWI639769B (zh) 2011-02-09 2018-11-01 布魯克機械公司 低溫泵及用於低溫泵之第二階段陣列
TWI646264B (zh) 2011-03-04 2019-01-01 美商布魯克機械公司 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法
JP5669658B2 (ja) * 2011-04-11 2015-02-12 住友重機械工業株式会社 クライオポンプシステム、圧縮機、及びクライオポンプの再生方法
JP5679910B2 (ja) * 2011-06-03 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP5846966B2 (ja) * 2012-03-01 2016-01-20 住友重機械工業株式会社 クライオポンプ及びその再生方法
JP6433365B2 (ja) * 2015-04-03 2018-12-05 三菱電機株式会社 放射線モニタ
JP6819304B2 (ja) 2017-01-12 2021-01-27 株式会社島津製作所 真空バルブ、真空ポンプおよび真空排気システム
WO2018164779A1 (en) 2017-03-06 2018-09-13 Mandak Holdings, LLC Cooling system and method
KR20240142409A (ko) * 2022-01-31 2024-09-30 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프시스템 및 재생컨트롤러
CN116906297B (zh) * 2023-09-12 2023-12-08 中国科学院合肥物质科学研究院 一种适用于托卡马克稳态运行的低温泵快再生系统及方法

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Also Published As

Publication number Publication date
EP1649166A2 (de) 2006-04-26
WO2005005833A3 (en) 2005-04-21
KR20060025571A (ko) 2006-03-21
EP1649166B1 (de) 2007-02-28
ATE355461T1 (de) 2006-03-15
EP1980748B1 (de) 2011-04-20
DE602004005047D1 (de) 2007-04-12
ATE404792T1 (de) 2008-08-15
EP1780414A1 (de) 2007-05-02
DE602004032399D1 (de) 2011-06-01
EP1780414B1 (de) 2008-08-13
DE602004005047T2 (de) 2007-09-27
WO2005005833A2 (en) 2005-01-20
DE602004015858D1 (de) 2008-09-25
TW200502034A (en) 2005-01-16
EP1980748A1 (de) 2008-10-15
US20050262852A1 (en) 2005-12-01
KR101084896B1 (ko) 2011-11-17
JP4691026B2 (ja) 2011-06-01
JP2007521438A (ja) 2007-08-02
US9970427B2 (en) 2018-05-15
TWI322031B (en) 2010-03-21
US20090007574A1 (en) 2009-01-08
US7415831B2 (en) 2008-08-26

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