KR101084896B1 - 자동화된 극저온 펌프의 통합된 안전 세정 - Google Patents

자동화된 극저온 펌프의 통합된 안전 세정 Download PDF

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Publication number
KR101084896B1
KR101084896B1 KR1020057024952A KR20057024952A KR101084896B1 KR 101084896 B1 KR101084896 B1 KR 101084896B1 KR 1020057024952 A KR1020057024952 A KR 1020057024952A KR 20057024952 A KR20057024952 A KR 20057024952A KR 101084896 B1 KR101084896 B1 KR 101084896B1
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KR
South Korea
Prior art keywords
delete delete
cryogenic
cleaning valve
cryogenic pump
control
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1020057024952A
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English (en)
Korean (ko)
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KR20060025571A (ko
Inventor
폴 이. 아문드센
모린 본페인
도그 앤드류스
조단 자콥스
Original Assignee
브룩스 오토메이션, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/608,770 external-priority patent/US20040261424A1/en
Priority claimed from US10/608,851 external-priority patent/US6920763B2/en
Priority claimed from US10/608,779 external-priority patent/US6895766B2/en
Application filed by 브룩스 오토메이션, 인크. filed Critical 브룩스 오토메이션, 인크.
Publication of KR20060025571A publication Critical patent/KR20060025571A/ko
Application granted granted Critical
Publication of KR101084896B1 publication Critical patent/KR101084896B1/ko
Assigned to 에드워즈 배큠 엘엘시 reassignment 에드워즈 배큠 엘엘시 권리의 전부이전등록 Assignors: 브룩스 오토메이션, 인크.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/06—Valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F05B2270/303—Temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
KR1020057024952A 2003-06-27 2004-06-09 자동화된 극저온 펌프의 통합된 안전 세정 Expired - Lifetime KR101084896B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10/608,851 2003-06-27
US10/608,770 US20040261424A1 (en) 2003-06-27 2003-06-27 Integration of automated cryopump safety purge with set point
US10/608,779 2003-06-27
US10/608,851 US6920763B2 (en) 2003-06-27 2003-06-27 Integration of automated cryopump safety purge
US10/608,779 US6895766B2 (en) 2003-06-27 2003-06-27 Fail-safe cryopump safety purge delay
US10/608,770 2003-06-27
PCT/US2004/018269 WO2005005833A2 (en) 2003-06-27 2004-06-09 Integration of automated cryopump safety purge

Publications (2)

Publication Number Publication Date
KR20060025571A KR20060025571A (ko) 2006-03-21
KR101084896B1 true KR101084896B1 (ko) 2011-11-17

Family

ID=34069129

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057024952A Expired - Lifetime KR101084896B1 (ko) 2003-06-27 2004-06-09 자동화된 극저온 펌프의 통합된 안전 세정

Country Status (8)

Country Link
US (2) US7415831B2 (https=)
EP (3) EP1649166B1 (https=)
JP (1) JP4691026B2 (https=)
KR (1) KR101084896B1 (https=)
AT (3) ATE506540T1 (https=)
DE (3) DE602004015858D1 (https=)
TW (1) TWI322031B (https=)
WO (1) WO2005005833A2 (https=)

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EP1649166B1 (en) * 2003-06-27 2007-02-28 Helix Technology Corporation Integration of automated cryopump safety purge
IL180875A0 (en) * 2007-01-22 2007-07-04 Ricor Ltd Gas purge method and apparatus
TWI490408B (zh) 2008-04-04 2015-07-01 Brooks Automation Inc 利用錫鎵合金的低溫泵
JP5084794B2 (ja) * 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
US20110283737A1 (en) * 2010-05-20 2011-11-24 Siemens Medical Solutions Usa, Inc. Process for separating gases at cryogenic temperatures
KR101554866B1 (ko) * 2010-11-24 2015-09-22 브룩스 오토메이션, 인크. 수소 가스 방출을 제어하는 저온 펌프
KR102033142B1 (ko) * 2011-02-09 2019-10-16 브룩스 오토메이션, 인크. 극저온 펌프
TWI646264B (zh) 2011-03-04 2019-01-01 美商布魯克機械公司 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法
JP5669658B2 (ja) * 2011-04-11 2015-02-12 住友重機械工業株式会社 クライオポンプシステム、圧縮機、及びクライオポンプの再生方法
JP5679910B2 (ja) * 2011-06-03 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP5846966B2 (ja) * 2012-03-01 2016-01-20 住友重機械工業株式会社 クライオポンプ及びその再生方法
JP6433365B2 (ja) * 2015-04-03 2018-12-05 三菱電機株式会社 放射線モニタ
JP6819304B2 (ja) 2017-01-12 2021-01-27 株式会社島津製作所 真空バルブ、真空ポンプおよび真空排気システム
JP2020510558A (ja) * 2017-03-06 2020-04-09 マンダック ホールディングス， エルエルシー 冷却システムおよび方法
WO2023145385A1 (ja) * 2022-01-31 2023-08-03 住友重機械工業株式会社 クライオポンプシステムおよび再生コントローラ
JP2024085232A (ja) * 2022-12-14 2024-06-26 住友重機械工業株式会社 クライオポンプおよびクライオポンプ再生方法
CN116906297B (zh) * 2023-09-12 2023-12-08 中国科学院合肥物质科学研究院 一种适用于托卡马克稳态运行的低温泵快再生系统及方法

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US5513499A (en) 1994-04-08 1996-05-07 Ebara Technologies Incorporated Method and apparatus for cryopump regeneration using turbomolecular pump

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Also Published As

Publication number Publication date
US20050262852A1 (en) 2005-12-01
DE602004015858D1 (de) 2008-09-25
EP1649166B1 (en) 2007-02-28
DE602004005047D1 (de) 2007-04-12
ATE404792T1 (de) 2008-08-15
WO2005005833A2 (en) 2005-01-20
US9970427B2 (en) 2018-05-15
US20090007574A1 (en) 2009-01-08
ATE355461T1 (de) 2006-03-15
WO2005005833A3 (en) 2005-04-21
ATE506540T1 (de) 2011-05-15
KR20060025571A (ko) 2006-03-21
TW200502034A (en) 2005-01-16
EP1980748A1 (en) 2008-10-15
EP1980748B1 (en) 2011-04-20
US7415831B2 (en) 2008-08-26
TWI322031B (en) 2010-03-21
DE602004032399D1 (de) 2011-06-01
EP1780414B1 (en) 2008-08-13
JP4691026B2 (ja) 2011-06-01
DE602004005047T2 (de) 2007-09-27
EP1649166A2 (en) 2006-04-26
JP2007521438A (ja) 2007-08-02
EP1780414A1 (en) 2007-05-02

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