JP2007512714A - 低いループ高さのボールボンディング方法およびその装置 - Google Patents
低いループ高さのボールボンディング方法およびその装置 Download PDFInfo
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- JP2007512714A JP2007512714A JP2006541443A JP2006541443A JP2007512714A JP 2007512714 A JP2007512714 A JP 2007512714A JP 2006541443 A JP2006541443 A JP 2006541443A JP 2006541443 A JP2006541443 A JP 2006541443A JP 2007512714 A JP2007512714 A JP 2007512714A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52530503P | 2003-11-26 | 2003-11-26 | |
| US10/988,053 US7347352B2 (en) | 2003-11-26 | 2004-11-12 | Low loop height ball bonding method and apparatus |
| PCT/US2004/039676 WO2005055282A2 (en) | 2003-11-26 | 2004-11-24 | Low loop height ball bonding method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007512714A true JP2007512714A (ja) | 2007-05-17 |
| JP2007512714A5 JP2007512714A5 (enExample) | 2008-01-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006541443A Pending JP2007512714A (ja) | 2003-11-26 | 2004-11-24 | 低いループ高さのボールボンディング方法およびその装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7347352B2 (enExample) |
| JP (1) | JP2007512714A (enExample) |
| SG (1) | SG123792A1 (enExample) |
| TW (1) | TWI367533B (enExample) |
| WO (1) | WO2005055282A2 (enExample) |
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| US10221396B2 (en) | 2009-06-05 | 2019-03-05 | FUJIFILM Cellular Dynamics, Inc. | Reprogramming T cells and hematopoietic cells |
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| US7229906B2 (en) * | 2002-09-19 | 2007-06-12 | Kulicke And Soffa Industries, Inc. | Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine |
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| MY181180A (en) * | 2011-09-09 | 2020-12-21 | Carsem M Sdn Bhd | Low loop wire bonding |
| TWI543284B (zh) * | 2014-02-10 | 2016-07-21 | 新川股份有限公司 | 半導體裝置的製造方法以及打線裝置 |
| US12057431B2 (en) * | 2020-12-18 | 2024-08-06 | Kulicke And Soffa Industries, Inc. | Methods of forming wire interconnect structures and related wire bonding tools |
| US12142595B2 (en) * | 2020-12-23 | 2024-11-12 | Skyworks Solutions, Inc. | Apparatus and methods for tool mark free stitch bonding |
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- 2004-11-24 WO PCT/US2004/039676 patent/WO2005055282A2/en not_active Ceased
- 2004-11-24 SG SG200604112A patent/SG123792A1/en unknown
- 2004-11-24 JP JP2006541443A patent/JP2007512714A/ja active Pending
- 2004-11-26 TW TW093136568A patent/TWI367533B/zh not_active IP Right Cessation
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| US10221396B2 (en) | 2009-06-05 | 2019-03-05 | FUJIFILM Cellular Dynamics, Inc. | Reprogramming T cells and hematopoietic cells |
Also Published As
| Publication number | Publication date |
|---|---|
| SG123792A1 (en) | 2006-07-26 |
| WO2005055282A2 (en) | 2005-06-16 |
| US7347352B2 (en) | 2008-03-25 |
| US7584881B2 (en) | 2009-09-08 |
| TW200524068A (en) | 2005-07-16 |
| US20050109819A1 (en) | 2005-05-26 |
| TWI367533B (en) | 2012-07-01 |
| US20080111252A1 (en) | 2008-05-15 |
| WO2005055282A3 (en) | 2006-02-09 |
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