TWI367533B - Low loop height ball bonding method and apparatus - Google Patents

Low loop height ball bonding method and apparatus

Info

Publication number
TWI367533B
TWI367533B TW093136568A TW93136568A TWI367533B TW I367533 B TWI367533 B TW I367533B TW 093136568 A TW093136568 A TW 093136568A TW 93136568 A TW93136568 A TW 93136568A TW I367533 B TWI367533 B TW I367533B
Authority
TW
Taiwan
Prior art keywords
bonding method
ball bonding
loop height
low loop
height ball
Prior art date
Application number
TW093136568A
Other languages
English (en)
Chinese (zh)
Other versions
TW200524068A (en
Inventor
Ivy W Qin
Robert Wise
Original Assignee
Kulicke & Soffa Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kulicke & Soffa Ind Inc filed Critical Kulicke & Soffa Ind Inc
Publication of TW200524068A publication Critical patent/TW200524068A/zh
Application granted granted Critical
Publication of TWI367533B publication Critical patent/TWI367533B/zh

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    • HELECTRICITY
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    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004Wire welding
    • B23K20/005Capillary welding
    • B23K20/007Ball bonding
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  • Engineering & Computer Science (AREA)
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TW093136568A 2003-11-26 2004-11-26 Low loop height ball bonding method and apparatus TWI367533B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52530503P 2003-11-26 2003-11-26
US10/988,053 US7347352B2 (en) 2003-11-26 2004-11-12 Low loop height ball bonding method and apparatus

Publications (2)

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TW200524068A TW200524068A (en) 2005-07-16
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Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7229906B2 (en) * 2002-09-19 2007-06-12 Kulicke And Soffa Industries, Inc. Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
US7464854B2 (en) * 2005-01-25 2008-12-16 Kulicke And Soffa Industries, Inc. Method and apparatus for forming a low profile wire loop
DE102006011352A1 (de) * 2005-03-23 2006-10-05 Unaxis International Trading Ltd. Verfahren zur Herstellung einer Drahtverbindung
US8016182B2 (en) * 2005-05-10 2011-09-13 Kaijo Corporation Wire loop, semiconductor device having same and wire bonding method
JP2009503822A (ja) * 2005-07-26 2009-01-29 マイクロボンズ・インコーポレイテッド 絶縁ワイヤボンドを用いてパッケージ集積回路を組み立てるためのシステムおよび方法
JP4530984B2 (ja) * 2005-12-28 2010-08-25 株式会社新川 ワイヤボンディング装置、ボンディング制御プログラム及びボンディング方法
WO2007134317A1 (en) * 2006-05-15 2007-11-22 Texas Instruments Incorporated Downhill wire bonding for semiconductor device
US20080286959A1 (en) * 2007-05-14 2008-11-20 Texas Instruments Incorporated Downhill Wire Bonding for QFN L - Lead
US20100186991A1 (en) * 2006-10-18 2010-07-29 Kulicke And Soffa Industries, Inc. conductive bumps, wire loops including the improved conductive bumps, and methods of forming the same
JP5481769B2 (ja) * 2006-11-22 2014-04-23 日亜化学工業株式会社 半導体装置及びその製造方法
US8637394B2 (en) * 2007-07-05 2014-01-28 Stats Chippac Ltd. Integrated circuit package system with flex bump
US8048720B2 (en) * 2008-01-30 2011-11-01 Kulicke And Soffa Industries, Inc. Wire loop and method of forming the wire loop
JP4625858B2 (ja) * 2008-09-10 2011-02-02 株式会社カイジョー ワイヤボンディング方法、ワイヤボンディング装置及びワイヤボンディング制御プログラム
JP4344002B1 (ja) 2008-10-27 2009-10-14 株式会社新川 ワイヤボンディング方法
JP5062283B2 (ja) * 2009-04-30 2012-10-31 日亜化学工業株式会社 半導体装置及びその製造方法
AU2010254811B2 (en) 2009-06-05 2015-02-19 FUJIFILM Cellular Dynamics, Inc. Reprogramming T cells and hematopoietic cells
DE102009029040A1 (de) * 2009-08-31 2011-03-03 Robert Bosch Gmbh Vorrichtung und Verfahren zur Herstellung einer Vorrichtung
JP2012004464A (ja) * 2010-06-18 2012-01-05 Toshiba Corp 半導体装置、半導体装置の製造方法及び半導体装置の製造装置
US20120032354A1 (en) * 2010-08-06 2012-02-09 National Semiconductor Corporation Wirebonding method and device enabling high-speed reverse wedge bonding of wire bonds
US7918378B1 (en) 2010-08-06 2011-04-05 National Semiconductor Corporation Wire bonding deflector for a wire bonder
CN102412167B (zh) 2010-09-25 2016-02-03 飞思卡尔半导体公司 用于线接合的固定
CN102487025B (zh) 2010-12-08 2016-07-06 飞思卡尔半导体公司 用于长结合导线的支撑体
US8609525B2 (en) * 2011-03-21 2013-12-17 Stats Chippac Ltd. Integrated circuit packaging system with interconnects and method of manufacture thereof
MY181180A (en) * 2011-09-09 2020-12-21 Carsem M Sdn Bhd Low loop wire bonding
TWI543284B (zh) * 2014-02-10 2016-07-21 新川股份有限公司 半導體裝置的製造方法以及打線裝置
US12057431B2 (en) * 2020-12-18 2024-08-06 Kulicke And Soffa Industries, Inc. Methods of forming wire interconnect structures and related wire bonding tools
US12142595B2 (en) * 2020-12-23 2024-11-12 Skyworks Solutions, Inc. Apparatus and methods for tool mark free stitch bonding
WO2023158625A1 (en) * 2022-02-15 2023-08-24 Kulicke And Soffa Industries, Inc. Methods of determining a sequence for creating a plurality of wire loops in connection with a workpiece

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4437604A (en) * 1982-03-15 1984-03-20 Kulicke & Soffa Industries, Inc. Method of making fine wire interconnections
US4824005A (en) * 1986-08-13 1989-04-25 Orthodyne Electronics Corporation Dual mode ultrasonic generator in a wire bonding apparatus
JPH04273135A (ja) 1991-02-27 1992-09-29 Shinkawa Ltd ワイヤボンデイング方法
US5111989A (en) * 1991-09-26 1992-05-12 Kulicke And Soffa Investments, Inc. Method of making low profile fine wire interconnections
JP3152764B2 (ja) 1992-10-21 2001-04-03 株式会社東芝 ワイヤボンダ−
US5421503A (en) * 1994-08-24 1995-06-06 Kulicke And Soffa Investments, Inc. Fine pitch capillary bonding tool
US5842628A (en) * 1995-04-10 1998-12-01 Fujitsu Limited Wire bonding method, semiconductor device, capillary for wire bonding and ball bump forming method
JPH0951011A (ja) 1995-08-10 1997-02-18 Tanaka Denshi Kogyo Kk 半導体チップのワイヤボンディング方法
JP3370539B2 (ja) 1997-01-13 2003-01-27 株式会社新川 ワイヤボンディング方法
JP3413340B2 (ja) * 1997-03-17 2003-06-03 株式会社新川 ワイヤボンディング方法
JP3455092B2 (ja) * 1997-10-27 2003-10-06 株式会社新川 半導体装置及びワイヤボンディング方法
JP2000082717A (ja) * 1998-09-07 2000-03-21 Shinkawa Ltd ワイヤボンディング方法
JP3522123B2 (ja) * 1998-09-30 2004-04-26 株式会社新川 ワイヤボンディング方法
JP2000114304A (ja) * 1998-10-08 2000-04-21 Shinkawa Ltd ワイヤボンディング方法
JP2000174054A (ja) 1998-12-04 2000-06-23 Kaijo Corp ワイヤボンダ用ボール形成装置
JP3457196B2 (ja) 1998-12-22 2003-10-14 株式会社カイジョー ボールボンディング方法
JP3932235B2 (ja) 1999-02-25 2007-06-20 株式会社カイジョー ワイヤボンダ用ボール形成装置及びその方法
JP3913134B2 (ja) * 2002-08-08 2007-05-09 株式会社カイジョー バンプの形成方法及びバンプ
JP2003100793A (ja) 2001-09-25 2003-04-04 Kaijo Corp ワイヤボンディング方法
JP3765778B2 (ja) * 2002-08-29 2006-04-12 ローム株式会社 ワイヤボンディング用キャピラリ及びこれを用いたワイヤボンディング方法
US7229906B2 (en) * 2002-09-19 2007-06-12 Kulicke And Soffa Industries, Inc. Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
JP2004172477A (ja) * 2002-11-21 2004-06-17 Kaijo Corp ワイヤループ形状、そのワイヤループ形状を備えた半導体装置、ワイヤボンディング方法及び半導体製造装置
US6815836B2 (en) * 2003-03-24 2004-11-09 Texas Instruments Incorporated Wire bonding for thin semiconductor package
JP4021378B2 (ja) * 2003-06-27 2007-12-12 株式会社新川 ワイヤボンディング方法
US7494042B2 (en) * 2003-10-02 2009-02-24 Asm Technology Singapore Pte. Ltd. Method of forming low wire loops and wire loops formed using the method
US20060011710A1 (en) * 2004-07-13 2006-01-19 Asm Technology Singapore Pte Ltd Formation of a wire bond with enhanced pull
US7188759B2 (en) * 2004-09-08 2007-03-13 Kulicke And Soffa Industries, Inc. Methods for forming conductive bumps and wire loops
JP4298665B2 (ja) * 2005-02-08 2009-07-22 株式会社新川 ワイヤボンディング方法

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WO2005055282A2 (en) 2005-06-16
US7347352B2 (en) 2008-03-25
US7584881B2 (en) 2009-09-08
JP2007512714A (ja) 2007-05-17
TW200524068A (en) 2005-07-16
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US20080111252A1 (en) 2008-05-15
WO2005055282A3 (en) 2006-02-09

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