TWI367533B - Low loop height ball bonding method and apparatus - Google Patents
Low loop height ball bonding method and apparatusInfo
- Publication number
- TWI367533B TWI367533B TW093136568A TW93136568A TWI367533B TW I367533 B TWI367533 B TW I367533B TW 093136568 A TW093136568 A TW 093136568A TW 93136568 A TW93136568 A TW 93136568A TW I367533 B TWI367533 B TW I367533B
- Authority
- TW
- Taiwan
- Prior art keywords
- bonding method
- ball bonding
- loop height
- low loop
- height ball
- Prior art date
Links
Classifications
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- H—ELECTRICITY
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- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
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- B23K20/007—Ball bonding
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52530503P | 2003-11-26 | 2003-11-26 | |
| US10/988,053 US7347352B2 (en) | 2003-11-26 | 2004-11-12 | Low loop height ball bonding method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200524068A TW200524068A (en) | 2005-07-16 |
| TWI367533B true TWI367533B (en) | 2012-07-01 |
Family
ID=34595261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093136568A TWI367533B (en) | 2003-11-26 | 2004-11-26 | Low loop height ball bonding method and apparatus |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7347352B2 (enExample) |
| JP (1) | JP2007512714A (enExample) |
| SG (1) | SG123792A1 (enExample) |
| TW (1) | TWI367533B (enExample) |
| WO (1) | WO2005055282A2 (enExample) |
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| US7229906B2 (en) * | 2002-09-19 | 2007-06-12 | Kulicke And Soffa Industries, Inc. | Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine |
| US7464854B2 (en) * | 2005-01-25 | 2008-12-16 | Kulicke And Soffa Industries, Inc. | Method and apparatus for forming a low profile wire loop |
| DE102006011352A1 (de) * | 2005-03-23 | 2006-10-05 | Unaxis International Trading Ltd. | Verfahren zur Herstellung einer Drahtverbindung |
| US8016182B2 (en) * | 2005-05-10 | 2011-09-13 | Kaijo Corporation | Wire loop, semiconductor device having same and wire bonding method |
| JP2009503822A (ja) * | 2005-07-26 | 2009-01-29 | マイクロボンズ・インコーポレイテッド | 絶縁ワイヤボンドを用いてパッケージ集積回路を組み立てるためのシステムおよび方法 |
| JP4530984B2 (ja) * | 2005-12-28 | 2010-08-25 | 株式会社新川 | ワイヤボンディング装置、ボンディング制御プログラム及びボンディング方法 |
| WO2007134317A1 (en) * | 2006-05-15 | 2007-11-22 | Texas Instruments Incorporated | Downhill wire bonding for semiconductor device |
| US20080286959A1 (en) * | 2007-05-14 | 2008-11-20 | Texas Instruments Incorporated | Downhill Wire Bonding for QFN L - Lead |
| US20100186991A1 (en) * | 2006-10-18 | 2010-07-29 | Kulicke And Soffa Industries, Inc. | conductive bumps, wire loops including the improved conductive bumps, and methods of forming the same |
| JP5481769B2 (ja) * | 2006-11-22 | 2014-04-23 | 日亜化学工業株式会社 | 半導体装置及びその製造方法 |
| US8637394B2 (en) * | 2007-07-05 | 2014-01-28 | Stats Chippac Ltd. | Integrated circuit package system with flex bump |
| US8048720B2 (en) * | 2008-01-30 | 2011-11-01 | Kulicke And Soffa Industries, Inc. | Wire loop and method of forming the wire loop |
| JP4625858B2 (ja) * | 2008-09-10 | 2011-02-02 | 株式会社カイジョー | ワイヤボンディング方法、ワイヤボンディング装置及びワイヤボンディング制御プログラム |
| JP4344002B1 (ja) | 2008-10-27 | 2009-10-14 | 株式会社新川 | ワイヤボンディング方法 |
| JP5062283B2 (ja) * | 2009-04-30 | 2012-10-31 | 日亜化学工業株式会社 | 半導体装置及びその製造方法 |
| AU2010254811B2 (en) | 2009-06-05 | 2015-02-19 | FUJIFILM Cellular Dynamics, Inc. | Reprogramming T cells and hematopoietic cells |
| DE102009029040A1 (de) * | 2009-08-31 | 2011-03-03 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Herstellung einer Vorrichtung |
| JP2012004464A (ja) * | 2010-06-18 | 2012-01-05 | Toshiba Corp | 半導体装置、半導体装置の製造方法及び半導体装置の製造装置 |
| US20120032354A1 (en) * | 2010-08-06 | 2012-02-09 | National Semiconductor Corporation | Wirebonding method and device enabling high-speed reverse wedge bonding of wire bonds |
| US7918378B1 (en) | 2010-08-06 | 2011-04-05 | National Semiconductor Corporation | Wire bonding deflector for a wire bonder |
| CN102412167B (zh) | 2010-09-25 | 2016-02-03 | 飞思卡尔半导体公司 | 用于线接合的固定 |
| CN102487025B (zh) | 2010-12-08 | 2016-07-06 | 飞思卡尔半导体公司 | 用于长结合导线的支撑体 |
| US8609525B2 (en) * | 2011-03-21 | 2013-12-17 | Stats Chippac Ltd. | Integrated circuit packaging system with interconnects and method of manufacture thereof |
| MY181180A (en) * | 2011-09-09 | 2020-12-21 | Carsem M Sdn Bhd | Low loop wire bonding |
| TWI543284B (zh) * | 2014-02-10 | 2016-07-21 | 新川股份有限公司 | 半導體裝置的製造方法以及打線裝置 |
| US12057431B2 (en) * | 2020-12-18 | 2024-08-06 | Kulicke And Soffa Industries, Inc. | Methods of forming wire interconnect structures and related wire bonding tools |
| US12142595B2 (en) * | 2020-12-23 | 2024-11-12 | Skyworks Solutions, Inc. | Apparatus and methods for tool mark free stitch bonding |
| WO2023158625A1 (en) * | 2022-02-15 | 2023-08-24 | Kulicke And Soffa Industries, Inc. | Methods of determining a sequence for creating a plurality of wire loops in connection with a workpiece |
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| US5421503A (en) * | 1994-08-24 | 1995-06-06 | Kulicke And Soffa Investments, Inc. | Fine pitch capillary bonding tool |
| US5842628A (en) * | 1995-04-10 | 1998-12-01 | Fujitsu Limited | Wire bonding method, semiconductor device, capillary for wire bonding and ball bump forming method |
| JPH0951011A (ja) | 1995-08-10 | 1997-02-18 | Tanaka Denshi Kogyo Kk | 半導体チップのワイヤボンディング方法 |
| JP3370539B2 (ja) | 1997-01-13 | 2003-01-27 | 株式会社新川 | ワイヤボンディング方法 |
| JP3413340B2 (ja) * | 1997-03-17 | 2003-06-03 | 株式会社新川 | ワイヤボンディング方法 |
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| JP2000082717A (ja) * | 1998-09-07 | 2000-03-21 | Shinkawa Ltd | ワイヤボンディング方法 |
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| JP3932235B2 (ja) | 1999-02-25 | 2007-06-20 | 株式会社カイジョー | ワイヤボンダ用ボール形成装置及びその方法 |
| JP3913134B2 (ja) * | 2002-08-08 | 2007-05-09 | 株式会社カイジョー | バンプの形成方法及びバンプ |
| JP2003100793A (ja) | 2001-09-25 | 2003-04-04 | Kaijo Corp | ワイヤボンディング方法 |
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| US7229906B2 (en) * | 2002-09-19 | 2007-06-12 | Kulicke And Soffa Industries, Inc. | Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine |
| JP2004172477A (ja) * | 2002-11-21 | 2004-06-17 | Kaijo Corp | ワイヤループ形状、そのワイヤループ形状を備えた半導体装置、ワイヤボンディング方法及び半導体製造装置 |
| US6815836B2 (en) * | 2003-03-24 | 2004-11-09 | Texas Instruments Incorporated | Wire bonding for thin semiconductor package |
| JP4021378B2 (ja) * | 2003-06-27 | 2007-12-12 | 株式会社新川 | ワイヤボンディング方法 |
| US7494042B2 (en) * | 2003-10-02 | 2009-02-24 | Asm Technology Singapore Pte. Ltd. | Method of forming low wire loops and wire loops formed using the method |
| US20060011710A1 (en) * | 2004-07-13 | 2006-01-19 | Asm Technology Singapore Pte Ltd | Formation of a wire bond with enhanced pull |
| US7188759B2 (en) * | 2004-09-08 | 2007-03-13 | Kulicke And Soffa Industries, Inc. | Methods for forming conductive bumps and wire loops |
| JP4298665B2 (ja) * | 2005-02-08 | 2009-07-22 | 株式会社新川 | ワイヤボンディング方法 |
-
2004
- 2004-11-12 US US10/988,053 patent/US7347352B2/en not_active Expired - Lifetime
- 2004-11-24 WO PCT/US2004/039676 patent/WO2005055282A2/en not_active Ceased
- 2004-11-24 SG SG200604112A patent/SG123792A1/en unknown
- 2004-11-24 JP JP2006541443A patent/JP2007512714A/ja active Pending
- 2004-11-26 TW TW093136568A patent/TWI367533B/zh not_active IP Right Cessation
-
2007
- 2007-11-20 US US11/942,997 patent/US7584881B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| SG123792A1 (en) | 2006-07-26 |
| WO2005055282A2 (en) | 2005-06-16 |
| US7347352B2 (en) | 2008-03-25 |
| US7584881B2 (en) | 2009-09-08 |
| JP2007512714A (ja) | 2007-05-17 |
| TW200524068A (en) | 2005-07-16 |
| US20050109819A1 (en) | 2005-05-26 |
| US20080111252A1 (en) | 2008-05-15 |
| WO2005055282A3 (en) | 2006-02-09 |
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