JP2007503527A - 金属有機電解液から金属及び／又は金属合金を沈積する装置及び／又は方法 - Google Patents
金属有機電解液から金属及び／又は金属合金を沈積する装置及び／又は方法 Download PDFInfo
- Publication number
- JP2007503527A JP2007503527A JP2006524288A JP2006524288A JP2007503527A JP 2007503527 A JP2007503527 A JP 2007503527A JP 2006524288 A JP2006524288 A JP 2006524288A JP 2006524288 A JP2006524288 A JP 2006524288A JP 2007503527 A JP2007503527 A JP 2007503527A
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- JP
- Japan
- Prior art keywords
- solvent
- product
- coating
- rinsing
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 22
- 239000002184 metal Substances 0.000 title claims abstract description 22
- 238000000151 deposition Methods 0.000 title claims abstract description 13
- 229910001092 metal group alloy Inorganic materials 0.000 title claims abstract description 11
- 239000005486 organic electrolyte Substances 0.000 title claims abstract description 6
- 239000002904 solvent Substances 0.000 claims abstract description 134
- 238000000576 coating method Methods 0.000 claims abstract description 89
- 239000011248 coating agent Substances 0.000 claims abstract description 83
- 239000012298 atmosphere Substances 0.000 claims abstract description 70
- 239000007789 gas Substances 0.000 claims abstract description 65
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 54
- 239000001301 oxygen Substances 0.000 claims abstract description 54
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 54
- 239000011261 inert gas Substances 0.000 claims abstract description 43
- 238000000926 separation method Methods 0.000 claims abstract description 22
- 238000012545 processing Methods 0.000 claims abstract description 15
- 238000004140 cleaning Methods 0.000 claims description 57
- 239000003792 electrolyte Substances 0.000 claims description 46
- 238000001816 cooling Methods 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 30
- 230000004913 activation Effects 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 18
- 238000004821 distillation Methods 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 13
- 238000005086 pumping Methods 0.000 claims description 13
- 230000003213 activating effect Effects 0.000 claims description 11
- 238000002360 preparation method Methods 0.000 claims description 11
- 230000035515 penetration Effects 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 8
- 230000008929 regeneration Effects 0.000 claims description 8
- 238000011069 regeneration method Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000011084 recovery Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 5
- 239000002318 adhesion promoter Substances 0.000 claims description 4
- 239000012442 inert solvent Substances 0.000 claims description 4
- 238000004064 recycling Methods 0.000 claims description 4
- 238000012423 maintenance Methods 0.000 claims description 3
- 238000012806 monitoring device Methods 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 150000003839 salts Chemical class 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 230000008030 elimination Effects 0.000 claims 1
- 238000003379 elimination reaction Methods 0.000 claims 1
- 239000012487 rinsing solution Substances 0.000 claims 1
- 239000000047 product Substances 0.000 abstract description 81
- 238000007599 discharging Methods 0.000 abstract 1
- 239000012467 final product Substances 0.000 abstract 1
- 239000008151 electrolyte solution Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 8
- 239000007795 chemical reaction product Substances 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- 238000011109 contamination Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 230000003134 recirculating effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229940021013 electrolyte solution Drugs 0.000 description 4
- 238000011068 loading method Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- -1 alkyl metals Chemical class 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- 239000011877 solvent mixture Substances 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/003—Electroplating using gases, e.g. pressure influence
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/42—Electroplating: Baths therefor from solutions of light metals
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP03019235A EP1510600A1 (de) | 2003-08-26 | 2003-08-26 | Verfahren und Vorrichtung zum Abscheiden von Metallen und Metalllegierungen aus Metallorganischen Elektrolyten |
| PCT/EP2004/009192 WO2005021840A1 (de) | 2003-08-26 | 2004-08-17 | Vorrichtung und verfahren zum abscheiden von metallen und/oder metalllegierungen aus metallorganischen elektrolyten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007503527A true JP2007503527A (ja) | 2007-02-22 |
| JP2007503527A5 JP2007503527A5 (enExample) | 2009-06-04 |
Family
ID=34089604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006524288A Pending JP2007503527A (ja) | 2003-08-26 | 2004-08-17 | 金属有機電解液から金属及び／又は金属合金を沈積する装置及び／又は方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20070114132A1 (enExample) |
| EP (2) | EP1510600A1 (enExample) |
| JP (1) | JP2007503527A (enExample) |
| AT (1) | ATE398195T1 (enExample) |
| DE (1) | DE502004007361D1 (enExample) |
| DK (1) | DK1658393T3 (enExample) |
| WO (1) | WO2005021840A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004032659B4 (de) | 2004-07-01 | 2008-10-30 | Atotech Deutschland Gmbh | Vorrichtung und Verfahren zum chemischen oder elektrolytischen Behandeln von Behandlungsgut sowie die Verwendung der Vorrichtung |
| CN103938239A (zh) * | 2014-05-11 | 2014-07-23 | 山东建筑大学 | 一种钢带连续镀铜ⅰ |
| CN103938238B (zh) * | 2014-05-11 | 2016-08-03 | 山东建筑大学 | 一种钢带连续镀铜方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3044975C2 (de) * | 1980-11-28 | 1985-10-31 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum galvanischen Abscheiden von Aluminium |
| DE3133232A1 (de) * | 1981-08-21 | 1983-03-10 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum galvanischen abscheiden von aluminium |
| DE3133162C2 (de) * | 1981-08-21 | 1984-08-02 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum galvanischen Abscheiden von Aluminium |
| DE3231855A1 (de) * | 1982-08-26 | 1984-03-01 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum galvanischen abscheiden von aluminium |
| US4759831A (en) * | 1986-07-04 | 1988-07-26 | Siemens Aktiengesellschaft | Electroplating apparatus particularly for electro-deposition of aluminum |
-
2003
- 2003-08-26 EP EP03019235A patent/EP1510600A1/de not_active Withdrawn
-
2004
- 2004-08-17 DE DE502004007361T patent/DE502004007361D1/de not_active Expired - Lifetime
- 2004-08-17 EP EP04764184A patent/EP1658393B1/de not_active Expired - Lifetime
- 2004-08-17 WO PCT/EP2004/009192 patent/WO2005021840A1/de not_active Ceased
- 2004-08-17 AT AT04764184T patent/ATE398195T1/de not_active IP Right Cessation
- 2004-08-17 US US10/569,658 patent/US20070114132A1/en not_active Abandoned
- 2004-08-17 JP JP2006524288A patent/JP2007503527A/ja active Pending
- 2004-08-17 DK DK04764184T patent/DK1658393T3/da active
Also Published As
| Publication number | Publication date |
|---|---|
| EP1510600A1 (de) | 2005-03-02 |
| WO2005021840A1 (de) | 2005-03-10 |
| DK1658393T3 (da) | 2008-10-20 |
| US20070114132A1 (en) | 2007-05-24 |
| ATE398195T1 (de) | 2008-07-15 |
| EP1658393A1 (de) | 2006-05-24 |
| DE502004007361D1 (de) | 2008-07-24 |
| EP1658393B1 (de) | 2008-06-11 |
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