JP2007500919A5 - - Google Patents

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Publication number
JP2007500919A5
JP2007500919A5 JP2006521256A JP2006521256A JP2007500919A5 JP 2007500919 A5 JP2007500919 A5 JP 2007500919A5 JP 2006521256 A JP2006521256 A JP 2006521256A JP 2006521256 A JP2006521256 A JP 2006521256A JP 2007500919 A5 JP2007500919 A5 JP 2007500919A5
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JP
Japan
Prior art keywords
conductive
layer
forming
patterned
organic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006521256A
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English (en)
Japanese (ja)
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JP4634379B2 (ja
JP2007500919A (ja
Filing date
Publication date
Priority claimed from US10/625,112 external-priority patent/US6953705B2/en
Application filed filed Critical
Priority claimed from PCT/US2004/023671 external-priority patent/WO2005057681A1/en
Publication of JP2007500919A publication Critical patent/JP2007500919A/ja
Publication of JP2007500919A5 publication Critical patent/JP2007500919A5/ja
Application granted granted Critical
Publication of JP4634379B2 publication Critical patent/JP4634379B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006521256A 2003-07-22 2004-07-22 有機電子デバイス製造の際の有機層の除去方法およびその方法によって形成される有機電子デバイス Expired - Fee Related JP4634379B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/625,112 US6953705B2 (en) 2003-07-22 2003-07-22 Process for removing an organic layer during fabrication of an organic electronic device
US10/890,360 US7235420B2 (en) 2003-07-22 2004-07-13 Process for removing an organic layer during fabrication of an organic electronic device and the organic electronic device formed by the process
PCT/US2004/023671 WO2005057681A1 (en) 2003-07-22 2004-07-22 Process for removing an organic layer during fabrication of an organic electronic device and the organic electronic device formed by the process

Publications (3)

Publication Number Publication Date
JP2007500919A JP2007500919A (ja) 2007-01-18
JP2007500919A5 true JP2007500919A5 (https=) 2007-09-13
JP4634379B2 JP4634379B2 (ja) 2011-02-16

Family

ID=34681718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006521256A Expired - Fee Related JP4634379B2 (ja) 2003-07-22 2004-07-22 有機電子デバイス製造の際の有機層の除去方法およびその方法によって形成される有機電子デバイス

Country Status (4)

Country Link
EP (1) EP1647064B1 (https=)
JP (1) JP4634379B2 (https=)
KR (1) KR101207073B1 (https=)
WO (1) WO2005057681A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007220360A (ja) * 2006-02-14 2007-08-30 Tokyo Electron Ltd 発光素子、発光素子の製造方法および基板処理装置
US8115326B2 (en) * 2006-11-30 2012-02-14 Corning Incorporated Flexible substrates having a thin-film barrier
JP2008311037A (ja) * 2007-06-13 2008-12-25 Panasonic Electric Works Co Ltd 面発光体の製造方法
US7833074B2 (en) * 2007-09-04 2010-11-16 Global Oled Technology Llc Method of making a top-emitting OLED device having improved power distribution
JP2010009779A (ja) * 2008-06-24 2010-01-14 Tokyo Electron Ltd プラズマ処理装置、プラズマ処理方法及び有機電子デバイス
JP5699064B2 (ja) * 2011-09-29 2015-04-08 富士フイルム株式会社 カラーフィルタの製造方法
CN108352316B (zh) * 2015-11-10 2023-03-24 乔治洛德方法研究和开发液化空气有限公司 蚀刻反应物及使用其的无等离子体的氧化物蚀刻方法
WO2018181104A1 (ja) * 2017-03-27 2018-10-04 関東電化工業株式会社 ドライエッチング方法またはドライクリーニング方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000512428A (ja) * 1996-06-12 2000-09-19 ザ トラスティーズ オブ プリンストン ユニバーシテイ 有機多色表示器製造のための薄膜パターン化
JP3653942B2 (ja) * 1997-07-24 2005-06-02 松下電器産業株式会社 有機発光素子及びその製造方法
US6153254A (en) * 1998-09-30 2000-11-28 U.S. Philips Corporation Method and device for manufacturing an electroluminescent display screen
GB9928014D0 (en) * 1999-11-26 2000-01-26 Cambridge Display Tech Ltd Method of producing an organic light-emissive device
US6699728B2 (en) * 2000-09-06 2004-03-02 Osram Opto Semiconductors Gmbh Patterning of electrodes in oled devices
SG115381A1 (en) * 2001-06-20 2005-10-28 Univ Singapore Removal of organic layers from organic electronic devices
JP2003017251A (ja) * 2001-06-28 2003-01-17 Canon Electronics Inc 有機エレクトロルミネセンス表示装置の製造方法

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