JP2007287732A - 薄膜トランジスタ、その製造方法、及び表示装置 - Google Patents
薄膜トランジスタ、その製造方法、及び表示装置 Download PDFInfo
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H01L29/78615—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect with a body contact
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
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- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
- H01L29/78624—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile the source and the drain regions being asymmetrical
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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Abstract
【解決手段】基板11上に、第1の拡散領域131、チャネル領域132、及び第2の拡散領域133を有する半導体層13と、ゲート絶縁層14を介して半導体層13の対面に配置されるゲート電極15と、半導体層13のゲート絶縁層14側と反対側に設けられ、第1の拡散領域131からチャネル領域132とを電気的に接続するよう、第1の拡散領域131からチャネル領域132の一部まで延在された接続用導電膜層16aと第2の拡散領域133内に敷設用導電膜層16bを備える薄膜トランジスタである。
【選択図】 図6
Description
Id=β/2(Vgs−Vth)2(1+λVds)・・・(1)
Vgs:ソース・ゲート電圧
Vth:閾値電圧
β :定数
図面を参照し、本実施形態に係るTFTについて説明する。本実施形態は、本発明に係るTFTを、有機EL表示装置や液晶表示装置に使用するTFTとし、ゲートがポリシリコン層の上にあるトップゲート構造のTFTについて例を示すものである。
次に、図面を参照し、本発明の実施の形態2について説明する。本実施形態は、本発明に係るTFTを、LDD(Lightly Doped Drain)構造のTFTとし、例を示すものである。LDD構造とは、実施の形態1と同じトップゲート構造であるが、チャネル領域132がソース領域131及びドレイン領域133と直接接続する構造ではなく、ゲート端にソース領域131及びドレイン領域133より不純物濃度の低い領域を設けたものである。そのため、ドレイン領域133とチャネル領域132界面の電界を緩和し、TFTを高耐圧化及び高信頼性化することに効果のある構造である。
次に、図面を参照し、本発明の実施の形態3について説明する。本実施形態は、本発明に係るTFTを、有機EL表示装置や液晶表示装置に使用するTFTとし、ゲートがポリシリコン層の上にあるトップゲート構造のTFTについて例を示すものであることは、実施の形態1と同様である。図6は、実施の形態3に係るTFTの断面図を示したものである。TFTの構成要素等、実施の形態1と同様のものは省略する。
11 基板、 12 保護絶縁層、 13 半導体層、
131 ソース領域、 132 チャネル領域、 133 ドレイン領域、
14 ゲート絶縁層、 15 ゲート電極、 15a 電極、
16a 接続用導電膜層、16b 敷設用導電膜層、 17 層間絶縁層、
18 配線、 19a、19b 低濃度領域、
20 TFT
21 基板、 22 保護絶縁層、 23 半導体層、
231 ソース領域、 232 チャネル領域、 233 ドレイン領域、
24 ゲート絶縁層、 25 ゲート電極
Claims (16)
- 基板上に、
第1の拡散領域、チャネル領域、及び第2の拡散領域を有する半導体層と、
ゲート絶縁層を介して前記半導体層の対面に配置されるゲート電極と、
前記半導体層の前記ゲート絶縁層側と反対側に設けられ、前記第1の拡散領域から前記チャネル領域とを電気的に接続するよう、前記第1の拡散領域から前記チャネル領域の一部まで延在された接続用導電膜層を備える薄膜トランジスタ。 - 前記接続用導電膜層は、電圧印加時に前記第2の拡散領域と前記チャネル領域の界面に形成される空乏層から離間して配置される請求項1に記載の薄膜トランジスタ。
- 前記接続用導電膜層は、高融点金属又は金属窒化膜を含んでいる請求項1又は2に記載の薄膜トランジスタ。
- 前記接続用導電膜層は、Ti、Ta、W、Mo、TiN、TaN、WN、MoN、ZrN、VN、HfNのうち、一つ以上を含む請求項1乃至3のいずれか1項に記載の薄膜トランジスタ。
- 前記チャネル領域と前記第1の拡散領域の間、及び前記チャネル領域と前記第2の拡散領域の間に、前記第1及び第2の拡散領域より不純物濃度が低い低濃度領域を形成する請求項1乃至4のいずれか1項に記載の薄膜トランジスタ。
- 基板上に、接続用導電層を形成する工程、第1の拡散領域、チャネル領域、及び第2の拡散領域を有する半導体層を形成する工程、前記半導体層上にゲート絶縁層を形成する工程、前記ゲート絶縁層上にゲート電極を形成する工程を持つ薄膜トランジスタの製造方法において、
前記接続用導電層は、前記半導体層の前記ゲート絶縁層側と反対側に設けられ、前記第1の拡散領域から前記チャネル領域とを電気的に接続するよう形成されることを特徴とする薄膜トランジスタの製造方法。 - 基板上に、
第1の拡散領域、チャネル領域、及び第2の拡散領域を有する半導体層と、
ゲート絶縁層を介して前記半導体層の対面に配置されるゲート電極と、
前記半導体層の前記ゲート絶縁層側と反対側に設けられ、前記第1の拡散領域から前記チャネル領域とを電気的に接続するよう、前記第1の拡散領域から前記チャネル領域の一部まで延在された接続用導電膜層を備え、
前記半導体層の前記ゲート絶縁層側と反対側に設けられ、前記第2の拡散領域と電気的に接続する敷設用導電膜層を備える薄膜トランジスタ。 - 前記接続用導電膜層は、電圧印加時に前記第2の拡散領域と前記チャネル領域の界面に形成される空乏層から離間して配置され、前記敷設用導電膜層は、電圧印加時に前記第2の拡散領域と前記チャネル領域の界面に形成される空乏層から離間して配置される請求項7に記載の薄膜トランジスタ。
- 前記第2の拡散領域外部に延在した前記敷設用導電膜層と、前記ゲート絶縁層と、前記ゲート電極とで構成されるキャパシタを備えた請求項7又は8に記載の薄膜トランジスタ。
- 前記接続用導電膜層及び前記敷設用導電膜層は、同一の材料で形成されている請求項7乃至9のいずれか1項に記載の薄膜トランジスタ。
- 前記敷設用導電膜層は、高融点金属又は金属窒化膜を含んでいる請求項7乃至10のいずれか1項に記載の薄膜トランジスタ。
- 前記敷設用導電膜層は、Ti、Ta、W、Mo、TiN、TaN、WN、MoN、ZrN、VN、HfNのうち、一つ以上を含む請求項7乃至11のいずれか1項に記載の薄膜トランジスタ。
- 前記チャネル領域と前記第1の拡散領域の間、及び前記チャネル領域と前記第2の拡散領域の間に、前記第1及び第2の拡散領域より不純物濃度が低い低濃度領域を形成する請求項7乃至12のいずれか1項に記載の薄膜トランジスタ。
- 前記第1の拡散領域および前記第2の拡散領域における導電性不純物の実効濃度は1×1017/cm3以下である請求項7乃至11のいずれか1項に記載の薄膜トランジスタ。
- 基板上に、接続用導電層を形成する工程、敷設用導電層を形成する工程、第1の拡散領域、チャネル領域、及び第2の拡散領域を有する半導体層を形成する工程、前記半導体層上にゲート絶縁層を形成する工程、前記ゲート絶縁層上にゲート電極を形成する工程を持つ薄膜トランジスタの製造方法において、
前記接続用導電層は、前記半導体層の前記ゲート絶縁層側と反対側に設けられ、前記第1の拡散領域から前記チャネル領域とを電気的に接続するよう形成され、敷設用導電層は前記半導体層の前記ゲート絶縁層側と反対側に設けられ、前記第2の拡散領域と電気的に接続することを特徴とする薄膜トランジスタの製造方法。 - 請求項1乃至5又は請求項7乃至14のいずれか1項に記載の薄膜トランジスタを有する表示装置。
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TW096112485A TW200746437A (en) | 2006-04-12 | 2007-04-10 | Thin film transistor, method of manufacturing the thin film transistor, and display device |
US11/733,925 US7635619B2 (en) | 2006-04-12 | 2007-04-11 | Thin film transistor, method of manufacturing the thin film transistor, and display device |
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JP2021048414A (ja) * | 2011-02-23 | 2021-03-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
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US20090198573A1 (en) * | 2008-01-31 | 2009-08-06 | Iwin, Inc. | Advertisement Insertion System and Method |
KR101213707B1 (ko) * | 2008-07-08 | 2012-12-18 | 엘지디스플레이 주식회사 | 폴리실리콘 박막트랜지스터 및 그 제조방법 |
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