JP2007282218A5 - - Google Patents
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- Publication number
- JP2007282218A5 JP2007282218A5 JP2007094034A JP2007094034A JP2007282218A5 JP 2007282218 A5 JP2007282218 A5 JP 2007282218A5 JP 2007094034 A JP2007094034 A JP 2007094034A JP 2007094034 A JP2007094034 A JP 2007094034A JP 2007282218 A5 JP2007282218 A5 JP 2007282218A5
- Authority
- JP
- Japan
- Prior art keywords
- heater
- reference voltage
- temperature
- flow
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012544 monitoring process Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 description 13
- 238000005259 measurement Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 229920005591 polysilicon Polymers 0.000 description 8
- 239000004020 conductor Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP06006932.5 | 2006-03-31 | ||
| EP06006932A EP1840536B1 (en) | 2006-03-31 | 2006-03-31 | Flow sensor with flow-adaptable analog-digital-converter |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007282218A JP2007282218A (ja) | 2007-10-25 |
| JP2007282218A5 true JP2007282218A5 (enExample) | 2010-05-13 |
| JP4746001B2 JP4746001B2 (ja) | 2011-08-10 |
Family
ID=36992540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007094034A Active JP4746001B2 (ja) | 2006-03-31 | 2007-03-30 | フロー適応可能アナログ−デジタルコンバータを備えるフローセンサ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7490511B2 (enExample) |
| EP (1) | EP1840536B1 (enExample) |
| JP (1) | JP4746001B2 (enExample) |
| CN (1) | CN101046401B (enExample) |
| DE (1) | DE602006019688D1 (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE602006019688D1 (de) | 2006-03-31 | 2011-03-03 | Sensirion Holding Ag | Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler |
| DE602006019548D1 (de) * | 2006-03-31 | 2011-02-24 | Sensirion Holding Ag | Durchflusssensor mit Thermoelementen |
| EP1965179B1 (en) * | 2007-02-28 | 2017-04-12 | Sensirion Holding AG | Flow detector device with self check |
| DE202007003027U1 (de) * | 2007-03-01 | 2007-06-21 | Sensirion Ag | Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor |
| DE102008033058A1 (de) * | 2008-07-14 | 2010-02-04 | Continental Automotive Gmbh | Brennkraftmaschine und Verfahren zum Betreiben einer solchen Brennkraftmaschine |
| EP2187182B1 (en) * | 2008-11-12 | 2015-08-05 | Sensirion AG | Method for operating a flow sensor being repetitively subjected to a thermal and/or chemical cleaning treatment, and flow measuring device |
| IT1395955B1 (it) * | 2009-06-19 | 2012-11-02 | Parker Hannifin Srl | "procedimento e apparecchio per l'essicazione di gas compresso" |
| US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
| US8418549B2 (en) * | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
| US8441093B2 (en) * | 2011-04-15 | 2013-05-14 | Excelitas Technologies Singapore Pte. Ltd. | Shared membrane thermopile sensor array |
| US8640552B2 (en) | 2011-09-06 | 2014-02-04 | Honeywell International Inc. | MEMS airflow sensor die incorporating additional circuitry on the die |
| CN202329848U (zh) * | 2011-11-23 | 2012-07-11 | 艾默生电气公司 | 测温装置 |
| US9354095B2 (en) | 2012-10-02 | 2016-05-31 | Honeywell International Inc. | Modular flow sensor |
| EP2762864B1 (en) | 2013-01-31 | 2018-08-08 | Sensirion AG | Membrane-based sensor device and method for manufacturing the same |
| WO2014137994A1 (en) * | 2013-03-05 | 2014-09-12 | Rosenthal Scott Bruce | Thermocouple circuit based temperature sensor |
| US9255826B2 (en) * | 2013-07-16 | 2016-02-09 | Honeywell International Inc. | Temperature compensation module for a fluid flow transducer |
| US9612146B2 (en) | 2014-02-07 | 2017-04-04 | Honeywell International, Inc. | Airflow sensor with dust reduction |
| EP3029429B1 (en) * | 2014-12-04 | 2020-10-07 | Sensirion AG | Determination of fluid composition in a mass flow controller |
| EP2930475B1 (en) | 2014-12-22 | 2017-11-15 | Sensirion AG | Flow sensor arrangement |
| JP6421071B2 (ja) * | 2015-04-01 | 2018-11-07 | 日立オートモティブシステムズ株式会社 | 流量センサ |
| EP3118711B1 (en) | 2015-07-17 | 2021-01-13 | Sensirion AG | Inlet pressure perturbation insensitive mass flow controller |
| DE102015121866A1 (de) * | 2015-12-15 | 2017-06-22 | Jobst Technologies Gmbh | Verfahren zur Bestimmung einer Flussrate bzw. Strömungsgeschwindigkeit eines Mediums |
| CN105526983B (zh) * | 2015-12-28 | 2019-01-18 | 上海集成电路研发中心有限公司 | 一种气体流量传感器的结构及其制造方法 |
| JP6693182B2 (ja) * | 2016-03-09 | 2020-05-13 | 富士通株式会社 | データ取得指示生成プログラム、データ取得指示生成方法およびデータ取得指示生成装置 |
| EP4591994A3 (en) | 2016-05-03 | 2025-10-01 | Pneuma Respiratory, Inc. | A droplet delivery device for generating and delivering droplets to the pulmonary system |
| US10759326B2 (en) * | 2016-05-27 | 2020-09-01 | Carrier Corporation | Method for determining reduced airflow in transport refrigeration system |
| US10890472B2 (en) | 2016-08-25 | 2021-01-12 | Honeywell International Inc. | Low power operational methodology for a flow sensor |
| CN110799231B (zh) | 2017-05-19 | 2022-08-02 | 精呼吸股份有限公司 | 干粉输送装置及其使用方法 |
| EP3421947B1 (en) | 2017-06-30 | 2019-08-07 | Sensirion AG | Operation method for flow sensor device |
| DE102017119667B4 (de) | 2017-08-28 | 2023-05-25 | Dionex Softron Gmbh | Messung eines Fluidflusses |
| EP3697481B1 (en) | 2017-10-17 | 2024-05-22 | Pneuma Respiratory, Inc. | Nasal drug delivery apparatus and methods of use |
| US10775217B1 (en) | 2019-04-19 | 2020-09-15 | Honeywell International Inc. | Thermophile-based flow sensing device |
| CN111579108B (zh) * | 2020-07-08 | 2022-02-25 | 北京中玮科技有限公司 | 管状热电堆传感器 |
| CN114838775A (zh) * | 2022-05-17 | 2022-08-02 | 东南大学 | 一种多量程的热式气体流量传感器 |
| CN119227626B (zh) * | 2024-08-07 | 2025-09-30 | 浙江大学 | 面向集成电路早期设计阶段的热电耦合仿真方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4672997A (en) * | 1984-10-29 | 1987-06-16 | Btu Engineering Corporation | Modular, self-diagnostic mass-flow controller and system |
| DE3520392A1 (de) * | 1985-06-07 | 1986-12-11 | Robert Bosch Gmbh, 7000 Stuttgart | Abgleichverfahren fuer einen hitzdraht-luftmassenmesser und hitzdraht-luftmassenmesser zur durchfuehrung des verfahrens |
| US4884443A (en) * | 1987-12-23 | 1989-12-05 | Siemens-Bendix Automotive Electronics L. P. | Control and detection circuitry for mass airflow sensors |
| US4784721A (en) * | 1988-02-22 | 1988-11-15 | Honeywell Inc. | Integrated thin-film diaphragm; backside etch |
| JP2666163B2 (ja) * | 1991-12-04 | 1997-10-22 | 山武ハネウエル株式会社 | 流速センサの温度特性補正方法 |
| JPH0972763A (ja) * | 1995-09-07 | 1997-03-18 | Ricoh Co Ltd | マイクロセンサ |
| JPH11264332A (ja) * | 1997-12-17 | 1999-09-28 | Hitachi Ltd | 電制スロットルボディ一体型空気流量測定装置 |
| NL1008665C1 (nl) * | 1998-03-20 | 1999-09-21 | Berkin Bv | Mediumstroommeter. |
| JP3433124B2 (ja) * | 1998-12-15 | 2003-08-04 | 株式会社日立製作所 | 熱式空気流量センサ |
| EP1144958B1 (de) * | 1998-12-22 | 2004-03-24 | Sensirion AG | Verfahren und sensor zur messung eines massenflusses |
| JP4050857B2 (ja) * | 1999-04-27 | 2008-02-20 | 矢崎総業株式会社 | 流体判別装置及び流量計測装置 |
| EP1065475B1 (de) | 1999-05-31 | 2017-07-12 | Sensirion Holding AG | Verfahren zum Messen eines Gasflusses |
| AU2001222142A1 (en) * | 2000-02-04 | 2001-08-14 | Sensirion Ag | A/d converter with lookup table |
| DE10190655D2 (de) * | 2000-02-25 | 2003-01-30 | Sensirion Ag Zuerich | Sensor und Sigma-Delta-Konverter |
| CH695166A5 (de) * | 2000-04-25 | 2005-12-30 | Sensirion Ag | Verfahren und Vorrichtung zum Messen des Flusses einer Flüssigkeit. |
| AU4868901A (en) * | 2000-05-04 | 2001-11-12 | Sensirion Ag | Flow sensor |
| CH694474A5 (de) | 2000-06-23 | 2005-01-31 | Sensirion Ag | Gaszähler und Verwendung des Gaszählers. |
| GR1004106B (el) * | 2002-01-24 | 2003-01-13 | Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης | Ολοκληρωμενοι θερμικοι αισθητηρες πυριτιου χαμηλης ισχυος και διαταξεις μικρο-ροης βασισμενοι στην χρηση τεχνολογιας κοιλοτητας αερα σφραγισμενης με μεμβρανη πορωδους πυριτιου ή τεχνολογιας μικρο-καναλιων |
| EP1351039A1 (en) * | 2002-04-03 | 2003-10-08 | Sensirion AG | Flow sensor and method for producing the same |
| EP1426740B1 (de) * | 2002-11-27 | 2014-11-19 | Sensirion Holding AG | Vorrichtung zur Messung des Flusses und mindestens eines Materialparameters eines Fluids |
| JP3718198B2 (ja) * | 2003-02-26 | 2005-11-16 | 株式会社日立製作所 | 流量センサ |
| NL1025617C2 (nl) * | 2003-05-13 | 2004-11-18 | Berkin Bv | Massadebietmeter. |
| JP4292026B2 (ja) * | 2003-05-30 | 2009-07-08 | 株式会社日立製作所 | 熱式流量センサ |
| CN1297802C (zh) * | 2004-02-12 | 2007-01-31 | 李韫言 | 一种全硅集成流量传感器及其制造方法 |
| DE602006019688D1 (de) | 2006-03-31 | 2011-03-03 | Sensirion Holding Ag | Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler |
| DE602006019548D1 (de) * | 2006-03-31 | 2011-02-24 | Sensirion Holding Ag | Durchflusssensor mit Thermoelementen |
| EP1873499A1 (en) | 2006-06-30 | 2008-01-02 | Sensirion AG | Thermal flow sensor for high flow velocities |
-
2006
- 2006-03-31 DE DE602006019688T patent/DE602006019688D1/de active Active
- 2006-03-31 EP EP06006932A patent/EP1840536B1/en active Active
-
2007
- 2007-02-22 US US11/710,193 patent/US7490511B2/en active Active
- 2007-03-30 CN CN2007100898147A patent/CN101046401B/zh active Active
- 2007-03-30 JP JP2007094034A patent/JP4746001B2/ja active Active
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