CN101046401B - 具有流量可适应的模数转换器的流量传感器 - Google Patents

具有流量可适应的模数转换器的流量传感器 Download PDF

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Publication number
CN101046401B
CN101046401B CN2007100898147A CN200710089814A CN101046401B CN 101046401 B CN101046401 B CN 101046401B CN 2007100898147 A CN2007100898147 A CN 2007100898147A CN 200710089814 A CN200710089814 A CN 200710089814A CN 101046401 B CN101046401 B CN 101046401B
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China
Prior art keywords
well heater
temperature
reference voltage
flow
converter
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CN2007100898147A
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Chinese (zh)
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CN101046401A (zh
Inventor
梅尔·菲利克斯
莱奇尼尔·莫瑞兹
霍南格·马克
冯沃德克瑞奇·马卡
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Sheng Yuan Holdings Co
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Sensirion AG
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Publication of CN101046401A publication Critical patent/CN101046401A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Analogue/Digital Conversion (AREA)
CN2007100898147A 2006-03-31 2007-03-30 具有流量可适应的模数转换器的流量传感器 Active CN101046401B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06006932.5 2006-03-31
EP06006932A EP1840536B1 (en) 2006-03-31 2006-03-31 Flow sensor with flow-adaptable analog-digital-converter

Publications (2)

Publication Number Publication Date
CN101046401A CN101046401A (zh) 2007-10-03
CN101046401B true CN101046401B (zh) 2011-08-24

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CN2007100898147A Active CN101046401B (zh) 2006-03-31 2007-03-30 具有流量可适应的模数转换器的流量传感器

Country Status (5)

Country Link
US (1) US7490511B2 (enExample)
EP (1) EP1840536B1 (enExample)
JP (1) JP4746001B2 (enExample)
CN (1) CN101046401B (enExample)
DE (1) DE602006019688D1 (enExample)

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US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US8418549B2 (en) * 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US8441093B2 (en) * 2011-04-15 2013-05-14 Excelitas Technologies Singapore Pte. Ltd. Shared membrane thermopile sensor array
US8640552B2 (en) 2011-09-06 2014-02-04 Honeywell International Inc. MEMS airflow sensor die incorporating additional circuitry on the die
CN202329848U (zh) * 2011-11-23 2012-07-11 艾默生电气公司 测温装置
US9354095B2 (en) 2012-10-02 2016-05-31 Honeywell International Inc. Modular flow sensor
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WO2014137994A1 (en) * 2013-03-05 2014-09-12 Rosenthal Scott Bruce Thermocouple circuit based temperature sensor
US9255826B2 (en) * 2013-07-16 2016-02-09 Honeywell International Inc. Temperature compensation module for a fluid flow transducer
US9612146B2 (en) 2014-02-07 2017-04-04 Honeywell International, Inc. Airflow sensor with dust reduction
EP3029429B1 (en) * 2014-12-04 2020-10-07 Sensirion AG Determination of fluid composition in a mass flow controller
EP2930475B1 (en) 2014-12-22 2017-11-15 Sensirion AG Flow sensor arrangement
JP6421071B2 (ja) * 2015-04-01 2018-11-07 日立オートモティブシステムズ株式会社 流量センサ
EP3118711B1 (en) 2015-07-17 2021-01-13 Sensirion AG Inlet pressure perturbation insensitive mass flow controller
DE102015121866A1 (de) * 2015-12-15 2017-06-22 Jobst Technologies Gmbh Verfahren zur Bestimmung einer Flussrate bzw. Strömungsgeschwindigkeit eines Mediums
CN105526983B (zh) * 2015-12-28 2019-01-18 上海集成电路研发中心有限公司 一种气体流量传感器的结构及其制造方法
JP6693182B2 (ja) * 2016-03-09 2020-05-13 富士通株式会社 データ取得指示生成プログラム、データ取得指示生成方法およびデータ取得指示生成装置
EP4591994A3 (en) 2016-05-03 2025-10-01 Pneuma Respiratory, Inc. A droplet delivery device for generating and delivering droplets to the pulmonary system
US10759326B2 (en) * 2016-05-27 2020-09-01 Carrier Corporation Method for determining reduced airflow in transport refrigeration system
US10890472B2 (en) 2016-08-25 2021-01-12 Honeywell International Inc. Low power operational methodology for a flow sensor
CN110799231B (zh) 2017-05-19 2022-08-02 精呼吸股份有限公司 干粉输送装置及其使用方法
EP3421947B1 (en) 2017-06-30 2019-08-07 Sensirion AG Operation method for flow sensor device
DE102017119667B4 (de) 2017-08-28 2023-05-25 Dionex Softron Gmbh Messung eines Fluidflusses
EP3697481B1 (en) 2017-10-17 2024-05-22 Pneuma Respiratory, Inc. Nasal drug delivery apparatus and methods of use
US10775217B1 (en) 2019-04-19 2020-09-15 Honeywell International Inc. Thermophile-based flow sensing device
CN111579108B (zh) * 2020-07-08 2022-02-25 北京中玮科技有限公司 管状热电堆传感器
CN114838775A (zh) * 2022-05-17 2022-08-02 东南大学 一种多量程的热式气体流量传感器
CN119227626B (zh) * 2024-08-07 2025-09-30 浙江大学 面向集成电路早期设计阶段的热电耦合仿真方法

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EP0204183A1 (de) * 1985-06-07 1986-12-10 Robert Bosch Gmbh Abgleichverfahren für einen Hitzdraht-Luftmassenmesser und Hitzdraht-Luftmassenmesser
CN1620402A (zh) * 2002-01-24 2005-05-25 “德默克里托斯”国家科学研究中心 以多孔硅封气孔技术或微通路技术的使用为基础的低功率硅热传感器和微射流装置
CN1654927A (zh) * 2004-02-12 2005-08-17 李韫言 一种全硅集成流量传感器及其制造方法

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Also Published As

Publication number Publication date
JP4746001B2 (ja) 2011-08-10
JP2007282218A (ja) 2007-10-25
EP1840536A1 (en) 2007-10-03
US7490511B2 (en) 2009-02-17
US20070227242A1 (en) 2007-10-04
CN101046401A (zh) 2007-10-03
DE602006019688D1 (de) 2011-03-03
EP1840536B1 (en) 2011-01-19

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