JP4746001B2 - フロー適応可能アナログ−デジタルコンバータを備えるフローセンサ - Google Patents

フロー適応可能アナログ−デジタルコンバータを備えるフローセンサ Download PDF

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JP4746001B2
JP4746001B2 JP2007094034A JP2007094034A JP4746001B2 JP 4746001 B2 JP4746001 B2 JP 4746001B2 JP 2007094034 A JP2007094034 A JP 2007094034A JP 2007094034 A JP2007094034 A JP 2007094034A JP 4746001 B2 JP4746001 B2 JP 4746001B2
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heater
reference voltage
temperature
flow
signal
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Japanese (ja)
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JP2007282218A (ja
JP2007282218A5 (enExample
Inventor
フェリックス・メイヤー
モリッツ・レヒナー
マルク・ホルヌング
マルク・ボン・バルドキルヒ
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ゼンジリオン・ホールディング・アクチエンゲゼルシャフト
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Analogue/Digital Conversion (AREA)
JP2007094034A 2006-03-31 2007-03-30 フロー適応可能アナログ−デジタルコンバータを備えるフローセンサ Active JP4746001B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06006932.5 2006-03-31
EP06006932A EP1840536B1 (en) 2006-03-31 2006-03-31 Flow sensor with flow-adaptable analog-digital-converter

Publications (3)

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JP2007282218A JP2007282218A (ja) 2007-10-25
JP2007282218A5 JP2007282218A5 (enExample) 2010-05-13
JP4746001B2 true JP4746001B2 (ja) 2011-08-10

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JP2007094034A Active JP4746001B2 (ja) 2006-03-31 2007-03-30 フロー適応可能アナログ−デジタルコンバータを備えるフローセンサ

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Country Link
US (1) US7490511B2 (enExample)
EP (1) EP1840536B1 (enExample)
JP (1) JP4746001B2 (enExample)
CN (1) CN101046401B (enExample)
DE (1) DE602006019688D1 (enExample)

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JP2016194463A (ja) * 2015-04-01 2016-11-17 日立オートモティブシステムズ株式会社 流量センサ

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Publication number Priority date Publication date Assignee Title
JP2016194463A (ja) * 2015-04-01 2016-11-17 日立オートモティブシステムズ株式会社 流量センサ

Also Published As

Publication number Publication date
JP2007282218A (ja) 2007-10-25
EP1840536A1 (en) 2007-10-03
CN101046401B (zh) 2011-08-24
US7490511B2 (en) 2009-02-17
US20070227242A1 (en) 2007-10-04
CN101046401A (zh) 2007-10-03
DE602006019688D1 (de) 2011-03-03
EP1840536B1 (en) 2011-01-19

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