JP2007227893A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2007227893A JP2007227893A JP2006351653A JP2006351653A JP2007227893A JP 2007227893 A JP2007227893 A JP 2007227893A JP 2006351653 A JP2006351653 A JP 2006351653A JP 2006351653 A JP2006351653 A JP 2006351653A JP 2007227893 A JP2007227893 A JP 2007227893A
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Abstract
【解決手段】半導体装置1は、半導体チップ3と、その半導体チップ3上に形成されリードフレーム4と電気的に接続されるソース電極3a、ゲート電極3bとを有する。電極3aを、リードフレーム4の端部に形成された薄膜形状の接続部4aとレーザ溶接することで、リードフレーム4と電気的に接続する。
【選択図】図1
Description
2 ダイパッド
3 半導体チップ
3a、104s ソース電極
3b、104g ゲート電極
4、14、103 リードフレーム
4a、25a、25b 接続部
5 接合部
6 カバー材
15 リボン状接続材
25 ワイヤ
41 基材
42 めっき層
51 接合材
102 モールド樹脂
103g ゲート側端子
103s ソース側端子
103d ドレイン側端子
105 半導体素子
106b リードフレーム側接続部分
106 電気経路部材
106a 電極側接続部分
107s ソース側ポスト部
107d ドレイン側ポスト部
108 ボンディングワイヤ
Claims (19)
- 半導体チップと、その半導体チップ上に形成され外部リードと電気的に接続される電極とを有する半導体装置の製造方法であって、
前記外部リードに電気的に接続され、その一部又は全部が薄膜形状とされた接続領域を有する接続部の当該接続領域と前記電極とをレーザ溶接により溶接する
ことを特徴とする半導体装置の製造方法。 - 前記電極の厚みに対する前記接続領域の厚みの比率が5乃至30である
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記接続部の厚み、並びに所望の電流値及び抵抗値に基づいて前記接続部における前記電極との接触面積を決定する
ことを特徴とする請求項2記載の半導体装置の製造方法。 - 一端に全面が前記接続領域とされた接続部を形成した前記外部リードを用い、当該接続部と前記電極とをレーザ溶接する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 一端に前記接続領域を有する接続部を形成したワイヤを接続部材として用い、当該接続部材の一端を前記接続部として前記電極とレーザ溶接する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 導電性を有する薄膜リボンを接続部材として用い、当該接続部材の一端を前記接続部として前記電極とレーザ溶接する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 一端にディンプル加工により形成した前記接続領域を有する前記接続部と前記電極とをレーザ溶接する
請求項1乃至5のいずれか1項記載の半導体装置の製造方法。 - 前記接続材の他端を前記外部リードとレーザ溶接する
ことを特徴とする請求項5乃至7のいずれか1項記載の半導体装置の製造方法。 - 前記電極の周囲に非導電性のカバー層を有し、
前記接続部の面積は、前記電極の面積より大きい
ことを特徴とする請求項1乃至8のいずれか1項記載の半導体装置の製造方法。 - 前記接続部の複数の箇所にレーザを照射してレーザ溶接する
ことを特徴とする請求項1乃至8のいずれか1項記載の半導体装置の製造方法。 - 前記電極は、アルミニウム及び銅の少なくとも1つを含む金属からなる
ことを特徴とする請求項1乃至8のいずれか1項記載の半導体装置の製造方法。 - 前記接続部は、アルミニウム、銅、金、銀、パラジウム及びニッケルからなる群から選択された1以上の金属を含む材料からなる
ことを特徴とする請求項1乃至8のいずれか1項記載の半導体装置の製造方法。 - 前記接続部は、銅又は銅合金にニッケルめっきが施されたものである
ことを特徴とする請求項1乃至8のいずれか1項記載の半導体装置の製造方法。 - 前記接続部の前記接続領域に形成された1又は複数の開口に埋め込まれた接合材を有し、
前記接合材を含む領域にレーザ光を照射して接合材と前記電極とを前記レーザ溶接により溶接する
ことを特徴とする請求項1乃至8のいずれか1項記載の半導体装置の製造方法。 - 前記接合材は、前記接続部の材料より融点が低い
ことを特徴とする請求項14記載の半導体装置の製造方法。 - 前記接続部の材料は、銅を主成分とし、
前記接合材の材料は、アルミニウムを主成分とする
ことを特徴とする請求項14記載の半導体装置の製造方法。 - 前記半導体チップは第1のリードフレームのダイパッドにマウントされており、
前記外部リードは前記第1のリードフレームとは異なる第2のリードフレームに形成されている
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記半導体チップは上面にゲート電極及びソース電極を備え、下面にドレイン電極を備えたトランジスタチップであって、
前記ダイパッドには、ドレインリード部が一体に形成され、
前記外部リードは前記ソース電極に電気的に接続されるソースリード部である
ことを特徴とする請求項17記載の半導体装置の製造方法。 - 前記トランジスタチップは、MOSトランジスタチップである
ことを特徴とする請求項18項記載の半導体装置の製造方法。
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- 2007-01-23 CN CN2007100040992A patent/CN101009235B/zh not_active Expired - Fee Related
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JP2009297737A (ja) * | 2008-06-12 | 2009-12-24 | Denso Corp | レーザ溶接方法 |
JP2010118577A (ja) * | 2008-11-14 | 2010-05-27 | Sumitomo Electric Ind Ltd | 樹脂封止型半導体装置およびその製造方法 |
JP2014012284A (ja) * | 2012-07-04 | 2014-01-23 | Toyota Motor Corp | 加熱方法及び接合方法 |
WO2017208941A1 (ja) * | 2016-06-01 | 2017-12-07 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
WO2019077866A1 (ja) * | 2017-10-19 | 2019-04-25 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
US11267076B2 (en) | 2017-10-19 | 2022-03-08 | Fuji Electric Co., Ltd. | Semiconductor device and semiconductor device fabrication method |
DE102018217231A1 (de) | 2017-10-24 | 2019-04-25 | Mitsubishi Electric Corporation | Halbleitervorrichtung und Verfahren zur Fertigung derselben |
US10615131B2 (en) | 2017-10-24 | 2020-04-07 | Mitsubishi Electric Corporation | Semiconductor device with high quality and reliability wiring connection, and method for manufacturing the same |
DE102018217231B4 (de) | 2017-10-24 | 2024-01-25 | Mitsubishi Electric Corporation | Halbleitervorrichtung und Verfahren zur Fertigung derselben |
Also Published As
Publication number | Publication date |
---|---|
EP1811557A3 (en) | 2007-10-10 |
CN101009235A (zh) | 2007-08-01 |
CN101009235B (zh) | 2011-12-21 |
JP4842118B2 (ja) | 2011-12-21 |
US20070172980A1 (en) | 2007-07-26 |
US7772031B2 (en) | 2010-08-10 |
EP1811557A2 (en) | 2007-07-25 |
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