JP2006525878A5 - - Google Patents

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Publication number
JP2006525878A5
JP2006525878A5 JP2006519155A JP2006519155A JP2006525878A5 JP 2006525878 A5 JP2006525878 A5 JP 2006525878A5 JP 2006519155 A JP2006519155 A JP 2006519155A JP 2006519155 A JP2006519155 A JP 2006519155A JP 2006525878 A5 JP2006525878 A5 JP 2006525878A5
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JP
Japan
Prior art keywords
substrate
polishing
measurement
fluid
light
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006519155A
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English (en)
Japanese (ja)
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JP2006525878A (ja
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Priority claimed from PCT/JP2004/006768 external-priority patent/WO2004101223A1/en
Publication of JP2006525878A publication Critical patent/JP2006525878A/ja
Publication of JP2006525878A5 publication Critical patent/JP2006525878A5/ja
Pending legal-status Critical Current

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JP2006519155A 2003-05-16 2004-05-13 基板研磨装置 Pending JP2006525878A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003138782 2003-05-16
JP2003138479 2003-05-16
JP2003138496 2003-05-16
PCT/JP2004/006768 WO2004101223A1 (en) 2003-05-16 2004-05-13 Substrate polishing apparatus

Publications (2)

Publication Number Publication Date
JP2006525878A JP2006525878A (ja) 2006-11-16
JP2006525878A5 true JP2006525878A5 (https=) 2007-06-28

Family

ID=33458361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006519155A Pending JP2006525878A (ja) 2003-05-16 2004-05-13 基板研磨装置

Country Status (7)

Country Link
US (3) US20040242121A1 (https=)
EP (1) EP1641597A4 (https=)
JP (1) JP2006525878A (https=)
KR (1) KR20060009327A (https=)
CN (1) CN1791490B (https=)
TW (1) TWI338605B (https=)
WO (1) WO2004101223A1 (https=)

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KR102815099B1 (ko) 2018-12-26 2025-06-04 가부시키가이샤 에바라 세이사꾸쇼 광학식 막 두께 측정 시스템의 세정 방법

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Publication number Priority date Publication date Assignee Title
KR102815099B1 (ko) 2018-12-26 2025-06-04 가부시키가이샤 에바라 세이사꾸쇼 광학식 막 두께 측정 시스템의 세정 방법

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