JP2006522727A - 装入ロックを有するコーティングプラントおよびそのための装置 - Google Patents
装入ロックを有するコーティングプラントおよびそのための装置 Download PDFInfo
- Publication number
- JP2006522727A JP2006522727A JP2005518676A JP2005518676A JP2006522727A JP 2006522727 A JP2006522727 A JP 2006522727A JP 2005518676 A JP2005518676 A JP 2005518676A JP 2005518676 A JP2005518676 A JP 2005518676A JP 2006522727 A JP2006522727 A JP 2006522727A
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- latch
- coating
- opening
- lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/205—Special features or arrangements of the sealing the sealing being arranged on the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/2085—Movable sealing bodies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Abstract
Description
Claims (20)
- 特に大きな表面積を有する基板、好ましくはファサードガラスをコーティングするためのコーティングプラント、特には真空コーティングプラントであり、コーティングの間、前記基板を収容するコーティングチャンバーと、そこを通して前記基板を前記コーティングチャンバー内に導入するまたは前記コーティングチャンバーから取り出すところの少なくとも1つの装入ロックとを有するコーティングプラントであって、前記ロックが、シャッター(6)によって閉じることができる開口部(13)を備え、前記シャッター(6)は少なくとも1つのラッチ(7)によって固定することができるコーティングプラントにおいて、
前記シャッター(6)と前記ラッチ(7)との両方を第1の開位置から第2の閉位置へと動かす手段が設けられており、前記シャッター(6)と前記ラッチ(7)との動作が互いに連動(結合)されていて、それにより、前記シャッター(6)は、前記ラッチ(7)によって自動的に、前記シャッター(6)の閉鎖後に固定され、かつ前記シャッター(6)の開放前に解放されることを特徴とするコーティングプラント。 - 前記シャッター(6)および前記ラッチ(7)の動作が機械的に制御された動作であることを特徴とする、請求項1に記載のコーティング装置。
- 前記シャッター(6)の動作が回転動作または旋回転作であり、前記ラッチ(7)の動作が回転、旋回または並進動作すなわち持上げ動作であることを特徴とする、請求項1または2に記載のコーティング装置。
- 前記シャッター(6)および前記ラッチ(7)を動かす前記手段が、駆動側の駆動軸(2)と、前記シャッター(6)および前記ラッチ(7)に連結された少なくとも2本の連動する従動軸(3,4)とを有する伝動装置を備えることを特徴とする、請求項1〜3のいずれか1項に記載のコーティング装置。
- 前記伝動装置が、カム駆動装置、特には、往復カム駆動装置もしくは揺動カム駆動装置、または回転持上げ駆動装置であることを特徴とする、請求項4に記載のコーティング装置。
- 前記シャッター(6)の動作および前記ラッチ(7)の動作が、位相がずらされており、特には、前記ラッチ(7)の動作が、閉鎖するときには遅らされ、開放するときには先行することを特徴とする、請求項1〜5のいずれか1項に記載のコーティング装置。
- 前記シャッター(6)と前記ラッチ(7)との両方がそれぞれの回転軸線を有しており、前記シャッター(6)および前記ラッチ(7)の前記回転軸線が、前記ロック開口部の両側に設けられていることを特徴とする、請求項1〜6のいずれか1項に記載のコーティング装置。
- 前記シャッター(6)と前記ラッチ(7)とを動かす前記手段が、自己拘束装置ないしは自己ロック装置を備えることを特徴とする、請求項1〜7のいずれか1項に記載のコーティング装置。
- 前記シャッター(6)が、フラップホルダー(9)と、前記開口部(13)のシール座(14)内に延びかつシールすることができるシール要素(8)とを備え、前記シール要素(8)が、弾性手段、特には、棒ばねを好ましくは有するばね装置(10)によって、前記フラップホルダー(9)に対して可動なようにして取り付けられていることを特徴とする、請求項1〜8のいずれか1項に記載のコーティング装置。
- 前記棒ばねが、前記シール要素(8)および前記ロック開口部の長手方向に平行に向けられており、前記棒ばねは、前記フラップホルダー(9)に対して、特には前記ロック開口部(13)の方向に予め張力がかけられていることを特徴とする、請求項9に記載のコーティング装置。
- 前記シャッター(6)、また特には前記シール要素(8)が、少なくともシール面(15)と、前記ロック開口部(13)内に延びる中央部(16)とを備えるシールサイドを有し、前記シール面(15)が、閉位置にあるときに前記開口部(13)のシール座(14)のシール部と接触することを特徴とする、請求項1〜10のいずれか1項に記載のコーティング装置。
- 前記シャッター(6)が、前記ロック開口部(13)の前記シール座(14)の平面内に、特には前記シール座(14)のシール部と前記シャッター(6)の前記シール面(15)との平面内に実質的に配置されている回転軸線(20)を有することを特徴とする、請求項11に記載のコーティング装置。
- 前記シール要素(8)および/または前記シール座(14)が、少なくとも1つのシールリング(17)を備えることを特徴とする、請求項9〜12のいずれか1項に記載のコーティング装置。
- 前記中央部(16)が錐状または先細形状をなし、前記中央部(16)が、特には、前記シャッター(6)の前記周囲のシール面(15)から突出していることを特徴とする、請求項9〜12のいずれか1項に記載のコーティング装置。
- 実質的に互いに相補的に設計され、それにより互いに非常に滑らかかつほとんど摩擦や摩耗なしに係合されるようになることを可能とするそれぞれの係合面、特には湾曲した係合面を前記シャッター(6)および前記ラッチ(7)が有することを特徴とする、請求項1〜14のいずれか1項に記載のコーティング装置。
- 回転可能に支持され、それにより前記シャッター(6)を固定すべきときに前記シャッター(6)との接触を可能とするローラーを前記シャッター(6)および前記ラッチ(7)が備えることを特徴とする、請求項1〜15のいずれか1項に記載のコーティング装置。
- 前記ラッチ(7)が、前記第2の閉位置にあるときに、前記シャッター(6)を前記ロック開口部(13)に押し付けることを特徴とする、請求項1〜16のいずれか1項に記載のコーティング装置。
- ロック開口部(13)を閉じるためのシャッター(6)と、前記シャッター(6)を固定するための少なくとも1つのラッチ(7)とを備えるロック装置、特には請求項1〜17のいずれかに記載のコーティングプラント用の装置において、請求項1の特徴および/または請求項2〜16の特徴によって特徴づけられる装置。
- ロック開口部(13)と、さらなる開口部(19)とが設けられ、かつ前記シャッター(6)および前記ラッチ(7)が収容される、ハウジング(5)を備えることを特徴とする、請求項18に記載の装置。
- 前記ハウジング(5)が、特には気密連結のためのシール手段と、隣接する部品への取付部とを備えることを特徴とする、請求項18または19のいずれかに記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP0314749 | 2003-12-22 | ||
PCT/EP2004/002542 WO2005064038A1 (en) | 2003-12-22 | 2004-03-11 | Coating plant with a charging lock and device therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006522727A true JP2006522727A (ja) | 2006-10-05 |
JP4448825B2 JP4448825B2 (ja) | 2010-04-14 |
Family
ID=34717119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005518676A Expired - Fee Related JP4448825B2 (ja) | 2003-12-22 | 2004-03-11 | 装入ロックを有するコーティングプラントおよびそのための装置 |
Country Status (10)
Country | Link |
---|---|
US (2) | US7479189B2 (ja) |
EP (1) | EP1716268B1 (ja) |
JP (1) | JP4448825B2 (ja) |
KR (1) | KR100692585B1 (ja) |
CN (1) | CN1745192B (ja) |
AT (1) | ATE474073T1 (ja) |
DE (1) | DE602004028165D1 (ja) |
PL (1) | PL1716268T3 (ja) |
TW (1) | TWI250047B (ja) |
WO (1) | WO2005064038A1 (ja) |
Families Citing this family (11)
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US8352400B2 (en) | 1991-12-23 | 2013-01-08 | Hoffberg Steven M | Adaptive pattern recognition based controller apparatus and method and human-factored interface therefore |
US7904187B2 (en) | 1999-02-01 | 2011-03-08 | Hoffberg Steven M | Internet appliance system and method |
FR2966546B1 (fr) * | 2010-10-22 | 2013-08-23 | Snecma | Vanne d'isolement commandee a etancheite renforcee |
KR102138675B1 (ko) * | 2013-11-19 | 2020-07-28 | 세메스 주식회사 | 기판처리장치 |
FR3032769B1 (fr) * | 2015-02-18 | 2017-10-13 | Perolo Sas | Clapet de fond de cuve |
CN109707853B (zh) * | 2016-01-22 | 2021-03-16 | 上海鸿研物流技术有限公司 | 阀门 |
JP3211970U (ja) * | 2016-04-07 | 2017-08-17 | オルボテック リミテッド | ドナー取扱装置 |
CN109844383B (zh) * | 2017-09-27 | 2020-10-09 | 应用材料公司 | 用于真空密封的锁定阀、真空腔室以及真空处理系统 |
WO2019101318A1 (en) * | 2017-11-23 | 2019-05-31 | Applied Materials, Inc. | Lock valve for vacuum sealing, vacuum chamber and vacuum processing system |
CN108745423B (zh) * | 2018-06-21 | 2021-01-26 | 江苏中科睿赛环境工程有限公司 | 蜂窝催化剂浸渍晾干系统 |
US20210047823A1 (en) * | 2019-08-16 | 2021-02-18 | Gabe Coscarella | Backwater valve |
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GB1070331A (en) * | 1963-05-14 | 1967-06-01 | Allen & Hanburys Ltd | Improvements relating to pressure or vacuum vessels |
US3539212A (en) * | 1968-06-26 | 1970-11-10 | Alexandr Pavlovich Poltorak | Lock for a quick opening cover of a pressure-resistant shell |
US3837566A (en) * | 1972-07-31 | 1974-09-24 | Gte Automatic Electric Lab Inc | Self-locking coin receptacle |
US5313738A (en) * | 1991-01-22 | 1994-05-24 | Mdt Corporation | Closure for doors used with small and medium sized pressure vessels |
US5184422A (en) * | 1991-12-10 | 1993-02-09 | American Ingredients Company | Swing away manway assembly |
US5752796A (en) * | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
TW344847B (en) * | 1996-08-29 | 1998-11-11 | Tokyo Electron Co Ltd | Substrate treatment system, substrate transfer system, and substrate transfer method |
US5815996A (en) * | 1997-01-31 | 1998-10-06 | Granger; Timothy L. | Interior-mounted cover for roof ventilator |
DE59805566D1 (de) * | 1997-04-11 | 2002-10-24 | Leybold Systems Gmbh | Verfahren und Vorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
DE29706556U1 (de) | 1997-04-11 | 1997-07-10 | Leybold Systems Gmbh | Handlingsvorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
DE29716440U1 (de) * | 1997-09-12 | 1997-12-11 | Balzers Hochvakuum | Sputterstation |
ES2188200T3 (es) * | 1998-07-30 | 2003-06-16 | Armando Cauduro | Escotilla para vehiculo. |
GB0005754D0 (en) * | 2000-03-11 | 2000-05-03 | Banham Patent Locks Ltd | Lock |
DE10202826B4 (de) * | 2002-01-24 | 2005-05-04 | Wittenstein Motion Control Gmbh | Vorrichtung zum Betätigen von Türen von Fahrzeugen |
FR2841588B1 (fr) * | 2002-06-26 | 2007-03-16 | Airbus France | Porte a ouverture rapide |
-
2004
- 2004-03-11 JP JP2005518676A patent/JP4448825B2/ja not_active Expired - Fee Related
- 2004-03-11 AT AT04719416T patent/ATE474073T1/de not_active IP Right Cessation
- 2004-03-11 DE DE602004028165T patent/DE602004028165D1/de not_active Expired - Lifetime
- 2004-03-11 WO PCT/EP2004/002542 patent/WO2005064038A1/en not_active Application Discontinuation
- 2004-03-11 PL PL04719416T patent/PL1716268T3/pl unknown
- 2004-03-11 US US10/547,718 patent/US7479189B2/en not_active Expired - Fee Related
- 2004-03-11 CN CN200480003300XA patent/CN1745192B/zh not_active Expired - Fee Related
- 2004-03-11 EP EP04719416A patent/EP1716268B1/en not_active Expired - Lifetime
- 2004-03-11 KR KR1020057013920A patent/KR100692585B1/ko active IP Right Grant
- 2004-03-15 TW TW093106817A patent/TWI250047B/zh not_active IP Right Cessation
-
2007
- 2007-12-13 US US11/955,876 patent/US20080086948A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
KR100692585B1 (ko) | 2007-03-13 |
DE602004028165D1 (de) | 2010-08-26 |
EP1716268A1 (en) | 2006-11-02 |
CN1745192B (zh) | 2010-08-18 |
PL1716268T3 (pl) | 2010-12-31 |
KR20060034621A (ko) | 2006-04-24 |
US7479189B2 (en) | 2009-01-20 |
US20080086948A1 (en) | 2008-04-17 |
US20060162659A1 (en) | 2006-07-27 |
TW200529934A (en) | 2005-09-16 |
CN1745192A (zh) | 2006-03-08 |
ATE474073T1 (de) | 2010-07-15 |
JP4448825B2 (ja) | 2010-04-14 |
WO2005064038A1 (en) | 2005-07-14 |
TWI250047B (en) | 2006-03-01 |
EP1716268B1 (en) | 2010-07-14 |
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