JP2006514706A5 - - Google Patents
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- Publication number
- JP2006514706A5 JP2006514706A5 JP2004564827A JP2004564827A JP2006514706A5 JP 2006514706 A5 JP2006514706 A5 JP 2006514706A5 JP 2004564827 A JP2004564827 A JP 2004564827A JP 2004564827 A JP2004564827 A JP 2004564827A JP 2006514706 A5 JP2006514706 A5 JP 2006514706A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- composition
- linked
- perfluoroalkanesulfonyl
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 claims description 52
- 239000000203 mixture Substances 0.000 claims description 48
- 239000002253 acid Substances 0.000 claims description 38
- 125000004432 carbon atom Chemical group C* 0.000 claims description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 21
- 229910052802 copper Inorganic materials 0.000 claims description 21
- 239000010949 copper Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 18
- LGRLWUINFJPLSH-UHFFFAOYSA-N methanide Chemical compound [CH3-] LGRLWUINFJPLSH-UHFFFAOYSA-N 0.000 claims description 17
- 125000002015 acyclic group Chemical group 0.000 claims description 16
- 125000000217 alkyl group Chemical group 0.000 claims description 16
- 125000004122 cyclic group Chemical group 0.000 claims description 16
- 125000005842 heteroatom Chemical group 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 16
- 229910052717 sulfur Inorganic materials 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 239000007800 oxidant agent Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 239000007983 Tris buffer Substances 0.000 claims description 11
- 150000003949 imides Chemical class 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000004090 dissolution Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 4
- 150000001879 copper Chemical class 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000000654 additive Substances 0.000 description 12
- 239000003795 chemical substances by application Substances 0.000 description 12
- 150000007513 acids Chemical class 0.000 description 6
- 239000002738 chelating agent Substances 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000003112 inhibitor Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000007517 polishing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/319,954 US6884338B2 (en) | 2002-12-16 | 2002-12-16 | Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
| PCT/US2003/034259 WO2004061028A1 (en) | 2002-12-16 | 2003-10-28 | Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006514706A JP2006514706A (ja) | 2006-05-11 |
| JP2006514706A5 true JP2006514706A5 (https=) | 2006-11-30 |
| JP4181129B2 JP4181129B2 (ja) | 2008-11-12 |
Family
ID=32506753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004564827A Expired - Fee Related JP4181129B2 (ja) | 2002-12-16 | 2003-10-28 | 銅配線および／またはフィルムを研磨および／または浄化する方法およびそのための組成物 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6884338B2 (https=) |
| EP (1) | EP1572821A1 (https=) |
| JP (1) | JP4181129B2 (https=) |
| KR (1) | KR20050085661A (https=) |
| CN (1) | CN100448941C (https=) |
| AU (1) | AU2003286734A1 (https=) |
| WO (1) | WO2004061028A1 (https=) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7129160B2 (en) | 2002-08-29 | 2006-10-31 | Micron Technology, Inc. | Method for simultaneously removing multiple conductive materials from microelectronic substrates |
| US7192335B2 (en) * | 2002-08-29 | 2007-03-20 | Micron Technology, Inc. | Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates |
| US7153195B2 (en) | 2000-08-30 | 2006-12-26 | Micron Technology, Inc. | Methods and apparatus for selectively removing conductive material from a microelectronic substrate |
| US7134934B2 (en) * | 2000-08-30 | 2006-11-14 | Micron Technology, Inc. | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium |
| US7220166B2 (en) * | 2000-08-30 | 2007-05-22 | Micron Technology, Inc. | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| US7112121B2 (en) * | 2000-08-30 | 2006-09-26 | Micron Technology, Inc. | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate |
| US7078308B2 (en) * | 2002-08-29 | 2006-07-18 | Micron Technology, Inc. | Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate |
| TWI250202B (en) * | 2003-05-13 | 2006-03-01 | Eternal Chemical Co Ltd | Process and slurry for chemical mechanical polishing |
| US7112122B2 (en) * | 2003-09-17 | 2006-09-26 | Micron Technology, Inc. | Methods and apparatus for removing conductive material from a microelectronic substrate |
| US7153777B2 (en) | 2004-02-20 | 2006-12-26 | Micron Technology, Inc. | Methods and apparatuses for electrochemical-mechanical polishing |
| US7566391B2 (en) | 2004-09-01 | 2009-07-28 | Micron Technology, Inc. | Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media |
| JP2007088370A (ja) * | 2005-09-26 | 2007-04-05 | Fujifilm Corp | 水系研磨液及び化学機械的研磨方法 |
| KR100643628B1 (ko) * | 2005-11-04 | 2006-11-10 | 제일모직주식회사 | 다결정 실리콘 연마용 ｃｍｐ 슬러리 조성물 및 이의 제조방법 |
| US8512593B2 (en) * | 2005-11-04 | 2013-08-20 | Cheil Industries, Inc. | Chemical mechanical polishing slurry compositions, methods of preparing the same and methods of using the same |
| JP4897604B2 (ja) * | 2007-07-27 | 2012-03-14 | 株式会社Ｄｎｐファインケミカル | フォトマスク製造用のエッチング液 |
| JP4940102B2 (ja) * | 2007-10-25 | 2012-05-30 | 株式会社 マイクロプロセス | エッチング剤組成物及びそれを用いた半導体装置の製造方法 |
| JP2011198901A (ja) * | 2010-03-18 | 2011-10-06 | Dnp Fine Chemicals Co Ltd | 導電膜用エッチング液および導電膜のエッチング方法 |
| CN101972755B (zh) * | 2010-07-21 | 2012-02-01 | 河北工业大学 | Ulsi铜材料抛光后表面清洗方法 |
| CN103160909B (zh) * | 2011-12-15 | 2016-04-27 | 比亚迪股份有限公司 | 一种用于电蚀刻非晶合金材料件的电蚀刻液及蚀刻方法 |
| KR101842033B1 (ko) * | 2014-01-06 | 2018-03-26 | 한화테크윈 주식회사 | 그래핀 제조용 조성물 및 이를 이용한 그래핀의 제조 방법 |
| US11193059B2 (en) | 2016-12-13 | 2021-12-07 | Current Lighting Solutions, Llc | Processes for preparing color stable red-emitting phosphor particles having small particle size |
| CN116590020A (zh) * | 2021-05-20 | 2023-08-15 | 斯泰拉化工公司 | 微细加工处理剂、和微细加工处理方法 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0419845A3 (en) | 1989-09-05 | 1991-11-13 | General Electric Company | Method for preparing metallized polyimide composites |
| DE4333385C2 (de) | 1993-09-30 | 1997-01-30 | Friedrich A Spruegel | Flächendesinfektions- und Reinigungsmittel |
| US5340370A (en) * | 1993-11-03 | 1994-08-23 | Intel Corporation | Slurries for chemical mechanical polishing |
| US5652072A (en) * | 1995-09-21 | 1997-07-29 | Minnesota Mining And Manufacturing Company | Battery containing bis(perfluoroalkylsulfonyl)imide and cyclic perfluoroalkylene disulfonylimide salts |
| US6194317B1 (en) * | 1998-04-30 | 2001-02-27 | 3M Innovative Properties Company | Method of planarizing the upper surface of a semiconductor wafer |
| US6130161A (en) * | 1997-05-30 | 2000-10-10 | International Business Machines Corporation | Method of forming copper interconnections with enhanced electromigration resistance and reduced defect sensitivity |
| JPH1192754A (ja) | 1997-09-24 | 1999-04-06 | Cci Corp | ガラス用撥水処理剤 |
| AU7954898A (en) * | 1997-12-10 | 1999-06-28 | Minnesota Mining And Manufacturing Company | Bis(perfluoroalkylsulfonyl)imide surfactant salts in electrochemical systems |
| TWI223678B (en) * | 1998-03-20 | 2004-11-11 | Semitool Inc | Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper |
| US6197696B1 (en) * | 1998-03-26 | 2001-03-06 | Matsushita Electric Industrial Co., Ltd. | Method for forming interconnection structure |
| US6287977B1 (en) * | 1998-07-31 | 2001-09-11 | Applied Materials, Inc. | Method and apparatus for forming improved metal interconnects |
| US6284656B1 (en) * | 1998-08-04 | 2001-09-04 | Micron Technology, Inc. | Copper metallurgy in integrated circuits |
| US6245663B1 (en) * | 1998-09-30 | 2001-06-12 | Conexant Systems, Inc. | IC interconnect structures and methods for making same |
| US6291887B1 (en) * | 1999-01-04 | 2001-09-18 | Advanced Micro Devices, Inc. | Dual damascene arrangements for metal interconnection with low k dielectric constant materials and nitride middle etch stop layer |
| IL128920A0 (en) * | 1999-03-10 | 2000-02-17 | Nova Measuring Instr Ltd | Method for monitoring metal cmp |
| US6290578B1 (en) * | 1999-10-13 | 2001-09-18 | Speedfam-Ipec Corporation | Method for chemical mechanical polishing using synergistic geometric patterns |
| US6369242B2 (en) | 2000-03-17 | 2002-04-09 | Roche Vitamins Inc. | Tocopherol manufacture by tris(perfluorohydrocarbylsulphonyl) methane or metal methides thereof |
| US6358899B1 (en) | 2000-03-23 | 2002-03-19 | Ashland, Inc. | Cleaning compositions and use thereof containing ammonium hydroxide and fluorosurfactant |
| US6310018B1 (en) | 2000-03-31 | 2001-10-30 | 3M Innovative Properties Company | Fluorinated solvent compositions containing hydrogen fluoride |
| US6372700B1 (en) | 2000-03-31 | 2002-04-16 | 3M Innovative Properties Company | Fluorinated solvent compositions containing ozone |
| TW486801B (en) * | 2000-04-07 | 2002-05-11 | Taiwan Semiconductor Mfg | Method of fabricating dual damascene structure |
| US6291082B1 (en) * | 2000-06-13 | 2001-09-18 | Advanced Micro Devices, Inc. | Method of electroless ag layer formation for cu interconnects |
| AU2002239767A1 (en) | 2000-11-15 | 2002-06-11 | Intel Corporation | Copper alloy interconnections for integrated circuits and methods of making same |
| US6555510B2 (en) | 2001-05-10 | 2003-04-29 | 3M Innovative Properties Company | Bis(perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods therefor |
-
2002
- 2002-12-16 US US10/319,954 patent/US6884338B2/en not_active Expired - Fee Related
-
2003
- 2003-10-28 EP EP03777947A patent/EP1572821A1/en not_active Withdrawn
- 2003-10-28 JP JP2004564827A patent/JP4181129B2/ja not_active Expired - Fee Related
- 2003-10-28 KR KR1020057010917A patent/KR20050085661A/ko not_active Ceased
- 2003-10-28 CN CNB2003801059248A patent/CN100448941C/zh not_active Expired - Fee Related
- 2003-10-28 AU AU2003286734A patent/AU2003286734A1/en not_active Abandoned
- 2003-10-28 WO PCT/US2003/034259 patent/WO2004061028A1/en not_active Ceased
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