JPWO2020121248A5 - - Google Patents
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- Publication number
- JPWO2020121248A5 JPWO2020121248A5 JP2021533423A JP2021533423A JPWO2020121248A5 JP WO2020121248 A5 JPWO2020121248 A5 JP WO2020121248A5 JP 2021533423 A JP2021533423 A JP 2021533423A JP 2021533423 A JP2021533423 A JP 2021533423A JP WO2020121248 A5 JPWO2020121248 A5 JP WO2020121248A5
- Authority
- JP
- Japan
- Prior art keywords
- composition
- surfactant
- weight
- carbon atoms
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000203 mixture Substances 0.000 claims 14
- 239000004094 surface-active agent Substances 0.000 claims 5
- 125000004432 carbon atom Chemical group C* 0.000 claims 3
- 239000007800 oxidant agent Substances 0.000 claims 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 2
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 125000002947 alkylene group Chemical group 0.000 claims 2
- 239000003125 aqueous solvent Substances 0.000 claims 2
- 239000000356 contaminant Substances 0.000 claims 2
- 229910017604 nitric acid Inorganic materials 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 150000007513 acids Chemical class 0.000 claims 1
- 125000002015 acyclic group Chemical group 0.000 claims 1
- 239000000654 additive Substances 0.000 claims 1
- 125000003545 alkoxy group Chemical group 0.000 claims 1
- 125000003118 aryl group Chemical group 0.000 claims 1
- 125000000732 arylene group Chemical group 0.000 claims 1
- 239000002738 chelating agent Substances 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- 239000003112 inhibitor Substances 0.000 claims 1
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(III) nitrate Inorganic materials [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862778565P | 2018-12-12 | 2018-12-12 | |
| US62/778,565 | 2018-12-12 | ||
| PCT/IB2019/060716 WO2020121248A1 (en) | 2018-12-12 | 2019-12-12 | Fluorinated amine oxide surfactants |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022514222A JP2022514222A (ja) | 2022-02-10 |
| JPWO2020121248A5 true JPWO2020121248A5 (https=) | 2022-12-21 |
| JP2022514222A5 JP2022514222A5 (https=) | 2022-12-21 |
| JP7507155B2 JP7507155B2 (ja) | 2024-06-27 |
Family
ID=69158147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021533423A Active JP7507155B2 (ja) | 2018-12-12 | 2019-12-12 | フッ素化アミンオキシド界面活性剤 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20220040655A1 (https=) |
| JP (1) | JP7507155B2 (https=) |
| CN (1) | CN113166634A (https=) |
| TW (1) | TW202035361A (https=) |
| WO (1) | WO2020121248A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114350366B (zh) * | 2021-12-09 | 2023-04-18 | 湖北兴福电子材料股份有限公司 | 一种氮化硅与p型多晶硅等速蚀刻液 |
| TWI895691B (zh) * | 2023-02-14 | 2025-09-01 | 關東鑫林科技股份有限公司 | 蝕刻液組成物及使用其之蝕刻方法 |
| CN118496473A (zh) * | 2024-05-22 | 2024-08-16 | 智仑新材料科技（西安）有限公司 | 一种低氯环氧树脂的制备方法及一种除氯剂的制备方法 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2759019A (en) * | 1954-08-09 | 1956-08-14 | Minnesota Mining & Mfg | Perfluoro amine compounds and quaternary derivatives |
| GB1302612A (https=) * | 1969-02-19 | 1973-01-10 | ||
| US3772195A (en) * | 1969-06-12 | 1973-11-13 | Minnesota Mining & Mfg | Fire extinguishing composition comprising a fluoroaliphatic surfactant fluorine-free surfactant |
| EP0621057B1 (fr) * | 1993-04-23 | 1996-11-13 | Elf Atochem S.A. | Emulseurs pour extincteurs d'incendie portatifs |
| AU2830997A (en) * | 1996-06-06 | 1998-01-05 | Minnesota Mining And Manufacturing Company | Fire-fighting agents containing adsorbable fluorocarbon surfactants |
| WO1999029373A1 (en) * | 1997-12-10 | 1999-06-17 | Minnesota Mining And Manufacturing Company | Fire-fighting agents containing adsorbable fluorocarbon surfactants |
| US6890452B2 (en) * | 2002-11-08 | 2005-05-10 | 3M Innovative Properties Company | Fluorinated surfactants for aqueous acid etch solutions |
| US7169323B2 (en) * | 2002-11-08 | 2007-01-30 | 3M Innovative Properties Company | Fluorinated surfactants for buffered acid etch solutions |
| US7294610B2 (en) * | 2004-03-03 | 2007-11-13 | 3M Innovative Properties Company | Fluorinated sulfonamide surfactants for aqueous cleaning solutions |
| US7160850B2 (en) * | 2004-12-30 | 2007-01-09 | 3M Innovative Properties Company | Compositions of monomeric surfactants |
| GB0523853D0 (en) * | 2005-11-24 | 2006-01-04 | 3M Innovative Properties Co | Fluorinated surfactants for use in making a fluoropolymer |
| US7547732B2 (en) | 2005-08-30 | 2009-06-16 | 3M Innovative Properties Company | Compositions of fluorochemical surfactants |
| JP2007088258A (ja) * | 2005-09-22 | 2007-04-05 | Fujifilm Corp | 金属研磨液及びそれを用いる研磨方法 |
| JP2007106958A (ja) | 2005-10-17 | 2007-04-26 | Asahi Glass Co Ltd | フッ素系界面活性剤 |
| US7425374B2 (en) * | 2005-12-22 | 2008-09-16 | 3M Innovative Properties Company | Fluorinated surfactants |
| JP2010506978A (ja) * | 2006-10-12 | 2010-03-04 | スリーエム イノベイティブ プロパティズ カンパニー | フッ素化界面活性剤及びその製造方法 |
| US8591764B2 (en) * | 2006-12-20 | 2013-11-26 | 3M Innovative Properties Company | Chemical mechanical planarization composition, system, and method of use |
| KR20100017848A (ko) * | 2007-05-23 | 2010-02-16 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플루오르화 계면활성제의 수성 조성물 및 그의 사용 방법 |
| JP5741589B2 (ja) * | 2010-09-08 | 2015-07-01 | 三菱瓦斯化学株式会社 | 微細構造体のパターン倒壊抑制用処理液及びこれを用いた微細構造体の製造方法 |
| JP5767796B2 (ja) * | 2010-09-28 | 2015-08-19 | 林純薬工業株式会社 | エッチング液組成物およびエッチング方法 |
| JP6444316B2 (ja) * | 2013-01-29 | 2018-12-26 | スリーエム イノベイティブ プロパティズ カンパニー | 界面活性剤並びにその製造及び使用方法 |
| WO2017100045A1 (en) | 2015-12-11 | 2017-06-15 | 3M Innovative Properties Company | Fluorinated piperazine sulfonamides |
| US10451974B2 (en) | 2016-06-20 | 2019-10-22 | Az Electronic Materials (Luxembourg) S.A.R.L. | Rinse composition, a method for forming resist patterns and a method for making semiconductor devices |
| KR20190039789A (ko) * | 2016-10-04 | 2019-04-15 | 디아이씨 가부시끼가이샤 | 소화약제 |
| US10822458B2 (en) * | 2017-02-08 | 2020-11-03 | Versum Materials Us, Llc | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films |
| JP7165017B2 (ja) | 2018-10-03 | 2022-11-02 | 三菱マテリアル電子化成株式会社 | ペルフルオロエーテル含有化合物及びノニオン系含フッ素界面活性剤 |
-
2019
- 2019-12-11 TW TW108145329A patent/TW202035361A/zh unknown
- 2019-12-12 US US17/297,907 patent/US20220040655A1/en not_active Abandoned
- 2019-12-12 WO PCT/IB2019/060716 patent/WO2020121248A1/en not_active Ceased
- 2019-12-12 CN CN201980080746.9A patent/CN113166634A/zh active Pending
- 2019-12-12 JP JP2021533423A patent/JP7507155B2/ja active Active
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