JPWO2020121248A5 - - Google Patents
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- JPWO2020121248A5 JPWO2020121248A5 JP2021533423A JP2021533423A JPWO2020121248A5 JP WO2020121248 A5 JPWO2020121248 A5 JP WO2020121248A5 JP 2021533423 A JP2021533423 A JP 2021533423A JP 2021533423 A JP2021533423 A JP 2021533423A JP WO2020121248 A5 JPWO2020121248 A5 JP WO2020121248A5
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- JP
- Japan
- Prior art keywords
- composition
- surfactant
- weight
- carbon atoms
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000203 mixture Substances 0.000 claims 14
- 239000004094 surface-active agent Substances 0.000 claims 5
- 125000004432 carbon atoms Chemical group C* 0.000 claims 3
- 239000007800 oxidant agent Substances 0.000 claims 3
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 125000002947 alkylene group Chemical group 0.000 claims 2
- 239000003125 aqueous solvent Substances 0.000 claims 2
- 239000000356 contaminant Substances 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 2
- 238000005296 abrasive Methods 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 150000007513 acids Chemical class 0.000 claims 1
- 125000002015 acyclic group Chemical group 0.000 claims 1
- 239000000654 additive Substances 0.000 claims 1
- 125000003545 alkoxy group Chemical group 0.000 claims 1
- 125000003118 aryl group Chemical group 0.000 claims 1
- 125000000732 arylene group Chemical group 0.000 claims 1
- 239000002738 chelating agent Substances 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 1
- 239000003112 inhibitor Substances 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 claims 1
- SZQUEWJRBJDHSM-UHFFFAOYSA-N iron(3+);trinitrate;nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.[Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O SZQUEWJRBJDHSM-UHFFFAOYSA-N 0.000 claims 1
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(III) nitrate Inorganic materials [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 230000001590 oxidative Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
Claims (10)
- Rfが、3個~5個の炭素原子を有する、請求項1に記載の組成物。
- 前記界面活性剤が、前記組成物の少なくとも0.001重量%の濃度で存在する、請求項1に記載の組成物。
- 前記界面活性剤が、最大で前記組成物の1重量%の濃度で存在する、請求項1に記載の組成物。
- 500ppb未満のイオン性汚染物質を有する、請求項1~4のいずれか一項に記載の組成物。
- 前記任意の溶媒が、水溶性有機溶媒である、請求項1~5のいずれか一項に記載の組成物。
- 1重量%未満の有機溶媒を含む、請求項1~6のいずれか一項に記載の組成物。
- 前記組成物が、iii)研磨粒子、他の酸、酸化剤、エッチング剤、腐食防止剤、キレート剤、電解質、界面活性剤、光沢剤、及びレベラーからなる群から選択される1つ以上の添加剤を更に含む、請求項1に記載の組成物。
- a)少なくとも0.001重量%の請求項1に記載の界面活性剤と、b)任意の水性溶媒と、c)酸化剤と、を含む、組成物。
- 前記酸化剤が、硝酸、HNO3、H2O2、Fe(NO3)3、O3、及びこれらの混合物からなる群から選択される、請求項9に記載の組成物。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862778565P | 2018-12-12 | 2018-12-12 | |
US62/778,565 | 2018-12-12 | ||
PCT/IB2019/060716 WO2020121248A1 (en) | 2018-12-12 | 2019-12-12 | Fluorinated amine oxide surfactants |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2022514222A JP2022514222A (ja) | 2022-02-10 |
JPWO2020121248A5 true JPWO2020121248A5 (ja) | 2022-12-21 |
JP7507155B2 JP7507155B2 (ja) | 2024-06-27 |
Family
ID=69158147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021533423A Active JP7507155B2 (ja) | 2018-12-12 | 2019-12-12 | フッ素化アミンオキシド界面活性剤 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220040655A1 (ja) |
JP (1) | JP7507155B2 (ja) |
CN (1) | CN113166634A (ja) |
TW (1) | TW202035361A (ja) |
WO (1) | WO2020121248A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114350366B (zh) * | 2021-12-09 | 2023-04-18 | 湖北兴福电子材料股份有限公司 | 一种氮化硅与p型多晶硅等速蚀刻液 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2759019A (en) * | 1954-08-09 | 1956-08-14 | Minnesota Mining & Mfg | Perfluoro amine compounds and quaternary derivatives |
DE2008531B2 (de) * | 1969-02-19 | 1981-07-23 | Minnesota Mining and Manufacturing Co., 55133 Saint Paul, Minn. | Distal-perfluoraliphatische tertiäre Aminoxide |
US3772195A (en) * | 1969-06-12 | 1973-11-13 | Minnesota Mining & Mfg | Fire extinguishing composition comprising a fluoroaliphatic surfactant fluorine-free surfactant |
DE69400885T2 (de) * | 1993-04-23 | 1997-05-15 | Atochem Elf Sa | Emulgatoren für tragbare Feuerlöscher |
WO1997046283A1 (en) * | 1996-06-06 | 1997-12-11 | Minnesota Mining And Manufacturing Company | Fire-fighting agents containing adsorbable fluorocarbon surfactants |
KR20010032921A (ko) * | 1997-12-10 | 2001-04-25 | 스프레이그 로버트 월터 | 흡착성 플루오로카본 계면활성제를 포함하는 소화제 |
US7169323B2 (en) * | 2002-11-08 | 2007-01-30 | 3M Innovative Properties Company | Fluorinated surfactants for buffered acid etch solutions |
US6890452B2 (en) | 2002-11-08 | 2005-05-10 | 3M Innovative Properties Company | Fluorinated surfactants for aqueous acid etch solutions |
US7294610B2 (en) * | 2004-03-03 | 2007-11-13 | 3M Innovative Properties Company | Fluorinated sulfonamide surfactants for aqueous cleaning solutions |
US7160850B2 (en) * | 2004-12-30 | 2007-01-09 | 3M Innovative Properties Company | Compositions of monomeric surfactants |
GB0523853D0 (en) * | 2005-11-24 | 2006-01-04 | 3M Innovative Properties Co | Fluorinated surfactants for use in making a fluoropolymer |
US7547732B2 (en) | 2005-08-30 | 2009-06-16 | 3M Innovative Properties Company | Compositions of fluorochemical surfactants |
JP2007088258A (ja) * | 2005-09-22 | 2007-04-05 | Fujifilm Corp | 金属研磨液及びそれを用いる研磨方法 |
JP2007106958A (ja) | 2005-10-17 | 2007-04-26 | Asahi Glass Co Ltd | フッ素系界面活性剤 |
US7425374B2 (en) * | 2005-12-22 | 2008-09-16 | 3M Innovative Properties Company | Fluorinated surfactants |
US20100041819A1 (en) * | 2006-10-12 | 2010-02-18 | Moore George G I | Fluorinated surfactants and method of making the same |
US8591764B2 (en) * | 2006-12-20 | 2013-11-26 | 3M Innovative Properties Company | Chemical mechanical planarization composition, system, and method of use |
EP2155830A1 (en) * | 2007-05-23 | 2010-02-24 | 3M Innovative Properties Company | Aqueous compositions of fluorinated surfactants and methods of using the same |
JP5741589B2 (ja) * | 2010-09-08 | 2015-07-01 | 三菱瓦斯化学株式会社 | 微細構造体のパターン倒壊抑制用処理液及びこれを用いた微細構造体の製造方法 |
JP5767796B2 (ja) * | 2010-09-28 | 2015-08-19 | 林純薬工業株式会社 | エッチング液組成物およびエッチング方法 |
CN104955854B (zh) * | 2013-01-29 | 2017-09-05 | 3M创新有限公司 | 表面活性剂及其制备和使用方法 |
WO2017100045A1 (en) | 2015-12-11 | 2017-06-15 | 3M Innovative Properties Company | Fluorinated piperazine sulfonamides |
SG11201810519XA (en) * | 2016-06-20 | 2019-01-30 | Az Electronic Mat Luxembourg Sarl | A rinse composition, a method for forming resist patterns and a method for making semiconductor devices |
CN109789324A (zh) * | 2016-10-04 | 2019-05-21 | Dic株式会社 | 灭火剂 |
US10822458B2 (en) * | 2017-02-08 | 2020-11-03 | Versum Materials Us, Llc | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films |
JP7165017B2 (ja) | 2018-10-03 | 2022-11-02 | 三菱マテリアル電子化成株式会社 | ペルフルオロエーテル含有化合物及びノニオン系含フッ素界面活性剤 |
-
2019
- 2019-12-11 TW TW108145329A patent/TW202035361A/zh unknown
- 2019-12-12 US US17/297,907 patent/US20220040655A1/en not_active Abandoned
- 2019-12-12 JP JP2021533423A patent/JP7507155B2/ja active Active
- 2019-12-12 WO PCT/IB2019/060716 patent/WO2020121248A1/en active Application Filing
- 2019-12-12 CN CN201980080746.9A patent/CN113166634A/zh active Pending
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