JP2022514222A5 - - Google Patents

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Publication number
JP2022514222A5
JP2022514222A5 JP2021533423A JP2021533423A JP2022514222A5 JP 2022514222 A5 JP2022514222 A5 JP 2022514222A5 JP 2021533423 A JP2021533423 A JP 2021533423A JP 2021533423 A JP2021533423 A JP 2021533423A JP 2022514222 A5 JP2022514222 A5 JP 2022514222A5
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Japan
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composition
composition according
surfactant
weight
less
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JP2021533423A
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English (en)
Japanese (ja)
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JP7507155B2 (ja
JP2022514222A (ja
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Priority claimed from PCT/IB2019/060716 external-priority patent/WO2020121248A1/en
Publication of JP2022514222A publication Critical patent/JP2022514222A/ja
Publication of JP2022514222A5 publication Critical patent/JP2022514222A5/ja
Application granted granted Critical
Publication of JP7507155B2 publication Critical patent/JP7507155B2/ja
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JP2021533423A 2018-12-12 2019-12-12 フッ素化アミンオキシド界面活性剤 Active JP7507155B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862778565P 2018-12-12 2018-12-12
US62/778,565 2018-12-12
PCT/IB2019/060716 WO2020121248A1 (en) 2018-12-12 2019-12-12 Fluorinated amine oxide surfactants

Publications (3)

Publication Number Publication Date
JP2022514222A JP2022514222A (ja) 2022-02-10
JP2022514222A5 true JP2022514222A5 (https=) 2022-12-21
JP7507155B2 JP7507155B2 (ja) 2024-06-27

Family

ID=69158147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021533423A Active JP7507155B2 (ja) 2018-12-12 2019-12-12 フッ素化アミンオキシド界面活性剤

Country Status (5)

Country Link
US (1) US20220040655A1 (https=)
JP (1) JP7507155B2 (https=)
CN (1) CN113166634A (https=)
TW (1) TW202035361A (https=)
WO (1) WO2020121248A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
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CN114350366B (zh) * 2021-12-09 2023-04-18 湖北兴福电子材料股份有限公司 一种氮化硅与p型多晶硅等速蚀刻液
TWI895691B (zh) * 2023-02-14 2025-09-01 關東鑫林科技股份有限公司 蝕刻液組成物及使用其之蝕刻方法
CN118496473A (zh) * 2024-05-22 2024-08-16 智仑新材料科技（西安）有限公司 一种低氯环氧树脂的制备方法及一种除氯剂的制备方法

Family Cites Families (26)

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US3772195A (en) * 1969-06-12 1973-11-13 Minnesota Mining & Mfg Fire extinguishing composition comprising a fluoroaliphatic surfactant fluorine-free surfactant
DK0621057T3 (da) * 1993-04-23 1997-04-28 Atochem Elf Sa Emulgatorer til bærbare brandslukkere
AU2830997A (en) * 1996-06-06 1998-01-05 Minnesota Mining And Manufacturing Company Fire-fighting agents containing adsorbable fluorocarbon surfactants
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US7160850B2 (en) * 2004-12-30 2007-01-09 3M Innovative Properties Company Compositions of monomeric surfactants
GB0523853D0 (en) * 2005-11-24 2006-01-04 3M Innovative Properties Co Fluorinated surfactants for use in making a fluoropolymer
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JP2007088258A (ja) * 2005-09-22 2007-04-05 Fujifilm Corp 金属研磨液及びそれを用いる研磨方法
JP2007106958A (ja) * 2005-10-17 2007-04-26 Asahi Glass Co Ltd フッ素系界面活性剤
US7425374B2 (en) * 2005-12-22 2008-09-16 3M Innovative Properties Company Fluorinated surfactants
JP2010506978A (ja) * 2006-10-12 2010-03-04 スリーエム イノベイティブ プロパティズ カンパニー フッ素化界面活性剤及びその製造方法
US8591764B2 (en) * 2006-12-20 2013-11-26 3M Innovative Properties Company Chemical mechanical planarization composition, system, and method of use
KR20100017848A (ko) * 2007-05-23 2010-02-16 쓰리엠 이노베이티브 프로퍼티즈 컴파니 플루오르화 계면활성제의 수성 조성물 및 그의 사용 방법
JP5741589B2 (ja) * 2010-09-08 2015-07-01 三菱瓦斯化学株式会社 微細構造体のパターン倒壊抑制用処理液及びこれを用いた微細構造体の製造方法
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TWI717526B (zh) * 2016-06-20 2021-02-01 盧森堡商Ａｚ電子材料盧森堡有限公司 清洗組成物、形成光阻圖案之方法及製造半導體裝置之方法
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JP7165017B2 (ja) * 2018-10-03 2022-11-02 三菱マテリアル電子化成株式会社 ペルフルオロエーテル含有化合物及びノニオン系含フッ素界面活性剤

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