JP2006339622A - 放物線導波路型の平行光レンズ及びこれを含む波長可変外部共振レーザダイオード - Google Patents
放物線導波路型の平行光レンズ及びこれを含む波長可変外部共振レーザダイオード Download PDFInfo
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Abstract
【解決手段】外部から光を入射される入力導波路と、該入力導波路から送信された入射光を平行光に補正するための放物線導波路を含み、前記入力導波路の終端と前記放物線導波路の入射端とは、前記放物線導波路の焦点に位置し、前記放物線導波路の入射端の幅は、前記放物線導波路の頂点から焦点までの距離のおよそ4倍である。
【選択図】図7
Description
[数式1]
Mλ=nd(sinα+sinβ)
(ここで、m:回折次数、n:媒体の屈折率、d:回折格子の周期、α:入射角、β:回折角)
[数式2]
Mλ=2ndsinα
(ここで、m:回折次数、n:媒体の屈折率、d: 回折格子の周期、α:入射角[=β:回折角])
本実施の形態は、本発明の波長可変外部共振レーザダイオードに用いられる、進歩した構造の放物線導波路型の平行光レンズに関する。
図9は、図7の外部共振レーザダイオードの欠点を改善するための本実施の形態の平行光レンズを示すものであり、入力受動導波路に線間幅が狭まるテーパーリングされる受動導波路414を追加する概念図である。入力受動導波路の幅が狭まると、放物線導波路型の平行光レンズ403に伝播される時の放射角が大きくなるため、相対的に放物線導波路型の平行光レンズ403に反射されない光の比率が相対的に減少し損失を減らすことができる。
本実施の形態は、電気または熱的変化による屈折率の変化を通して、ビームの方向を可変にさせることのできる光偏向器を備えた波長可変外部共振レーザダイオードに関する。前記光偏向器に入射される平行光を生成するために、前記第1実施の形態の平行光レンズまたは第2実施の形態の平行光レンズを用いることが好ましいが、従来の技術に係るバルク型の平行光レンズ(または導波路と異なる屈折率を有する所定の媒体で埋められた平面形凸レンズと)を用いることができる。このうち、下記では最も動作品質が優れた第2実施の形態の平行光レンズを含む可変外部共振レーザダイオードで具体化して記述する。
本実施の形態は、前記第3実施の形態の波長可変外部共振レーザダイオード構造を、無反射の薄膜(514a及び514b)を用いて利得媒質部分と波長可変部分とを分離して製作して集積する方法で製作できる波長可変外部共振レーザダイオードに関する。
102 平行光レンズ
103 回折格子
104a,104b 反射鏡
401 入力受動導波路
402 平行光レンズ
403 平行光
414 テーパーリングされた入力受動導波路
505a,505b 光偏向器
506 回折格子
510 位相制御部
531 RIEエッチングされた反射鏡
514a,514b 無反射の薄膜
551 劈開面(cleaved-facet)
Claims (15)
- 外部から光を入射される入力導波路と、
該入力導波路から送信された入射光を平行光に補正するための放物線導波路を含み、
前記入力導波路の終端と前記放物線導波路の入射端とは、前記放物線導波路の焦点に位置し、前記放物線導波路の入射端の幅は、前記放物線導波路の頂点から焦点までの距離のおよそ4倍であること
を特徴とする放物線導波路型の平行光レンズ。 - 前記入力導波路は、前記放物線導波路と接続する部分がその幅が次第に狭まり、前記放物線導波路と接する地点で最小幅となるテーパー(taper)形状であることを特徴とする請求項1に記載の放物線導波路型の平行光レンズ。
- 前記入力導波路及び前記放物線導波路が、半導体積層工程で製作されて一定の厚さを有する薄膜形状に製作されることを特徴とする請求項1または請求項2に記載の放物線導波路型の平行光レンズ。
- 発散する光を平行光に補正するための平行光レンズと、
前記平行光が進むスラブ導波路と、
外部の電気的信号によって前記スラブ導波路を進むビームの進行経路上の媒体の屈折率を変化させ、前記ビームの進行方向を変化させるための光偏向器と、
前記光偏向器を通過する平行ビームを回折させるための回折格子と
を含むことを特徴とする波長可変外部共振レーザダイオード。 - 前記回折格子から回折される光をフィードバックさせるための反射鏡をさらに含むことを特徴とする請求項4に記載の波長可変外部共振レーザダイオード。
- 前記光偏向器が、外部から電圧または電流を印加されて、前記受動導波路に電子を注入して屈折率を変化させるための、前記受動導波路の一面に形成されたp/n接合領域であることを特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。
- 前記スラブ導波路が、前記光偏向器の動作によって、前記入射光の進行方向に対して所定の角度に傾いた形状の屈折率の変化界面を1つ以上含むことを特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。
- 前記光偏向器が、三角形状で順方向と逆方向との対から構成されていることを特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。
- 前記平行光レンズが、
外部から光を入射される入力導波路と、
該入力導波路から送信された入射光を平行光に補正するための放物線導波路を含み、
前記入力導波路の終端と前記放物線導波路の入射端とは、前記放物線導波路の焦点に位置し、前記放物線導波路の入射端の幅は、前記放物線導波路の頂点から焦点までの距離のおよそ4倍であること
を特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。 - 前記入力導波路は、前記放物線導波路と接続する部分がその幅が次第に狭まり、前記放物線導波路と接する地点で最小幅となるテーパー形状であることを特徴とする請求項9に記載の波長可変外部共振レーザダイオード。
- 前記平行光レンズが、バルク状態に維持されるか、または導波路と異なる屈折率を有する媒体で埋められている凸レンズ形状を有することを特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。
- 前記回折格子に対する前記平行光レンズの出射面への投影面が、前記平行光レンズの出射面の大きさと実質的に同じであることを特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。
- 前記平行光レンズと前記スラブ導波路とは、一定間隔で相互に離隔されることを特徴とする請求項4または請求項5に記載の波長可変外部共振レーザダイオード。
- 前記平行光レンズと前記スラブ導波路とは光が通過する媒体が相互に異なるように、独立して製作されたことを特徴とする請求項13に記載の波長可変外部共振レーザダイオード。
- 前記平行光レンズの出射面と前記スラブ導波路との入射面のうち少なくとも いずれか一面にコーティングされた無反射膜を有することを特徴とする請求項4に記載の波長可変外部共振レーザダイオード。
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US20070133650A1 (en) | 2007-06-14 |
US7174068B2 (en) | 2007-02-06 |
EP1729382B1 (en) | 2011-04-06 |
TWI274923B (en) | 2007-03-01 |
CN1874093B (zh) | 2012-03-28 |
KR100701006B1 (ko) | 2007-03-29 |
CN1874093A (zh) | 2006-12-06 |
KR20060124310A (ko) | 2006-12-05 |
TW200641423A (en) | 2006-12-01 |
US7283706B2 (en) | 2007-10-16 |
ATE504965T1 (de) | 2011-04-15 |
US20060269190A1 (en) | 2006-11-30 |
EP1729382A1 (en) | 2006-12-06 |
DE602005027332D1 (de) | 2011-05-19 |
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