JP2006332303A - 半導体装置の製造方法及び半導体装置 - Google Patents
半導体装置の製造方法及び半導体装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 143
- 238000004519 manufacturing process Methods 0.000 title claims description 39
- 239000000758 substrate Substances 0.000 claims abstract description 219
- 238000005520 cutting process Methods 0.000 claims abstract description 58
- 239000011521 glass Substances 0.000 claims abstract description 55
- 239000013078 crystal Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 88
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 21
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 238000005530 etching Methods 0.000 claims description 19
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000005336 cracking Methods 0.000 abstract 2
- 230000005855 radiation Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 152
- 230000008569 process Effects 0.000 description 50
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 29
- 230000001681 protective effect Effects 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 20
- 239000004973 liquid crystal related substance Substances 0.000 description 18
- 239000011229 interlayer Substances 0.000 description 15
- 238000000206 photolithography Methods 0.000 description 14
- 229910021417 amorphous silicon Inorganic materials 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 9
- 239000012535 impurity Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 238000000137 annealing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000002425 crystallisation Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005499 laser crystallization Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000007715 excimer laser crystallization Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005224 laser annealing Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Abstract
【解決手段】 基板GLS上の半導体装置となる領域は基板切断位置CUTにより分離されている。各領域には、画素領域PXDと画素を駆動するゲート線駆動回路領域GCRおよび信号線駆動回路領域DCR、さらに接続端子が形成される端子領域ELDが設けられている。画素領域PXDとゲート線駆動回路領域GCRにはCWレーザを照射していない多結晶Si膜を用いたTFTが形成されている。信号線駆動回路領域DCRの一部には、CWレーザ光を照射した領域CWDが形成されており、横方向成長した結晶からなる多結晶Si膜を用いたTFTが形成されている。基板切断位置CUTには、CWレーザが照射されない領域UCWが設けられており、CWレーザ光を基板切断位置CUT付近を除き照射する。領域CWDの基板表面の引張り応力に比べ、基板切断位置CUT付近の基板表面の引張り応力は小となっており、基板切断によるクラックが抑制される。
【選択図】 図4
Description
S=E・b2/(6(1−ν)R)・・・・・(式1)
なお、E:基板ヤング率、b:基板厚さ、ν:基板ポアソン比 である。
Sxx=E b2/(1/Rx+ν/Ry)/(6(1―ν2))
Syy=E b2/(1/Ry+ν/Rx)/(6(1―ν2))
・・・・・(式2)
Claims (18)
- 歪点750℃以下のガラス基板の少なくとも一部にSiを主成分とする結晶が横方向成長された半導体膜が形成されており、前記ガラス基板の周辺の表面の引張り応力が、前記横方向成長された半導体膜の形成された領域の引張り応力より小であることを特徴とする半導体装置。
- 前記ガラス基板上に前記半導体膜を用いた回路が形成されており、前記回路の少なくとも一部に結晶を横方向成長させたSiを主成分とする半導体膜を含み、前記基板周辺の基板表面の引張り応力が、前記横方向成長させた半導体膜を含む領域の基板表面の引張り応力より小であることを特徴とする請求項1に記載の半導体装置。
- 歪点750℃以下のガラス基板の少なくとも一部にSiを主成分とする結晶が横方向成長された半導体膜が形成されており、画像を表示する画素が形成された領域と画素を駆動する回路を有し、前記回路の少なくとも一部に結晶を横方向成長させたSiを主成分とする半導体膜を含み、前記横方向成長させた半導体膜を含む領域の基板表面の引張り応力と、画素領域の基板表面の引張り応力との差が200N/m以下であることを特徴とする半導体装置。
- 前記回路の少なくとも一部に結晶を横方向成長させたSiを主成分とする半導体膜を含み、前記半導体膜の形成されている基板の周辺の表面の引張り応力が、前記横方向成長された半導体膜の形成された領域の引張り応力より小であることを特徴とする請求項3に記載の半導体装置。
- 前記半導体膜はガラス基板上に形成された下地絶縁膜上に形成されており、前記基板周辺の少なくとも一部において前記ガラス基板の表面付近が前記下地絶縁膜とともに除去されていることを特徴とする請求項1に記載の半導体装置。
- 前記横方向成長された半導体膜を含む領域の基板表面の引張り応力と、基板周辺の基板表面の引張り応力との差が200N/m以上である、前記請求項1または2または5に記載の半導体装置。
- 歪点750℃以下のガラス基板の少なくとも一部にSiを主成分とする結晶が横方向成長された半導体膜が形成されており、前記ガラス基板上に画像を表示する画素と、画素を駆動する回路が形成され、前記回路の少なくとも一部に結晶を横方向成長させたSiを主成分とする半導体膜を含み、前記横方向成長させた半導体膜を含む領域の基板表面の引張り応力と、前記画素領域の基板表面の引張り応力との差が200N/m以上であり、前記基板周辺の少なくとも一部において厚さ0.5μm以上のシリコン酸化膜またはシリコン窒化膜からなる絶縁膜が形成されていることを特徴とする半導体装置。
- 前記ガラス基板表面の引張り応力が、前記横方向成長された半導体膜の形成された領域において、前記横方向成長された半導体膜の成長方向に平行な方向よりも垂直な方向に大である、請求項1から7のいずれかに記載の半導体装置。
- 歪点750℃以下のガラス基板の上に形成されたSiを主成分とする半導体の少なくとも一部にCWまたは擬似CWレーザ光を照射してSi結晶を横方向成長させる工程を含む半導体装置の製造方法であって、
前記半導体装置の周辺部に設けた一部領域の半導体膜を除いて、前記CWまたは擬似CWレーザ光照射による横方向成長を行うことを特徴とする半導体装置の製造方法。 - 前記ガラス基板上に複数の半導体装置を形成した後前記複数の半導体装置を個々に分割する工程と、前記切断した各半導体装置の切断領域の周辺部に設けた一部領域の半導体膜を除いて、前記CWまたは擬似CWレーザ光による横方向成長を行う工程とを含むことを特徴とする請求項9に記載の半導体装置の製造方法。
- 歪点750℃以下のガラス基板の上に形成されたSiを主成分とする半導体の少なくとも一部にCWまたは擬似CWレーザ光を照射してSi結晶を横方向成長させる工程を含む半導体装置の製造方法であって、CWまたは擬似CWレーザ光照射による基板表面の引張り応力の増分が200N/m以下となるように制御することを特徴とする半導体装置の製造方法。
- 複数の半導体装置のCWまたは擬似CWレーザ光の照射領域を基板上にほぼ直線上に配置し、各半導体装置に切断して分割する工程を含む、前記請求項10に記載の半導体装置の製造方法。
- 複数の半導体装置のCWまたは擬似CWレーザ光の照射領域を基板上にほぼ直線上に配置し、各半導体装置に切断して分割する工程を含む、前記請求項11に記載の半導体装置の製造方法。
- 歪点750℃以下のガラス基板を用いた半導体装置を、基板上に下地絶縁膜を介して形成された、Siを主成分とする半導体膜にCWまたは擬似CWレーザ光を照射して結晶を横方向成長させる工程を含み製造する半導体装置の製造方法であって、
前記半導体装置の周辺の少なくとも一部において下地絶縁膜およびガラス基板の表面をエッチングする工程を含むことを特徴とする半導体装置の製造方法。 - 前記基板上に複数の半導体装置を形成した後分割する工程と、分割された各半導体装置の基板切断位置付近の少なくとも一部において前記下地絶縁膜および前記ガラス基板の表面をエッチングする工程を含むことを特徴とする請求項14に記載の半導体装置の製造方法。
- 前記ガラス基板のエッチング深さが0.01μm以上1μm以下であることを特徴とする請求項14に記載の半導体装置の製造方法。
- 前記ガラス基板のエッチング深さが0.01μm以上1μm以下であることを特徴とする請求項15に記載の半導体装置の製造方法。
- 歪点750℃以下のガラス基板を用いた半導体装置を、基板上に下地絶縁膜を介して形成された、Siを主成分とする半導体膜にCWまたは擬似CWレーザ光を照射して結晶を横方向成長させる工程を含み製造する半導体装置の製造方法であって、前記半導体装置の周辺の少なくとも一部において厚さ0.5μm以上のシリコン酸化膜またはシリコン窒化膜からなる絶縁膜を堆積する工程を含むことを特徴とする半導体装置の製造方法。
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