JP5899533B2 - 結晶性薄膜の形成方法及び薄膜トランジスタの製造方法 - Google Patents
結晶性薄膜の形成方法及び薄膜トランジスタの製造方法 Download PDFInfo
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Description
まず、本発明の実施の形態に係る結晶性薄膜の形成方法について、図1を用いて説明する。図1は、本発明の実施の形態に係る結晶性薄膜の形成方法における各工程を模式的に示す断面図及び平面図である。なお、図1において、(a2)〜(d2)は平面図であり、(a1)〜(d1)は、それぞれ(a2)〜(d2)のX−X線における断面図である。
次に、本発明の実施の形態に係る薄膜トランジスタの製造方法について説明する。本実施の形骸に係る薄膜トランジスタの製造方法では、上記の実施の形態に係る結晶性薄膜の形成方法を用いて薄膜トランジスタのチャネル層が形成される。
11 基板
12 アンダーコート層
13 ゲート電極
14 ゲート絶縁膜
15 非結晶のシリコン薄膜
16 結晶性シリコン薄膜
17 チャネル保護膜
18 コンタクト層
19 ソースドレイン金属膜
19S ソース電極
19D ドレイン電極
21 LDD領域
22 パッシベーション膜
30 レーザー光
40 走査方向
Claims (9)
- 基板を準備する第1工程と、
前記基板上に薄膜を形成する第2工程と、
前記薄膜に対して、所定の波長の光線を、前記基板に対して相対走査させつつ照射し、前記薄膜の少なくとも所定領域を結晶化する第3工程と、を含み、
前記基板が、第1方向と交差する端部と、前記第1方向と直交する第2方向と交差する端部とが、前記光線の光源が位置する側に反っている場合、前記第1方向と交差する前記端部の反り量と、前記第2方向と交差する前記端部の反り量とを比較し、前記第1方向及び前記第2方向のうち前記基板の端部における反り量が大きい方向を前記基板の最大残留応力の発生方向とし、
前記第3工程では、特定した前記最大残留応力の発生方向に前記光線を走査する、
結晶性薄膜の形成方法。 - 前記光線は、YAGレーザー光線、連続発振のレーザー光線及びランプ加熱用光線のいずれかである、
請求項1に記載の結晶性薄膜の形成方法。 - 前記第3工程では、前記光線を前記薄膜の全面に照射する、
請求項1または請求項2に記載の結晶性薄膜の形成方法。 - 前記基板は矩形であり、
前記最大残留応力の発生方向は、前記基板の長手方向である、
請求項1ないし請求項3のいずれか1項に記載の結晶性薄膜の形成方法。 - 前記基板は、当該基板の前駆体を熱加工により製造されたものである、
請求項1ないし請求項4のいずれか1項に記載の結晶性薄膜の形成方法。 - 前記基板は、当該基板の前駆体を引き伸ばして冷却することにより成形され、
前記最大残留応力の発生方向は、前記基板が引き伸ばされた方向である、
請求項5に記載の結晶性薄膜の形成方法。 - 前記基板はガラス基板である、
請求項1ないし請求項6のいずれか1項に記載の結晶性薄膜の形成方法。 - 前記基板はプラスチック基板である、
請求項1ないし請求項6のいずれか1項に記載の結晶性薄膜の形成方法。 - 請求項1ないし請求項8のいずれか1項に記載の結晶性薄膜の形成方法を用いて、ボトムゲート型の薄膜トランジスタのチャネル領域を形成する工程を含む、
薄膜トランジスタの製造方法。
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PCT/JP2011/006667 WO2013080252A1 (ja) | 2011-11-29 | 2011-11-29 | 結晶性薄膜の形成方法及び薄膜トランジスタの製造方法 |
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US (1) | US9218968B2 (ja) |
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JPH06172926A (ja) | 1992-12-09 | 1994-06-21 | Hitachi Metals Ltd | ガラス圧延用ロール |
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JPWO2013080252A1 (ja) | 2015-04-27 |
US9218968B2 (en) | 2015-12-22 |
US20140308804A1 (en) | 2014-10-16 |
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