JP2006250583A5 - - Google Patents
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- Publication number
- JP2006250583A5 JP2006250583A5 JP2005064517A JP2005064517A JP2006250583A5 JP 2006250583 A5 JP2006250583 A5 JP 2006250583A5 JP 2005064517 A JP2005064517 A JP 2005064517A JP 2005064517 A JP2005064517 A JP 2005064517A JP 2006250583 A5 JP2006250583 A5 JP 2006250583A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- vibration
- connection terminal
- support substrate
- gyro sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 5
- 238000003466 welding Methods 0.000 claims 3
- 230000005484 gravity Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005064517A JP2006250583A (ja) | 2005-03-08 | 2005-03-08 | 振動型ジャイロセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005064517A JP2006250583A (ja) | 2005-03-08 | 2005-03-08 | 振動型ジャイロセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006250583A JP2006250583A (ja) | 2006-09-21 |
| JP2006250583A5 true JP2006250583A5 (enExample) | 2008-04-24 |
Family
ID=37091266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005064517A Pending JP2006250583A (ja) | 2005-03-08 | 2005-03-08 | 振動型ジャイロセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006250583A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4640459B2 (ja) * | 2008-07-04 | 2011-03-02 | ソニー株式会社 | 角速度センサ |
| JP2010256054A (ja) * | 2009-04-22 | 2010-11-11 | Panasonic Corp | 角速度センサ素子 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3265792B2 (ja) * | 1993-01-29 | 2002-03-18 | 株式会社村田製作所 | 角速度センサ |
| JPH102741A (ja) * | 1996-06-17 | 1998-01-06 | Murata Mfg Co Ltd | 圧電振動子の製造方法 |
| JPH1019574A (ja) * | 1996-06-27 | 1998-01-23 | Nikon Corp | 圧電振動角速度計の製造方法 |
| JPH10339638A (ja) * | 1997-06-06 | 1998-12-22 | Murata Mfg Co Ltd | 角速度センサ |
| JP2000133814A (ja) * | 1998-10-22 | 2000-05-12 | Toyota Motor Corp | 半導体装置 |
| JP2002181550A (ja) * | 2000-10-02 | 2002-06-26 | Ngk Insulators Ltd | 角速度測定装置 |
| JP2003028649A (ja) * | 2001-05-11 | 2003-01-29 | Murata Mfg Co Ltd | センサ回路モジュールおよびそれを用いた電子装置 |
| JP2004138390A (ja) * | 2002-10-15 | 2004-05-13 | Ngk Insulators Ltd | 振動子の支持構造 |
| JP2006284551A (ja) * | 2005-02-23 | 2006-10-19 | Sony Corp | 振動型ジャイロセンサ |
| JP2006242590A (ja) * | 2005-02-28 | 2006-09-14 | Sony Corp | 振動型ジャイロセンサ |
| JP5135683B2 (ja) * | 2005-02-28 | 2013-02-06 | ソニー株式会社 | 振動型ジャイロセンサ及び振動素子の製造方法 |
| JP5037819B2 (ja) * | 2005-03-04 | 2012-10-03 | ソニー株式会社 | 電子機器 |
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2005
- 2005-03-08 JP JP2005064517A patent/JP2006250583A/ja active Pending