JP2006250583A - 振動型ジャイロセンサ - Google Patents

振動型ジャイロセンサ Download PDF

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Publication number
JP2006250583A
JP2006250583A JP2005064517A JP2005064517A JP2006250583A JP 2006250583 A JP2006250583 A JP 2006250583A JP 2005064517 A JP2005064517 A JP 2005064517A JP 2005064517 A JP2005064517 A JP 2005064517A JP 2006250583 A JP2006250583 A JP 2006250583A
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JP
Japan
Prior art keywords
vibration element
vibration
vibrator
gyro sensor
support substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005064517A
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English (en)
Japanese (ja)
Other versions
JP2006250583A5 (enExample
Inventor
Teruyuki Inaguma
輝往 稲熊
Junichi Honda
順一 本多
Kazuo Takahashi
和夫 高橋
Koji Suzuki
浩二 鈴木
Shin Sasaki
伸 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2005064517A priority Critical patent/JP2006250583A/ja
Publication of JP2006250583A publication Critical patent/JP2006250583A/ja
Publication of JP2006250583A5 publication Critical patent/JP2006250583A5/ja
Pending legal-status Critical Current

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JP2005064517A 2005-03-08 2005-03-08 振動型ジャイロセンサ Pending JP2006250583A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005064517A JP2006250583A (ja) 2005-03-08 2005-03-08 振動型ジャイロセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005064517A JP2006250583A (ja) 2005-03-08 2005-03-08 振動型ジャイロセンサ

Publications (2)

Publication Number Publication Date
JP2006250583A true JP2006250583A (ja) 2006-09-21
JP2006250583A5 JP2006250583A5 (enExample) 2008-04-24

Family

ID=37091266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005064517A Pending JP2006250583A (ja) 2005-03-08 2005-03-08 振動型ジャイロセンサ

Country Status (1)

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JP (1) JP2006250583A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010014575A (ja) * 2008-07-04 2010-01-21 Sony Corp 角速度センサ及びその製造方法
JP2010256054A (ja) * 2009-04-22 2010-11-11 Panasonic Corp 角速度センサ素子

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06281665A (ja) * 1993-01-29 1994-10-07 Murata Mfg Co Ltd 角速度センサ
JPH102741A (ja) * 1996-06-17 1998-01-06 Murata Mfg Co Ltd 圧電振動子の製造方法
JPH1019574A (ja) * 1996-06-27 1998-01-23 Nikon Corp 圧電振動角速度計の製造方法
JPH10339638A (ja) * 1997-06-06 1998-12-22 Murata Mfg Co Ltd 角速度センサ
JP2000133814A (ja) * 1998-10-22 2000-05-12 Toyota Motor Corp 半導体装置
JP2002181550A (ja) * 2000-10-02 2002-06-26 Ngk Insulators Ltd 角速度測定装置
JP2003028649A (ja) * 2001-05-11 2003-01-29 Murata Mfg Co Ltd センサ回路モジュールおよびそれを用いた電子装置
JP2004138390A (ja) * 2002-10-15 2004-05-13 Ngk Insulators Ltd 振動子の支持構造
JP2006242590A (ja) * 2005-02-28 2006-09-14 Sony Corp 振動型ジャイロセンサ
JP2006284551A (ja) * 2005-02-23 2006-10-19 Sony Corp 振動型ジャイロセンサ
JP2007024861A (ja) * 2005-02-28 2007-02-01 Sony Corp 振動型ジャイロセンサ及び振動素子の製造方法
JP2007040961A (ja) * 2005-03-04 2007-02-15 Sony Corp 振動型ジャイロセンサ

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06281665A (ja) * 1993-01-29 1994-10-07 Murata Mfg Co Ltd 角速度センサ
JPH102741A (ja) * 1996-06-17 1998-01-06 Murata Mfg Co Ltd 圧電振動子の製造方法
JPH1019574A (ja) * 1996-06-27 1998-01-23 Nikon Corp 圧電振動角速度計の製造方法
JPH10339638A (ja) * 1997-06-06 1998-12-22 Murata Mfg Co Ltd 角速度センサ
JP2000133814A (ja) * 1998-10-22 2000-05-12 Toyota Motor Corp 半導体装置
JP2002181550A (ja) * 2000-10-02 2002-06-26 Ngk Insulators Ltd 角速度測定装置
JP2003028649A (ja) * 2001-05-11 2003-01-29 Murata Mfg Co Ltd センサ回路モジュールおよびそれを用いた電子装置
JP2004138390A (ja) * 2002-10-15 2004-05-13 Ngk Insulators Ltd 振動子の支持構造
JP2006284551A (ja) * 2005-02-23 2006-10-19 Sony Corp 振動型ジャイロセンサ
JP2006242590A (ja) * 2005-02-28 2006-09-14 Sony Corp 振動型ジャイロセンサ
JP2007024861A (ja) * 2005-02-28 2007-02-01 Sony Corp 振動型ジャイロセンサ及び振動素子の製造方法
JP2007040961A (ja) * 2005-03-04 2007-02-15 Sony Corp 振動型ジャイロセンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010014575A (ja) * 2008-07-04 2010-01-21 Sony Corp 角速度センサ及びその製造方法
JP2010256054A (ja) * 2009-04-22 2010-11-11 Panasonic Corp 角速度センサ素子

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