JP2006220430A5 - - Google Patents

Download PDF

Info

Publication number
JP2006220430A5
JP2006220430A5 JP2005031570A JP2005031570A JP2006220430A5 JP 2006220430 A5 JP2006220430 A5 JP 2006220430A5 JP 2005031570 A JP2005031570 A JP 2005031570A JP 2005031570 A JP2005031570 A JP 2005031570A JP 2006220430 A5 JP2006220430 A5 JP 2006220430A5
Authority
JP
Japan
Prior art keywords
pressure
housing
joint
insulating member
stress
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005031570A
Other languages
English (en)
Japanese (ja)
Other versions
JP4768281B2 (ja
JP2006220430A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2005031570A external-priority patent/JP4768281B2/ja
Priority to JP2005031570A priority Critical patent/JP4768281B2/ja
Priority to US11/342,535 priority patent/US7343810B2/en
Priority to KR1020060009663A priority patent/KR101311315B1/ko
Priority to EP06101216A priority patent/EP1691182B1/en
Priority to CNB2006100043163A priority patent/CN100565152C/zh
Publication of JP2006220430A publication Critical patent/JP2006220430A/ja
Publication of JP2006220430A5 publication Critical patent/JP2006220430A5/ja
Publication of JP4768281B2 publication Critical patent/JP4768281B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005031570A 2005-02-08 2005-02-08 圧力センサ及びその製造方法 Expired - Fee Related JP4768281B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005031570A JP4768281B2 (ja) 2005-02-08 2005-02-08 圧力センサ及びその製造方法
US11/342,535 US7343810B2 (en) 2005-02-08 2006-01-31 Pressure sensor and manufacturing method therefor
KR1020060009663A KR101311315B1 (ko) 2005-02-08 2006-02-01 압력 센서 및 그 제조 방법
EP06101216A EP1691182B1 (en) 2005-02-08 2006-02-02 Pressure sensor and manufacturing method therefor
CNB2006100043163A CN100565152C (zh) 2005-02-08 2006-02-06 压力传感器及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005031570A JP4768281B2 (ja) 2005-02-08 2005-02-08 圧力センサ及びその製造方法

Publications (3)

Publication Number Publication Date
JP2006220430A JP2006220430A (ja) 2006-08-24
JP2006220430A5 true JP2006220430A5 (https=) 2008-03-27
JP4768281B2 JP4768281B2 (ja) 2011-09-07

Family

ID=36127529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005031570A Expired - Fee Related JP4768281B2 (ja) 2005-02-08 2005-02-08 圧力センサ及びその製造方法

Country Status (5)

Country Link
US (1) US7343810B2 (https=)
EP (1) EP1691182B1 (https=)
JP (1) JP4768281B2 (https=)
KR (1) KR101311315B1 (https=)
CN (1) CN100565152C (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007225360A (ja) * 2006-02-22 2007-09-06 Jtekt Corp 圧力センサ
US7703328B2 (en) * 2006-05-18 2010-04-27 Baker Hughes Incorporated Pressure sensor utilizing a low thermal expansion material
JP2008241489A (ja) * 2007-03-28 2008-10-09 Nidec Copal Electronics Corp 隔膜式圧力センサ
JP5092684B2 (ja) * 2007-10-23 2012-12-05 株式会社デンソー 圧力センサ
DE102008021091A1 (de) * 2008-04-28 2009-10-29 Epcos Ag Drucksensor
DE102008042982A1 (de) 2008-10-21 2010-04-22 Robert Bosch Gmbh Verfahren zur Herstellung von Hochdrucksensoren
JP5651670B2 (ja) * 2012-10-25 2015-01-14 株式会社鷺宮製作所 圧力検知ユニット
JP6352414B2 (ja) * 2014-06-17 2018-07-04 株式会社鷺宮製作所 センサユニット、および、それを備える圧力検出装置
DE102015117736A1 (de) * 2015-10-19 2017-04-20 Endress+Hauser Gmbh+Co. Kg Druckmesseinrichtung

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522815A (en) * 1978-08-04 1980-02-18 Hitachi Ltd Semiconductor pressure transducer
US4375044A (en) * 1981-03-23 1983-02-22 The United States Of America As Represented By The Secretary Of The Army Low thermal stress electrode
JPH0234912B2 (ja) * 1984-11-08 1990-08-07 Sumitomo Semento Kk Seramitsukusutokinzokutaitonosetsugohoho
JPS63310779A (ja) 1987-06-15 1988-12-19 Seiko Instr & Electronics Ltd 接合構造
JPH01182729A (ja) * 1988-01-16 1989-07-20 Ngk Insulators Ltd 圧力センサ
US4930353A (en) 1988-08-07 1990-06-05 Nippondenso Co., Ltd. Semiconductor pressure sensor
JPH0388782A (ja) 1989-08-31 1991-04-15 Eagle Ind Co Ltd Ｃｒ↓３Ｃ↓２セラミックス―金属の接合体及びその接合法
JPH0459668A (ja) * 1990-06-26 1992-02-26 Nippon Steel Corp セラミックスと金属の接合体
US5277942A (en) * 1990-10-12 1994-01-11 Sumitomo Electric Industries, Ltd. Insulating member and electric parts using the same
JP2595829B2 (ja) * 1991-04-22 1997-04-02 株式会社日立製作所 差圧センサ、及び複合機能形差圧センサ
JP3117273B2 (ja) * 1992-03-25 2000-12-11 株式会社東芝 圧力流体用測定器
JPH06116052A (ja) 1992-10-05 1994-04-26 Onoda Cement Co Ltd セラミックスと金属との接合方法
JPH06163211A (ja) * 1992-11-19 1994-06-10 Matsushita Electric Ind Co Ltd 電子部品
EP0661748A1 (en) * 1993-12-28 1995-07-05 Hitachi, Ltd. Semiconductor device
BR9608062A (pt) 1995-04-28 1999-11-30 Rosemount Inc Conjunto de montagem para um sensor de pressão em um transmissor de pressão, e, processo para ligar um suporte de um transmissor de pressão.
US6453747B1 (en) * 2000-01-12 2002-09-24 Peter A. Weise Hermetic pressure transducer
JP2001330529A (ja) * 2000-05-19 2001-11-30 Yokogawa Electric Corp 圧力センサ
JP2002270742A (ja) 2001-03-12 2002-09-20 Unisia Jecs Corp 半導体装置
JP2004037318A (ja) * 2002-07-04 2004-02-05 Toyoda Mach Works Ltd 圧力センサ
JP2004198147A (ja) * 2002-12-16 2004-07-15 Toyoda Mach Works Ltd 圧力センサ
JP2006078417A (ja) 2004-09-13 2006-03-23 Toyoda Mach Works Ltd 圧力センサ
JP4548066B2 (ja) * 2004-09-24 2010-09-22 株式会社デンソー 圧力センサ

Similar Documents

Publication Publication Date Title
JP2005265850A5 (https=)
JP2006528365A5 (https=)
CN102159928B (zh) 膜片结构和制造膜片结构的方法
JP4952428B2 (ja) センサ装置
JP2006220430A5 (https=)
JP2004506180A5 (https=)
JP2016540986A (ja) 圧力センサ
JP2012211892A (ja) 圧力センサ
CN205785644U (zh) Mems微压压力传感器
JP2008209411A (ja) 圧力センサー
EP1921432A4 (en) PROBE FOR MEASURING THE PRESSURE WITHIN A MOUTH VALVE, DEVICE FOR MEASURING THE PRESSURE WITHIN A MOUTHHOUSE, A TRAINING DEVICE FOR RECOVERING THE MOUTHPOINT POINT
JP2002372454A (ja) 燃焼過程を検出するための光学センサ及びその製造方法
US8904861B2 (en) Measuring device
WO2022142994A1 (zh) 传感器装置以及阀组件
US20060174703A1 (en) Micro-heater and sensor
JP6056562B2 (ja) 圧力センサおよびその製造方法
ATE344923T1 (de) Federelastisches messelement mit flachem, verschweissbarem verbindungselement
CN105992504B (zh) 散热装置制造方法
EP1691182A3 (en) Pressure sensor and manufacturing method therefor
JP2008241327A (ja) 圧力センサ
CN105067181A (zh) 一种气体压差传感器
JP2006284503A (ja) 連続鋳造用鋳型の熱電対取付構造
JP2005227001A5 (https=)
JP3365038B2 (ja) 圧力センサ
JP5542830B2 (ja) 高圧センサを製造する方法