JP2005227001A5 - - Google Patents

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Publication number
JP2005227001A5
JP2005227001A5 JP2004032996A JP2004032996A JP2005227001A5 JP 2005227001 A5 JP2005227001 A5 JP 2005227001A5 JP 2004032996 A JP2004032996 A JP 2004032996A JP 2004032996 A JP2004032996 A JP 2004032996A JP 2005227001 A5 JP2005227001 A5 JP 2005227001A5
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JP
Japan
Prior art keywords
thermal expansion
piezoelectric sensor
expansion coefficient
pressure sensor
outer casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004032996A
Other languages
English (en)
Japanese (ja)
Other versions
JP3993857B2 (ja
JP2005227001A (ja
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Priority to JP2004032996A priority Critical patent/JP3993857B2/ja
Priority claimed from JP2004032996A external-priority patent/JP3993857B2/ja
Publication of JP2005227001A publication Critical patent/JP2005227001A/ja
Publication of JP2005227001A5 publication Critical patent/JP2005227001A5/ja
Application granted granted Critical
Publication of JP3993857B2 publication Critical patent/JP3993857B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004032996A 2004-02-10 2004-02-10 圧力センサ Expired - Lifetime JP3993857B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004032996A JP3993857B2 (ja) 2004-02-10 2004-02-10 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004032996A JP3993857B2 (ja) 2004-02-10 2004-02-10 圧力センサ

Publications (3)

Publication Number Publication Date
JP2005227001A JP2005227001A (ja) 2005-08-25
JP2005227001A5 true JP2005227001A5 (https=) 2007-03-15
JP3993857B2 JP3993857B2 (ja) 2007-10-17

Family

ID=35001843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004032996A Expired - Lifetime JP3993857B2 (ja) 2004-02-10 2004-02-10 圧力センサ

Country Status (1)

Country Link
JP (1) JP3993857B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE466289T1 (de) * 2005-01-26 2010-05-15 Kistler Holding Ag Masseisolierter piezoelektrischer sensor zur messung von beschleunigung oder druck
DE102006008351A1 (de) 2006-02-21 2007-08-23 Robert Bosch Gmbh Druckmesseinrichtung
JP5161121B2 (ja) * 2008-03-28 2013-03-13 日本特殊陶業株式会社 グロープラグ
CN102288355B (zh) * 2011-07-16 2013-05-22 中北大学 高温压力传感器
JP5975793B2 (ja) * 2012-08-29 2016-08-23 シチズンファインデバイス株式会社 燃焼圧センサ
JP5978073B2 (ja) * 2012-08-31 2016-08-24 シチズンファインデバイス株式会社 燃焼圧センサ
JP5820759B2 (ja) * 2012-03-29 2015-11-24 シチズンファインデバイス株式会社 圧力検出装置の製造方法、圧力検出装置付き内燃機関の製造方法
CN119595153B (zh) * 2024-12-12 2025-05-20 浙江大学 一种适用于不同温度下的压电薄膜压力传感器

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