JP3993857B2 - 圧力センサ - Google Patents
圧力センサ Download PDFInfo
- Publication number
- JP3993857B2 JP3993857B2 JP2004032996A JP2004032996A JP3993857B2 JP 3993857 B2 JP3993857 B2 JP 3993857B2 JP 2004032996 A JP2004032996 A JP 2004032996A JP 2004032996 A JP2004032996 A JP 2004032996A JP 3993857 B2 JP3993857 B2 JP 3993857B2
- Authority
- JP
- Japan
- Prior art keywords
- thermal expansion
- piezoelectric sensor
- pressure
- sensor
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 9
- 230000036316 preload Effects 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 13
- 238000002485 combustion reaction Methods 0.000 description 10
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 239000010935 stainless steel Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 6
- 238000003466 welding Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910000154 gallium phosphate Inorganic materials 0.000 description 1
- LWFNJDOYCSNXDO-UHFFFAOYSA-K gallium;phosphate Chemical compound [Ga+3].[O-]P([O-])([O-])=O LWFNJDOYCSNXDO-UHFFFAOYSA-K 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004032996A JP3993857B2 (ja) | 2004-02-10 | 2004-02-10 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004032996A JP3993857B2 (ja) | 2004-02-10 | 2004-02-10 | 圧力センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005227001A JP2005227001A (ja) | 2005-08-25 |
| JP2005227001A5 JP2005227001A5 (https=) | 2007-03-15 |
| JP3993857B2 true JP3993857B2 (ja) | 2007-10-17 |
Family
ID=35001843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004032996A Expired - Lifetime JP3993857B2 (ja) | 2004-02-10 | 2004-02-10 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3993857B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013205307A (ja) * | 2012-03-29 | 2013-10-07 | Citizen Finetech Miyota Co Ltd | 圧力検出装置、圧力検出装置付き内燃機関 |
| JP2014048045A (ja) * | 2012-08-29 | 2014-03-17 | Citizen Finetech Miyota Co Ltd | 燃焼圧センサ |
| JP2014048181A (ja) * | 2012-08-31 | 2014-03-17 | Citizen Finetech Miyota Co Ltd | 燃焼圧センサ |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE466289T1 (de) * | 2005-01-26 | 2010-05-15 | Kistler Holding Ag | Masseisolierter piezoelektrischer sensor zur messung von beschleunigung oder druck |
| DE102006008351A1 (de) | 2006-02-21 | 2007-08-23 | Robert Bosch Gmbh | Druckmesseinrichtung |
| JP5161121B2 (ja) * | 2008-03-28 | 2013-03-13 | 日本特殊陶業株式会社 | グロープラグ |
| CN102288355B (zh) * | 2011-07-16 | 2013-05-22 | 中北大学 | 高温压力传感器 |
| CN119595153B (zh) * | 2024-12-12 | 2025-05-20 | 浙江大学 | 一种适用于不同温度下的压电薄膜压力传感器 |
-
2004
- 2004-02-10 JP JP2004032996A patent/JP3993857B2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013205307A (ja) * | 2012-03-29 | 2013-10-07 | Citizen Finetech Miyota Co Ltd | 圧力検出装置、圧力検出装置付き内燃機関 |
| JP2014048045A (ja) * | 2012-08-29 | 2014-03-17 | Citizen Finetech Miyota Co Ltd | 燃焼圧センサ |
| JP2014048181A (ja) * | 2012-08-31 | 2014-03-17 | Citizen Finetech Miyota Co Ltd | 燃焼圧センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005227001A (ja) | 2005-08-25 |
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