JP2006175569A5 - - Google Patents
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- Publication number
- JP2006175569A5 JP2006175569A5 JP2004372737A JP2004372737A JP2006175569A5 JP 2006175569 A5 JP2006175569 A5 JP 2006175569A5 JP 2004372737 A JP2004372737 A JP 2004372737A JP 2004372737 A JP2004372737 A JP 2004372737A JP 2006175569 A5 JP2006175569 A5 JP 2006175569A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- hard
- hard film
- coated
- atomic ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000002381 Plasma Anatomy 0.000 claims description 37
- 238000005520 cutting process Methods 0.000 claims description 31
- 238000001704 evaporation Methods 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 239000002994 raw material Substances 0.000 claims description 13
- 229910001315 Tool steel Inorganic materials 0.000 claims description 9
- 239000011195 cermet Substances 0.000 claims description 9
- 150000002739 metals Chemical class 0.000 claims description 8
- 238000007733 ion plating Methods 0.000 claims description 7
- 239000000155 melt Substances 0.000 claims description 7
- 229910052752 metalloid Inorganic materials 0.000 claims description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 4
- 239000007888 film coating Substances 0.000 claims description 3
- 238000009501 film coating Methods 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910010037 TiAlN Inorganic materials 0.000 description 8
- 238000002844 melting Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005755 formation reaction Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 description 2
- -1 argon-nitrogen Chemical compound 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000001050 lubricating Effects 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N tin hydride Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- 101710040910 CRAT Proteins 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910015800 MoS Inorganic materials 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N Molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910003301 NiO Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atoms Chemical class [H]* 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- TXKRDMUDKYVBLB-UHFFFAOYSA-N methane;titanium Chemical compound C.[Ti] TXKRDMUDKYVBLB-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- TWXTWZIUMCFMSG-UHFFFAOYSA-N nitride(3-) Chemical compound [N-3] TWXTWZIUMCFMSG-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004372737A JP4753281B2 (ja) | 2004-12-24 | 2004-12-24 | 硬質皮膜形成用ターゲット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004372737A JP4753281B2 (ja) | 2004-12-24 | 2004-12-24 | 硬質皮膜形成用ターゲット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006175569A JP2006175569A (ja) | 2006-07-06 |
| JP2006175569A5 true JP2006175569A5 (zh) | 2007-12-06 |
| JP4753281B2 JP4753281B2 (ja) | 2011-08-24 |
Family
ID=36730151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004372737A Expired - Fee Related JP4753281B2 (ja) | 2004-12-24 | 2004-12-24 | 硬質皮膜形成用ターゲット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4753281B2 (zh) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100453692C (zh) * | 2006-07-20 | 2009-01-21 | 浙江大学 | 铝材表面的类金刚石覆膜改性方法及其装置 |
| JP5070622B2 (ja) * | 2007-06-07 | 2012-11-14 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| JP5077743B2 (ja) * | 2007-07-24 | 2012-11-21 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
| JP2009039838A (ja) | 2007-08-10 | 2009-02-26 | Mitsubishi Materials Corp | 表面被覆切削工具 |
| DE102007000512B3 (de) * | 2007-10-16 | 2009-01-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung |
| JP5196122B2 (ja) * | 2007-11-21 | 2013-05-15 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
| JP5310314B2 (ja) * | 2009-06-30 | 2013-10-09 | 株式会社不二越 | 放射冷却能力に優れた硬質皮膜被覆切削工具 |
| US8932707B2 (en) * | 2009-11-12 | 2015-01-13 | Osg Corporation | Hard film and hard film coated tool |
| JP4753143B2 (ja) * | 2009-12-21 | 2011-08-24 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| JP4753144B2 (ja) * | 2009-12-21 | 2011-08-24 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| CN103286537B (zh) * | 2013-06-26 | 2016-03-30 | 洛阳理工学院 | 一种具有高抗磨性涂层刀具的制备方法 |
| CN112663060A (zh) * | 2020-11-30 | 2021-04-16 | 宁波革创新材料科技有限公司 | 复合刀具涂层及其制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05195209A (ja) * | 1991-11-08 | 1993-08-03 | Mitsubishi Electric Corp | 真空蒸着ターゲットおよびそのターゲットを用いた真空蒸着方法 |
| JP4311803B2 (ja) * | 1999-03-23 | 2009-08-12 | 住友電気工業株式会社 | 表面被覆成形型およびその製造方法 |
| JP4112834B2 (ja) * | 2000-12-28 | 2008-07-02 | 株式会社神戸製鋼所 | 切削工具用硬質皮膜を形成するためのターゲット |
-
2004
- 2004-12-24 JP JP2004372737A patent/JP4753281B2/ja not_active Expired - Fee Related
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