JP2006168147A5 - - Google Patents
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- Publication number
- JP2006168147A5 JP2006168147A5 JP2004362858A JP2004362858A JP2006168147A5 JP 2006168147 A5 JP2006168147 A5 JP 2006168147A5 JP 2004362858 A JP2004362858 A JP 2004362858A JP 2004362858 A JP2004362858 A JP 2004362858A JP 2006168147 A5 JP2006168147 A5 JP 2006168147A5
- Authority
- JP
- Japan
- Prior art keywords
- organic
- inorganic hybrid
- hybrid material
- alkoxide
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000463 material Substances 0.000 claims description 94
- 239000000758 substrate Substances 0.000 claims description 68
- 238000004519 manufacturing process Methods 0.000 claims description 53
- 150000004703 alkoxides Chemical class 0.000 claims description 41
- 239000010936 titanium Substances 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 16
- 239000000654 additive Substances 0.000 claims description 12
- 230000000996 additive Effects 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 11
- 229910052732 germanium Inorganic materials 0.000 claims description 11
- 229910044991 metal oxide Inorganic materials 0.000 claims description 10
- 150000004706 metal oxides Chemical class 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 7
- 238000002788 crimping Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 4
- 238000007493 shaping process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 25
- 230000000694 effects Effects 0.000 description 17
- 238000005530 etching Methods 0.000 description 11
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 3
- YBMRDBCBODYGJE-UHFFFAOYSA-N Germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N HF Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 210000002381 Plasma Anatomy 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N TiO Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N al2o3 Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000002238 attenuated Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 229910000447 germanium oxide Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001264 neutralization Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001929 titanium oxide Inorganic materials 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004362858A JP2006168147A (ja) | 2004-12-15 | 2004-12-15 | 有機無機ハイブリッド材料とナノインプリント技術を用いた微細構造体の製造方法および微細構造体 |
| TW094144262A TW200633845A (en) | 2004-12-15 | 2005-12-14 | Manufacturing method of fine structure using organic/inorganic hybrid material and nano-imprinting technique and fine structure |
| KR1020050123018A KR100955018B1 (ko) | 2004-12-15 | 2005-12-14 | 유기 무기 하이브리드 재료 및 나노임프린트 기술을 이용한미세 구조체의 제조 방법 및 이 방법으로부터 제조된 미세구조체 |
| CNB2005101305830A CN100557467C (zh) | 2004-12-15 | 2005-12-14 | 使用有机无机混合材料和纳米压印技术的微细结构体的制造方法以及微细结构体 |
| HK06113604.5A HK1091905A1 (en) | 2004-12-15 | 2006-12-12 | A manufacturing method of the microstructure body using a nanoimprint technology with a organic/inorganic hybrid material, and a microstructure body manufactured by this method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004362858A JP2006168147A (ja) | 2004-12-15 | 2004-12-15 | 有機無機ハイブリッド材料とナノインプリント技術を用いた微細構造体の製造方法および微細構造体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006168147A JP2006168147A (ja) | 2006-06-29 |
| JP2006168147A5 true JP2006168147A5 (ko) | 2008-01-31 |
Family
ID=36669397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004362858A Pending JP2006168147A (ja) | 2004-12-15 | 2004-12-15 | 有機無機ハイブリッド材料とナノインプリント技術を用いた微細構造体の製造方法および微細構造体 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2006168147A (ko) |
| KR (1) | KR100955018B1 (ko) |
| CN (1) | CN100557467C (ko) |
| HK (1) | HK1091905A1 (ko) |
| TW (1) | TW200633845A (ko) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8318253B2 (en) * | 2006-06-30 | 2012-11-27 | Asml Netherlands B.V. | Imprint lithography |
| JP5189772B2 (ja) * | 2007-02-09 | 2013-04-24 | 昭和電工株式会社 | 微細パターン転写材料 |
| JP5261817B2 (ja) * | 2008-08-30 | 2013-08-14 | 国立大学法人長岡技術科学大学 | 表面に微細凹凸パターンを有したセラミックス焼成体及びその製造方法 |
| JP2010069730A (ja) * | 2008-09-18 | 2010-04-02 | Osaka Univ | ナノインプリントリソグラフィー用の高耐久性レプリカモールドおよびその作製方法 |
| JP2010129507A (ja) * | 2008-12-01 | 2010-06-10 | Asahi Kasei Corp | 照明器具 |
| SG168513A1 (en) * | 2009-08-04 | 2011-02-28 | Agency Science Tech & Res | A method of reducing the dimension of an imprint structure on a substrate |
| KR100974288B1 (ko) * | 2010-01-13 | 2010-08-05 | 한국기계연구원 | 나노임프린트를 이용한 금속 산화박막 패턴 형성방법 및 이를 이용한 ｌｅｄ 소자의 제조방법 |
| KR101302350B1 (ko) * | 2012-02-10 | 2013-08-30 | 노바테크인더스트리 주식회사 | 광 추출용 투명기판의 제조방법 |
| KR20140031514A (ko) * | 2012-09-03 | 2014-03-13 | 포항공과대학교 산학협력단 | 굴절률 조절층을 포함하는 발광 다이오드 및 그 제조 방법 |
| CN104101923B (zh) * | 2014-07-08 | 2016-05-18 | 淮安信息职业技术学院 | 具有随机微米/纳米混合结构的光扩散片的制备方法 |
| CN105487151A (zh) * | 2016-01-22 | 2016-04-13 | 武汉理工大学 | 一种基于纳米压印的图形转移制备光栅的方法 |
| TWI610804B (zh) * | 2016-05-23 | 2018-01-11 | 國立成功大學 | 節能玻璃及其製造方法 |
| CN110546734B (zh) * | 2017-03-08 | 2024-04-02 | 佳能株式会社 | 固化物图案的制造方法和光学部件、电路板和石英模具复制品的制造方法以及用于压印预处理的涂覆材料及其固化物 |
| CN108339885B (zh) * | 2018-01-16 | 2019-06-11 | 杭州电子科技大学 | 拉刀后刀面微纳表面形貌单点增量压印方法及其装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3381945B2 (ja) * | 1992-10-05 | 2003-03-04 | 日本板硝子株式会社 | 基板上に微細な凹凸パターンを形成する方法 |
| KR100316731B1 (ko) * | 1999-03-31 | 2001-12-12 | 김충섭 | 광학 코팅용 혼성 조성물 및 그것을 함유한 광변색 박막용 조성물 |
| JP2001100026A (ja) * | 1999-09-30 | 2001-04-13 | Minolta Co Ltd | 液晶光学デバイス及び液晶偏光デバイス |
| JP4208447B2 (ja) * | 2001-09-26 | 2009-01-14 | 独立行政法人科学技術振興機構 | Ｓｏｇを用いた室温ナノ−インプリント−リソグラフィー |
| JP4090374B2 (ja) * | 2003-03-20 | 2008-05-28 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
| JP4639054B2 (ja) | 2004-04-02 | 2011-02-23 | 旭化成株式会社 | 透明ハイブリッドシート |
-
2004
- 2004-12-15 JP JP2004362858A patent/JP2006168147A/ja active Pending
-
2005
- 2005-12-14 KR KR1020050123018A patent/KR100955018B1/ko active IP Right Grant
- 2005-12-14 CN CNB2005101305830A patent/CN100557467C/zh not_active Expired - Fee Related
- 2005-12-14 TW TW094144262A patent/TW200633845A/zh unknown
-
2006
- 2006-12-12 HK HK06113604.5A patent/HK1091905A1/xx not_active IP Right Cessation
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