JP2006132982A - プローブ - Google Patents

プローブ Download PDF

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Publication number
JP2006132982A
JP2006132982A JP2004319661A JP2004319661A JP2006132982A JP 2006132982 A JP2006132982 A JP 2006132982A JP 2004319661 A JP2004319661 A JP 2004319661A JP 2004319661 A JP2004319661 A JP 2004319661A JP 2006132982 A JP2006132982 A JP 2006132982A
Authority
JP
Japan
Prior art keywords
probe
probe substrate
beam portion
protrusion
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004319661A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006132982A5 (enExample
Inventor
Masami Yakabe
正巳 八壁
Tomohisa Hoshino
智久 星野
Naoki Ikeuchi
直樹 池内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2004319661A priority Critical patent/JP2006132982A/ja
Priority to KR1020067018071A priority patent/KR20070029140A/ko
Priority to US11/664,807 priority patent/US20070257692A1/en
Priority to CNA2005800119289A priority patent/CN1942769A/zh
Priority to PCT/JP2005/020016 priority patent/WO2006049133A1/ja
Publication of JP2006132982A publication Critical patent/JP2006132982A/ja
Publication of JP2006132982A5 publication Critical patent/JP2006132982A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2004319661A 2004-11-02 2004-11-02 プローブ Pending JP2006132982A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004319661A JP2006132982A (ja) 2004-11-02 2004-11-02 プローブ
KR1020067018071A KR20070029140A (ko) 2004-11-02 2005-10-31 프로브
US11/664,807 US20070257692A1 (en) 2004-11-02 2005-10-31 Probe
CNA2005800119289A CN1942769A (zh) 2004-11-02 2005-10-31 探针
PCT/JP2005/020016 WO2006049133A1 (ja) 2004-11-02 2005-10-31 プローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004319661A JP2006132982A (ja) 2004-11-02 2004-11-02 プローブ

Publications (2)

Publication Number Publication Date
JP2006132982A true JP2006132982A (ja) 2006-05-25
JP2006132982A5 JP2006132982A5 (enExample) 2006-08-10

Family

ID=36319140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004319661A Pending JP2006132982A (ja) 2004-11-02 2004-11-02 プローブ

Country Status (5)

Country Link
US (1) US20070257692A1 (enExample)
JP (1) JP2006132982A (enExample)
KR (1) KR20070029140A (enExample)
CN (1) CN1942769A (enExample)
WO (1) WO2006049133A1 (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008268145A (ja) * 2007-04-25 2008-11-06 Micronics Japan Co Ltd プローブ組立体
JP2010539476A (ja) * 2007-09-13 2010-12-16 タッチダウン・テクノロジーズ・インコーポレーテッド 半導体装置テスト用分岐型プローブ
JP2011523040A (ja) * 2008-05-08 2011-08-04 コリア・インスティテュート・オブ・マシナリー・アンド・マテリアルズ 可変剛性構造を有する垂直型微細接触プローブ
JP2012215534A (ja) * 2011-03-29 2012-11-08 Micronics Japan Co Ltd プローブ装置
JP2015010980A (ja) * 2013-07-01 2015-01-19 三菱電機株式会社 プローブ装置
WO2015194385A1 (ja) * 2014-06-16 2015-12-23 オムロン株式会社 プローブピン
WO2018003507A1 (ja) * 2016-06-28 2018-01-04 株式会社日本マイクロニクス 電気的接続装置及び接触子
JP2019514001A (ja) * 2016-04-13 2019-05-30 ローゼンベルガー ホーフフレクベンツテクニック ゲーエムベーハー アンド カンパニー カーゲー コンタクトピン及びそれを有する試験台

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101044118B1 (ko) * 2010-11-25 2011-06-28 김재길 다층 캔틸레버를 갖는 프로브 카드
TW201231977A (en) * 2011-01-20 2012-08-01 Pleader Yamaichi Co Ltd Structure of high-frequency vertical spring plate probe card
TWI434044B (zh) * 2011-07-12 2014-04-11 Advanced Semiconductor Eng 探針卡及其製作方法
JP5968158B2 (ja) * 2012-08-10 2016-08-10 株式会社日本マイクロニクス コンタクトプローブ及びプローブカード
US9086433B2 (en) 2012-12-19 2015-07-21 International Business Machines Corporation Rigid probe with compliant characteristics
MY189415A (en) * 2018-02-27 2022-02-10 Jf Microtechnology Sdn Bhd Horizontal clamp electrical contact assembly
US11454650B2 (en) * 2018-07-18 2022-09-27 Nidec-Read Corporation Probe, inspection jig, inspection device, and method for manufacturing probe
JP7393873B2 (ja) * 2019-03-29 2023-12-07 株式会社日本マイクロニクス 電気的接触子及びプローブカード

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763548A (ja) * 1993-08-24 1995-03-10 Canon Inc カンチレバー型プローブ、及びそれを有する走査型トンネル顕微鏡並びに情報処理装置
JP2000055936A (ja) * 1998-08-12 2000-02-25 Tokyo Electron Ltd コンタクタ
JP3773396B2 (ja) * 2000-06-01 2006-05-10 住友電気工業株式会社 コンタクトプローブおよびその製造方法
JP2002340932A (ja) * 2001-05-14 2002-11-27 Micronics Japan Co Ltd 電気的接続装置

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008268145A (ja) * 2007-04-25 2008-11-06 Micronics Japan Co Ltd プローブ組立体
JP2010539476A (ja) * 2007-09-13 2010-12-16 タッチダウン・テクノロジーズ・インコーポレーテッド 半導体装置テスト用分岐型プローブ
KR101425701B1 (ko) * 2007-09-13 2014-08-04 어드밴티스트 아메리카, 인크. 반도체 장치를 테스트하기 위한 포크형 탐침
JP2011523040A (ja) * 2008-05-08 2011-08-04 コリア・インスティテュート・オブ・マシナリー・アンド・マテリアルズ 可変剛性構造を有する垂直型微細接触プローブ
US8723541B2 (en) 2008-05-08 2014-05-13 Korea Institute Of Machinery & Materials Vertical micro contact probe having variable stiffness structure
JP2012215534A (ja) * 2011-03-29 2012-11-08 Micronics Japan Co Ltd プローブ装置
JP2015010980A (ja) * 2013-07-01 2015-01-19 三菱電機株式会社 プローブ装置
KR101948401B1 (ko) 2014-06-16 2019-02-14 오므론 가부시키가이샤 프로브 핀
WO2015194385A1 (ja) * 2014-06-16 2015-12-23 オムロン株式会社 プローブピン
JP2019514001A (ja) * 2016-04-13 2019-05-30 ローゼンベルガー ホーフフレクベンツテクニック ゲーエムベーハー アンド カンパニー カーゲー コンタクトピン及びそれを有する試験台
KR20190011765A (ko) * 2016-06-28 2019-02-07 가부시키가이샤 니혼 마이크로닉스 전기적 접속장치 및 접촉자
JPWO2018003507A1 (ja) * 2016-06-28 2019-04-25 株式会社日本マイクロニクス 電気的接続装置及び接触子
WO2018003507A1 (ja) * 2016-06-28 2018-01-04 株式会社日本マイクロニクス 電気的接続装置及び接触子
US20190178911A1 (en) * 2016-06-28 2019-06-13 Kabushiki Kaisha Nihon Micronics Electrical connecting apparatus and contact
KR102111942B1 (ko) * 2016-06-28 2020-05-18 가부시키가이샤 니혼 마이크로닉스 전기적 접속장치 및 접촉자
US10908182B2 (en) 2016-06-28 2021-02-02 Kabushiki Kaisha Nihon Micronics Electrical connecting apparatus and contact

Also Published As

Publication number Publication date
KR20070029140A (ko) 2007-03-13
CN1942769A (zh) 2007-04-04
US20070257692A1 (en) 2007-11-08
WO2006049133A1 (ja) 2006-05-11

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