JP2006098375A - 検査ユニット - Google Patents
検査ユニット Download PDFInfo
- Publication number
- JP2006098375A JP2006098375A JP2004288230A JP2004288230A JP2006098375A JP 2006098375 A JP2006098375 A JP 2006098375A JP 2004288230 A JP2004288230 A JP 2004288230A JP 2004288230 A JP2004288230 A JP 2004288230A JP 2006098375 A JP2006098375 A JP 2006098375A
- Authority
- JP
- Japan
- Prior art keywords
- contact probe
- metal block
- hole
- outer diameter
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Connecting Device With Holders (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
【解決手段】 金属ブロック2の貫通孔21内に同軸構造の中心導体とし得る外径が小径の信号用コンタクトプローブ1SIGと、信号用コンタクトプローブ1SIGより外径が大径の電源用コンタクトプローブ1POWと、グランド接続用で、信号用コンタクトプローブ1SIGより外径が大径のグランド用コンタクトプローブ1GNDとが設けられ、さらに、金属ブロック2の少なくとも1面側に各コンタクトプローブのプランジャ11のみを突出させながら各コンタクトプローブを固定する固定手段3が設けられ、この貫通孔21と固定手段3の構造が、各コンタクトプローブに対して共通に形成されている。
【選択図】 図1
Description
2 金属ブロック
3 固定手段
11、12 プランジャ
13 金属パイプ
21 貫通孔
31 絶縁性基板
35 凹部
36 金属板
37 絶縁性スペーサ
Claims (6)
- 金属ブロックと、該金属ブロックの貫通孔内に設けられるRF信号伝達手段として同軸構造の中心導体とし得る小さい外径の信号用コンタクトプローブと、前記金属ブロックの貫通孔内に設けられ、非RF信号または電源の伝達手段としての前記信号用コンタクトプローブより大きい外径の電源用コンタクトプローブと、前記金属ブロックの貫通孔内に設けられるグランド接続用で、前記信号用コンタクトプローブより大きい外径のグランド用コンタクトプローブと、前記金属ブロックの少なくとも1面側に設けられ、前記各コンタクトプローブのプランジャのみを突出させながら該各コンタクトプローブを前記金属ブロックから抜け出ないように固定する固定手段とを有し、前記金属ブロックに設けられる貫通孔および前記固定手段が、前記各コンタクトプローブののいずれに対しても共通化されてなる検査ユニット。
- 前記各コンタクトプローブを貫通させるために前記金属ブロックに形成される貫通孔が同じ内径で形成され、かつ、前記固定手段が外径の大きいコンタクトプローブを固定する部分と外径の小さいコンタクトプローブを固定する部分とを有するように形成されてなる請求項1記載の検査ユニット。
- 前記固定手段が、前記金属ブロックの少なくとも一面側に設けられ、前記プランジャが貫通する貫通孔を有する絶縁性基板からなり、該絶縁性基板の前記金属ブロック側に該貫通孔と同心で前記外径の大きいコンタクトプローブを固定する第1の凹部と、該第1の凹部より前記金属ブロックから離れる側に前記貫通孔と同心で前記外径の小さいコンタクトプローブを固定する第2の凹部とが形成され、前記外径の小さい信号用プローブが前記外径の大きい電源用コンタクトプローブおよびグランド用コンタクトプローブより長く形成されてなる請求項1または2記載の検査ユニット。
- 前記固定手段が、前記金属ブロックの少なくとも一面側に設けられ、前記プランジャが貫通する貫通孔を有する金属板と、該金属板の前記金属ブロック側に該貫通孔と同心で形成される凹部内に設けられる絶縁性スペーサとからなり、該絶縁性スペーサは、外周が前記凹部に嵌合し、かつ、内部に前記貫通孔と同心で前記外径の大きいコンタクトプローブを固定する第1の凹部と、該第1の凹部より前記金属ブロックから離れる側に前記貫通孔と同心で前記外径の小さいコンタクトプローブを固定する第2の凹部とが形成され、前記外径の小さい信号用プローブが前記外径の大きい電源用コンタクトプローブおよびグランド用コンタクトプローブより長く形成されてなる請求項1または2記載の検査ユニット。
- 前記第1および第2の凹部が段差を有する凹部として形成されてなる請求項3または4記載の検査ユニット。
- 前記固定手段が、前記金属ブロックの両面側に設けられ、前記コンタクトプローブのそれぞれは前記プランジャが両側から突出する構造に形成されてなる請求項1ないし5のいずれか1項記載の検査ユニット。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004288230A JP4405358B2 (ja) | 2004-09-30 | 2004-09-30 | 検査ユニット |
US11/238,046 US7102373B2 (en) | 2004-09-30 | 2005-09-29 | Inspection unit |
KR1020050091978A KR100852926B1 (ko) | 2004-09-30 | 2005-09-30 | 검사 유닛 |
TW094134155A TWI293118B (en) | 2004-09-30 | 2005-09-30 | Inspection unit |
MYPI20054622A MY135083A (en) | 2004-09-30 | 2005-09-30 | Inspection unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004288230A JP4405358B2 (ja) | 2004-09-30 | 2004-09-30 | 検査ユニット |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006098375A true JP2006098375A (ja) | 2006-04-13 |
JP4405358B2 JP4405358B2 (ja) | 2010-01-27 |
Family
ID=36098306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004288230A Active JP4405358B2 (ja) | 2004-09-30 | 2004-09-30 | 検査ユニット |
Country Status (5)
Country | Link |
---|---|
US (1) | US7102373B2 (ja) |
JP (1) | JP4405358B2 (ja) |
KR (1) | KR100852926B1 (ja) |
MY (1) | MY135083A (ja) |
TW (1) | TWI293118B (ja) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009139191A (ja) * | 2007-12-05 | 2009-06-25 | Nec Electronics Corp | 検査用ソケット |
WO2009154421A2 (ko) * | 2008-06-20 | 2009-12-23 | Lee Jae Hak | 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의 제조방법 |
JP2011138655A (ja) * | 2009-12-28 | 2011-07-14 | Shonan Engineering Corp | 多点接触装置および当該装置を備えた電池検査装置 |
KR101088733B1 (ko) | 2007-08-31 | 2011-12-01 | (주) 미코티엔 | 프로브 카드 |
JP2012053010A (ja) * | 2010-09-03 | 2012-03-15 | Mitsubishi Electric Corp | Tdr式検査装置 |
US8159249B2 (en) | 2008-09-05 | 2012-04-17 | Yokowo Co., Ltd. | Inspection unit |
JP2016102696A (ja) * | 2014-11-27 | 2016-06-02 | 株式会社ヨコオ | 検査ユニット |
JP2016191553A (ja) * | 2015-03-30 | 2016-11-10 | 日本発條株式会社 | プローブユニット |
KR102044753B1 (ko) * | 2018-05-25 | 2019-11-15 | 리노공업주식회사 | 검사장치 |
CN111751578A (zh) * | 2019-03-29 | 2020-10-09 | 矽品精密工业股份有限公司 | 检测装置及其制法 |
US11293944B2 (en) | 2018-03-30 | 2022-04-05 | Yamaichi Electronics Co., Ltd. | Test socket |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4438601B2 (ja) * | 2004-10-28 | 2010-03-24 | 株式会社ヨコオ | 検査ユニットの製法 |
US7728611B1 (en) * | 2006-02-06 | 2010-06-01 | Interconnect Devices, Inc. | Compressive conductors for semiconductor testing |
TWI280372B (en) * | 2006-02-08 | 2007-05-01 | Wistron Corp | Test apparatus for holding signal terminals |
JP2007304008A (ja) * | 2006-05-12 | 2007-11-22 | Nidec-Read Corp | 基板検査用接触子、基板検査用治具及び基板検査装置 |
JP4831614B2 (ja) * | 2006-08-15 | 2011-12-07 | 株式会社ヨコオ | ケルビン検査用治具 |
JP2008145238A (ja) * | 2006-12-08 | 2008-06-26 | Micronics Japan Co Ltd | 電気接続器及びこれを用いた電気的接続装置 |
KR101077239B1 (ko) * | 2006-12-15 | 2011-10-27 | 니혼 하츠쵸 가부시키가이샤 | 도전성 접촉자 홀더 및 도전성 접촉자 유닛 |
KR100769891B1 (ko) * | 2007-01-25 | 2007-10-24 | 리노공업주식회사 | 검사용 탐침 장치 및 이를 이용한 검사용 소켓 |
US20090134898A1 (en) * | 2007-11-26 | 2009-05-28 | Carlsen Richard D | Coaxial Spring Probe Grounding Method |
US7816932B2 (en) * | 2008-02-21 | 2010-10-19 | Teradyne, Inc. | Test system with high frequency interposer |
TWM359860U (en) * | 2008-11-25 | 2009-06-21 | Hon Hai Prec Ind Co Ltd | Electrical connector |
US8324919B2 (en) * | 2009-03-27 | 2012-12-04 | Delaware Capital Formation, Inc. | Scrub inducing compliant electrical contact |
TW201118381A (en) * | 2009-11-16 | 2011-06-01 | Pleader Yamaichi Co Ltd | Test device for high-frequency vertical probe card |
US8506307B2 (en) | 2010-12-02 | 2013-08-13 | Interconnect Devices, Inc. | Electrical connector with embedded shell layer |
US9899757B2 (en) * | 2015-09-03 | 2018-02-20 | Apple Inc. | Surface connector with silicone spring member |
US9876307B2 (en) * | 2015-09-03 | 2018-01-23 | Apple Inc. | Surface connector with silicone spring member |
CN109724522A (zh) * | 2017-10-27 | 2019-05-07 | 群光电子(苏州)有限公司 | 一种产品厚度检验装置 |
CN110068711B (zh) * | 2018-01-24 | 2022-04-26 | 台湾中华精测科技股份有限公司 | 探针卡装置及矩形探针 |
US11994535B2 (en) * | 2018-11-27 | 2024-05-28 | Nhk Spring Co., Ltd. | Probe unit |
US11150269B2 (en) * | 2019-08-15 | 2021-10-19 | Mpi Corporation | Probe head for high frequency signal test and medium or low frequency signal test at the same time |
CN111044919B (zh) * | 2019-12-06 | 2021-01-15 | 广东恒翼能科技有限公司 | 一种探针模组及模组化锂电池测试装置 |
CN115144620A (zh) * | 2021-03-31 | 2022-10-04 | 恩普乐斯股份有限公司 | 接触探针及用于电气部件测试的插座 |
KR102315536B1 (ko) * | 2021-08-31 | 2021-10-21 | 하병호 | 검사소켓 및 그 제조방법 |
KR20230050060A (ko) * | 2021-10-07 | 2023-04-14 | (주)포인트엔지니어링 | 전기 전도성 접촉핀 어레이 |
TWI831328B (zh) * | 2022-08-15 | 2024-02-01 | 思達科技股份有限公司 | 探針陣列及探針結構 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001099889A (ja) | 1999-09-29 | 2001-04-13 | Yokowo Co Ltd | 高周波回路の検査装置 |
-
2004
- 2004-09-30 JP JP2004288230A patent/JP4405358B2/ja active Active
-
2005
- 2005-09-29 US US11/238,046 patent/US7102373B2/en active Active
- 2005-09-30 MY MYPI20054622A patent/MY135083A/en unknown
- 2005-09-30 TW TW094134155A patent/TWI293118B/zh active
- 2005-09-30 KR KR1020050091978A patent/KR100852926B1/ko active IP Right Grant
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101088733B1 (ko) | 2007-08-31 | 2011-12-01 | (주) 미코티엔 | 프로브 카드 |
JP2009139191A (ja) * | 2007-12-05 | 2009-06-25 | Nec Electronics Corp | 検査用ソケット |
WO2009154421A2 (ko) * | 2008-06-20 | 2009-12-23 | Lee Jae Hak | 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의 제조방법 |
WO2009154421A3 (ko) * | 2008-06-20 | 2010-04-01 | Lee Jae Hak | 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의 제조방법 |
US8159249B2 (en) | 2008-09-05 | 2012-04-17 | Yokowo Co., Ltd. | Inspection unit |
JP2011138655A (ja) * | 2009-12-28 | 2011-07-14 | Shonan Engineering Corp | 多点接触装置および当該装置を備えた電池検査装置 |
JP2012053010A (ja) * | 2010-09-03 | 2012-03-15 | Mitsubishi Electric Corp | Tdr式検査装置 |
JP2016102696A (ja) * | 2014-11-27 | 2016-06-02 | 株式会社ヨコオ | 検査ユニット |
JP2016191553A (ja) * | 2015-03-30 | 2016-11-10 | 日本発條株式会社 | プローブユニット |
US11293944B2 (en) | 2018-03-30 | 2022-04-05 | Yamaichi Electronics Co., Ltd. | Test socket |
KR102044753B1 (ko) * | 2018-05-25 | 2019-11-15 | 리노공업주식회사 | 검사장치 |
US11609245B2 (en) | 2018-05-25 | 2023-03-21 | Leeno Industrial Inc. | Test device |
CN111751578A (zh) * | 2019-03-29 | 2020-10-09 | 矽品精密工业股份有限公司 | 检测装置及其制法 |
Also Published As
Publication number | Publication date |
---|---|
MY135083A (en) | 2008-01-31 |
KR100852926B1 (ko) | 2008-08-19 |
KR20060051914A (ko) | 2006-05-19 |
TWI293118B (en) | 2008-02-01 |
US7102373B2 (en) | 2006-09-05 |
US20060066330A1 (en) | 2006-03-30 |
TW200617397A (en) | 2006-06-01 |
JP4405358B2 (ja) | 2010-01-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4405358B2 (ja) | 検査ユニット | |
JP4535828B2 (ja) | 検査ユニットの製法 | |
JP4438601B2 (ja) | 検査ユニットの製法 | |
JP4607004B2 (ja) | 検査ユニット | |
US7656175B2 (en) | Inspection unit | |
KR100626629B1 (ko) | 고주파 소자용 검사 치구 및 이 치구에 채용된 접촉 프로브 | |
JP4921344B2 (ja) | 検査ソケット | |
JP2008070146A (ja) | 検査用ソケット | |
JP2010237133A (ja) | 検査ソケットおよびその製法 | |
JP2004325306A (ja) | 検査用同軸プローブおよびそれを用いた検査ユニット | |
JP2010175371A (ja) | 検査ソケット | |
JP2004325305A (ja) | Icソケット | |
JP2007178163A (ja) | 検査ユニットおよびそれに用いる検査プローブ用外皮チューブ組立体 | |
JP2005172581A (ja) | 半導体試験装置 | |
JP2005049163A (ja) | 高周波・高速用デバイスの検査治具および検査用プローブ | |
KR20100095142A (ko) | 검사용 소켓 | |
JP4251854B2 (ja) | 高周波・高速用デバイスの検査治具 | |
JP5344740B2 (ja) | コンタクトプローブ | |
JP2022116470A (ja) | プローブ装置 | |
JP2003207539A (ja) | 検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070817 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090713 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090728 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090909 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20090909 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20091020 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091104 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121113 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4405358 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121113 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131113 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |