WO2009154421A2 - 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의 제조방법 - Google Patents
테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의 제조방법 Download PDFInfo
- Publication number
- WO2009154421A2 WO2009154421A2 PCT/KR2009/003292 KR2009003292W WO2009154421A2 WO 2009154421 A2 WO2009154421 A2 WO 2009154421A2 KR 2009003292 W KR2009003292 W KR 2009003292W WO 2009154421 A2 WO2009154421 A2 WO 2009154421A2
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- WIPO (PCT)
- Prior art keywords
- test socket
- contact pin
- bonding material
- spring
- tin
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
- H01R12/70—Coupling devices
- H01R12/71—Coupling devices for rigid printing circuits or like structures
- H01R12/712—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
- H01R12/714—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/02—Arrangements of circuit components or wiring on supporting structure
- H05K7/10—Plug-in assemblages of components, e.g. IC sockets
- H05K7/1053—Plug-in assemblages of components, e.g. IC sockets having interior leads
- H05K7/1061—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting
- H05K7/1069—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting with spring contact pieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
- H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R2201/00—Connectors or connections adapted for particular applications
- H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49204—Contact or terminal manufacturing
- Y10T29/49208—Contact or terminal manufacturing by assembling plural parts
- Y10T29/4921—Contact or terminal manufacturing by assembling plural parts with bonding
Definitions
- the present invention relates to a test socket, an electrical connector, and a method for manufacturing the test socket, and more particularly, a test socket, an electrical connector, which is excellent in assemblability, excellent in electrical characteristics, and capable of realizing a minute pitch. It is about the manufacturing method of the test socket.
- test sockets are used as an intermediary means for the connection between the semiconductor device and the test apparatus.
- the role of the test socket is disposed between the terminal of the semiconductor device and the pad of the test apparatus to electrically connect the terminal and the pad to each other so that signals can be exchanged in both directions.
- the pogo pin is used as a contact means used inside the test socket.
- These pogo pins are configured such that a pair of pins are provided on the upper and lower ends and a spring is provided between the pins. The upper pin is in contact with the terminal, the lower pin is in contact with the pad, and the upper and lower pins are electrically connected to each other, and the spring is configured to absorb mechanical shock that may occur when the terminal is in contact.
- the test socket 100 includes a housing 110 having a through hole 111 formed in a vertical direction at a position corresponding to the terminal 131 of the semiconductor device 130. And a pogo pin 120 mounted in the through hole 111 of the housing 110 to electrically connect the terminal 131 of the semiconductor device 130 and the pad 141 of the test apparatus 140.
- the spring 122 is contracted and expanded while absorbing the mechanical shock transmitted to the contact pin 121 and the contact tip 123 of the terminal 131 and the test apparatus 140 of the semiconductor device 130
- the pad 141 is electrically connected to check whether there is an electrical defect.
- test socket according to the prior art has the following problems.
- the signal applied from the pad of the test apparatus is transmitted to the terminal of the semiconductor device through the contact tip, the spring, the contact pin, the connection path is complicated, especially the electrical connection characteristics are not good because there are many contacts between components There is this.
- FIG. 2 is an operation diagram of FIG.
- FIG. 3 is a cutaway view of a pogo pin used in the test socket of FIG.
- FIG. 4 is a diagram of a main configuration of a test apparatus according to a preferred embodiment of the present invention.
- FIG. 5 is an overall cross-sectional view of the test apparatus of FIG. 4.
- FIG. 6 is a manufacturing process of the test apparatus of FIG.
- FIG. 7 is a diagram of a test apparatus according to another embodiment of the present invention.
- FIG. 8 is a diagram of a test apparatus according to another embodiment of the present invention.
- the present invention was created to solve the above-mentioned problems, more specifically, the electrical connection path is simple and excellent electrical connection characteristics, by removing the arrangement around the spring can reduce the overall pogo pin width, The goal is to provide an efficient test socket for improving the electrical properties by shortening the overall length.
- the test socket according to the present invention for solving the above problems is a test socket for electrically connecting the terminal of the semiconductor device and the pad of the test apparatus, the through-hole in the vertical direction at a position corresponding to the terminal of the semiconductor device A housing formed in the housing; A contact pin disposed at a position corresponding to the terminal of the semiconductor device and in contact with the terminal of the semiconductor device; And an elastic member connected to the contact pin in the through-hole of the housing to contract and expand.
- the elastic member is connected to the contact pin by a bonding material.
- the bonding material is a silver-tin (Ag-Sn) alloy, a gold-tin (Au-Sn) alloy, a silver-copper-tin (Ag-Cu-Sn) alloy, a silver-tin-bismuth (Ag -Sn-Bi) As the alloy and the conductive resin, the elastic member is preferably soldered by the bonding material.
- the bonding material is preferably a conductive resin composed of a synthetic resin and a plurality of conductive particles contained in the synthetic resin.
- the synthetic resin preferably includes polyphenylene ether and styrene resin.
- the elastic member is preferably a spring.
- the elastic member includes a conductive member which extends in the vertical direction and includes an extension having a cross-sectional area corresponding to the inner diameter of the spring and integrally formed at an upper end of the extension and having a protrusion having a larger cross-sectional area than the extension.
- the conductive member has an extension portion inserted into the spring and the protrusion portion is mounted on the top of the spring.
- a metal layer is preferably plated on the inner circumferential surface of the through hole of the housing.
- the metal layer is preferably a precious metal such as gold or silver.
- At least one of platinum (Pt), palladium (Pd), and rhodium (rh) is preferably plated on the surface of the metal layer.
- an electrical connector including: a contact pin disposed between a first terminal and a second terminal requiring electrical connection, the contact pin being in contact with the first terminal; One end is connected to the contact pin, and the other end is a spring for contracting and expanding movement to be connected to the second terminal, the contact pin is joined by a spring and the bonding material.
- the bonding material is a silver-tin (Ag-Sn) alloy, a gold-tin (Au-Sn) alloy, a silver-copper-tin (Ag-Cu-Sn) alloy and a silver-tin-bismuth ( It is preferable that it is either an Ag-Sn-Bi) alloy and a conductive resin.
- the conductive resin is preferably composed of a synthetic resin and a plurality of conductive particles contained in the synthetic resin.
- Method of manufacturing a test socket for achieving the above object the manufacturing method of the contact pin to produce a pointed contact pin; Bonding material plating step of plating the bonding material on the other end of the contact pin; And a bonding step of bonding the spring aligned by the housing with the through hole formed at a position corresponding to the terminal of the semiconductor device to the bonding material, so that the spring is electrically connected to the contact pin.
- the step of manufacturing the contact pin the step of forming a wedge-shaped groove in the substrate by etching; Depositing an oxide film on the substrate and patterning a photo resist (PR); And plating a conductive material such as Ni-Co or Ni-W on the etched groove.
- a photo resist PR
- the bonding material is preferably a silver tin (Au-Sn) alloy, a gold tin (Au-Sn) alloy.
- the bonding step the step of heating and melting the bonding material; Penetrating one end of the spring into the molten bonding material; And cooling the bonding material.
- the present invention having the above-described configuration, by providing the contact pins disposed below the barrel while removing the barrel, the overall electrical connection path is simplified, so that the electrical connection characteristics are excellent.
- FIG. 4 is a cutaway view of a partial configuration of a test socket according to a preferred embodiment of the present invention
- FIG. 5 is a cross-sectional view of a test socket having a partial configuration of FIG. 4
- FIG. 6 is a procedure of manufacturing a test socket according to FIG. 5.
- the test socket 1 is composed of a housing 10, a contact pin 21, a bonding material 22, and an elastic member.
- the housing 10 is made of a synthetic resin material and is a means for fixing the contact pins 21 and the springs 23.
- the housing 10 has a through hole 11 penetrating in a vertical direction at a position corresponding to the terminal 131 of the semiconductor device 130.
- the contact pin 21 is disposed at a position corresponding to the terminal 131 of the semiconductor device 130 to be in contact with the terminal 131 of the semiconductor device 130, and specifically, a microelectromechanical system (MEMS) process. It is preferable to be manufactured using, but is not limited thereto.
- MEMS microelectromechanical system
- the upper end of the contact pin is shown to have a shape in which four square pyramids are formed. This is for increasing the contact force with the terminals of the semiconductor device. As such, the shape of the upper end of the contact pin is not limited thereto, and various shapes such as a single pyramid or a cone may be adopted.
- the bonding material 22 bonds the elastic member to the contact pin 21. Specifically, the bonding material 22 is opposite to a portion of the contact pin 21 that contacts the terminal 131 of the semiconductor device 130. Is formed on the part.
- a soldering material such as a silver tin (Au-Sn) alloy, a gold tin (Au-Sn) alloy, or a conductive resin may be used. Meanwhile, the soldering material is not limited thereto, and various environmentally friendly materials other than lead may also be used.
- the conductive resin has a form composed of a synthetic resin and a plurality of conductive particles contained in the synthetic resin.
- the synthetic resin is preferably in the form of a composite resin containing a polyphenylene ether and styrene-based resin in terms of adhesion and stability, in addition to various synthetic resins can be used.
- the conductive particles may be a powder such as nickel, silver, CNT excellent in conductivity, it is also possible to form a plating layer on the surface of the powder particles.
- the elastic member is connected to the contact pin 21 in the through hole 11 of the housing 10 to perform a contraction or expansion movement, specifically, the contact pin 21 provides an elastic force to move up and down. It is.
- the spring 23 is used as the elastic member. The lower end of the spring 23 is connected to the pad 141 of the test device 140. Meanwhile, an upper end of the spring 23 is electrically and mechanically connected to the contact pin 21 by the bonding material 22.
- test socket 1 The manufacturing method of the test socket 1 according to the preferred embodiment of the present invention will be described with reference to FIG.
- the contact pin 21 is manufactured by the MEMS process.
- the contact pin 21 has a pointed shape at one end of which is in contact with the terminal 131 of the semiconductor device 130.
- an oxide film is deposited on the substrate and the photoresist (PR) is patterned.
- the contact pin 21 is completed by plating a conductive material such as Ni-Co or Ni-W on the etched groove afterwards.
- the bonding material 22 is plated on the other end of the contact pin 21.
- the bonding material 22 is made of silver tin alloy or gold tin alloy.
- the bonding material 22 is plated on the other end of the contact pin 21 by a plating method, but various methods may be used.
- test socket according to the present invention has the following effects.
- the test socket is mounted on the test apparatus to perform the test of the semiconductor device. Specifically, the bottom of the spring of the test socket is in contact with the terminal of the test apparatus. Thereafter, the semiconductor device is lowered so that the terminals of the semiconductor device are in contact with the top of the contact pin. As the terminal descends further down, the spring compresses and absorbs mechanical shock. On the other hand, when a signal is subsequently applied from the test apparatus, the signal reaches the terminal of the semiconductor device via the spring of the test apparatus, the contact pin, or reaches the semiconductor device via the spring, the metal layer or the contact pin. . As described above, the test socket according to the present embodiment shortens the overall electrical connection path, thereby making the electrical connection stable.
- the prior art had to include all the contact pins, springs, contact tips, barrels, etc., but in this embodiment, since only the contact pins and the spring can be electrically connected, manufacturability is improved according to the reduction of parts, and manufacturing cost Is also reduced.
- the barrel and the spring are used together to limit the overall width.
- the overall width depends only on the spring, and thus it can be applied to a micro pitch having a narrow width. have.
- the contact pin according to the present embodiment is manufactured by the MEMS process, the shape of the contact pin can be easily changed to be applicable to various devices.
- the contact pin according to the present embodiment can make a constant inclined surface (54.7 degrees) according to the crystal direction according to the manufacturing using the silicon wet etching (Silicone Wet Etching) to prevent wear and contamination when contacting the terminal of the semiconductor device Can be reduced.
- the bonding material according to the present embodiment has the advantage of facilitating the process of the overall test apparatus because it is plated together during the manufacture of the contact pin, rather than applying using a separate process.
- a separate plating layer is not formed in the through hole 11 of the housing 10.
- an upper end is formed on the inner circumferential surface of the through hole 11 of the housing.
- the metal layer 12 is plated from to bottom. That is, the metal layer 12 attached to the inner circumferential surface of the through hole 11 is made of a precious metal such as gold or silver, which is a plating layer for enhancing conductivity.
- the metal layer 12 made of a material such as platinum, rhodium and palladium may be plated on the surface of the metal layer 12 made of a material having excellent conductivity such as gold or silver to increase the hardness of gold or silver. As such, as the metal layer 12 is formed on the inner circumferential surface of the through hole 11, the conductivity is increased and the hardness is excellent.
- the metal layer 12 serves to speed up the entire electrical connection path. That is, in the conventional technique according to FIG. 1, the spring 122 serves to mitigate mechanical shock and at the same time, perform a role of electrically connecting the contact pin 121 and the contact tip 123.
- the signal transmitted from the pad 141 of the device 140 proceeds spirally along the spring 122, which not only has a problem that the electrical connection path is lengthened, but also is stable through the spring when the signal is high frequency. There is a problem that cannot be delivered to.
- the signal applied from the pad 141 of the test apparatus 140 passes through the spring 23 through the metal layer 12 and the upper contact pin ( 21) the overall electrical connection path is shortened and the overall electrical connection characteristics are excellent.
- the conductive member 24 is comprised of the protrusion part 24a and the extension part 24b.
- the extension part 24b is the part inserted in the spring 23, and the protrusion part 24a is the part which hangs and rests on the upper end of a spring.
- the extension part 24b has a shape in which a cross section thereof can be inserted into the spring 23, and specifically, it has a circular cross section substantially coinciding with the inner diameter of the spring 23.
- the protrusion 24a has a cross-sectional area larger than the inner diameter of the spring 23 so that the protrusion 24a can be caught and seated on the upper end of the spring 23.
- the bonding material 22 is provided between the contact pin 21 and the upper end of the protrusion 24a.
- test socket described above is used only when connecting the semiconductor device and the test apparatus.
- the test socket may also be used for an electrical connection device disposed between the first terminal and the second terminal that require electrical connection.
- the bonding material is a silver-tin (Ag-Sn) alloy, gold-tin (Au-Sn) alloy, silver-copper-tin (Ag-Cu-Sn) alloy and silver-tin-bismuth (Ag-Sn- It is preferable that it is either Bi) alloy and conductive resin.
- the conductive resin is composed of a synthetic resin and a plurality of conductive particles contained in the synthetic resin.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Connecting Device With Holders (AREA)
Abstract
Description
Claims (16)
- 반도체 디바이스의 단자와 테스트장치의 패드를 전기적으로 연결시키기 위한 테스트 소켓에 있어서,상기 반도체 디바이스의 단자와 대응되는 위치에 상하방향으로 연장된 관통공에 형성된 하우징;상기 하우징의 관통공과 대응되는 위치에 배치되어 상기 반도체 디바이스의 단자와 접촉하는 접촉핀; 및상기 하우징의 관통공 내부에서 상기 접촉핀에 연결되어 수축과 팽창 운동을 하는 탄성부재;을 포함하되,상기 탄성부재는 상기 접촉핀에 접합물질에 의하여 접합되어 연결된 것을 특징으로 하는 테스트 소켓.
- 1항에 있어서, 상기 접합물질은 은-주석(Ag-Sn) 합금, 금-주석(Au-Sn) 합금, 은-구리-주석(Ag-Cu-Sn) 합금, 은-주석-비스무트(Ag-Sn-Bi) 합금 및 전도성 수지 중 어느 하나로서, 상기 탄성부재는 그 접합물질에 의하여 솔더링 접합되는 것을 특징으로 하는 테스트 소켓.
- 1항에 있어서, 상기 접합물질은 합성수지와 그 합성수지 내에 포함된 다수의 전도성 입자로 구성된 전도성 수지인 것을 특징으로 하는 테스트 소켓.
- 3항에 있어서, 상기 합성수지는 폴리페닐렌 에테르와 스틸렌계 수지를 포함하는 것을 특징으로 하는 테스트 소켓.
- 1항에 있어서, 상기 탄성부재는 스프링인 것을 특징으로 하는 것을 테스트 소켓.
- 5항에 있어서, 상기 탄성부재에는 상하방향으로 연장되며 상기 스프링의 내경과 대응되는 단면적을 가지는 연장부와 상기 연장부의 상단에 일체로 형성되며 연장부보다 큰 단면적을 가지는 돌출부로 이루어지는 도전부재가 더 포함되되, 상기 도전부재는 그 연장부가 스프링 내에 삽입되고 그 돌출부는 스프링의 상단에 안착되는 것을 특징으로 하는 테스트 소켓.
- 1항에 있어서, 상기 하우징의 관통공 내주면에는 금속층이 도금되어 있는 것을 특징으로 하는 테스트 소켓.
- 7항에 있어서, 상기 금속층은 금 또는 은 등의 귀금속인 것을 특징으로 하는 테스트 소켓.
- 7항에 있어서, 상기 금속층의 표면에는 백금(Pt), 팔라듐(Pd), 로듐(rh) 중 어느 적어도 어느 하나가 도금되어 있는 것을 특징으로 하는 테스트 소켓.
- 기적 접속이 요구되는 제1단자와 제2단자 사이에 배치되는 전기적 연결장치에 있어서,상기 제1단자와 접촉가능한 접촉핀;일단이 상기 접촉핀과 접속되고, 타단은 상기 제2단자와 접속되도록 수축과 팽창 운동을 하는 스프링;을 포함하되,상기 접촉핀은 스프링과 접합물질에 의하여 접합되어 있는 것을 특징으로 하는 전기적 연결장치.
- 10항에 있어서, 상기 접합물질은 은-주석(Ag-Sn) 합금, 금-주석(Au-Sn) 합금, 은-구리-주석(Ag-Cu-Sn) 합금 및 은-주석-비스무트(Ag-Sn-Bi) 합금 및 전도성 수지 중 어느 하나인 것을 특징으로 하는 전기적 연결장치.
- 11항에 있어서, 상기 전도성 수지는 합성수지와 그 합성수지 내에 포함된 다수의 전도성 입자로 구성된 것을 특징으로 하는 전기적 연결장치.
- 1항에 따른 테스트 소켓의 제조방법에 있어서,일단이 뾰족한 접촉핀을 제작하는 접촉핀 제작단계;상기 접촉핀의 타단에 접합물질을 도금하는 접합물질 도금단계; 및반도체 디바이스의 단자와 대응되는 위치에 관통공이 형성된 하우징에 의하여 정렬된 스프링을 상기 접합물질에 접합시킴으로서, 상기 스프링이 상기 접촉핀에 전기적으로 접속되도록 하는 접합단계;를 포함하는 것을 특징으로 하는 테스트 소켓의 제조방법.
- 13항에 있어서,상기 접촉핀을 제작하는 단계는,에칭에 의하여 웨지형상의 홈을 기판에 생성시키는 단계; 및 상기 기판에 산화막을 증착하고, 포토레지스트(Photo Resist; PR)를 패터닝(patterning)하는 단계; 및 상기 식각된 홈에 Ni-Co 또는 Ni-W 등의 전도성 물질을 도금시키는 단계를 포함하는 것을 특징으로 하는 테스트 소켓의 제조방법.
- 13항에 있어서,상기 접합물질은 은주석(Au-Sn) 합금, 금주석(Au-Sn) 합금인 것을 특징으로 하는 테스트 소켓의 제조방법.
- 13항에 있어서,상기 접합단계에는, 상기 접합물질을 가열하여 녹이는 단계; 상기 용융상태의 접합물질에 스프링의 일단을 침투시키는 단계; 및 상기 접합물질을 냉각시키는 단계를 포함하는 것을 특징으로 하는 테스트 소켓의 제조방법.
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US13/000,166 US20110102009A1 (en) | 2008-06-20 | 2009-06-19 | Test socket electrical connector, and method for manufacturing the test socket |
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KR1020080058372A KR101099501B1 (ko) | 2008-06-20 | 2008-06-20 | 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의제조방법 |
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KR101490498B1 (ko) * | 2013-06-18 | 2015-02-05 | 주식회사 아이에스시 | 검사용 인서트 |
KR101524471B1 (ko) * | 2013-12-12 | 2015-06-10 | 주식회사 아이에스시 | 포고핀용 탐침부재의 플런저 고정 방법 및 이러한 방법으로 제조된 포고핀 구조체 |
KR101793717B1 (ko) * | 2015-08-07 | 2017-11-03 | 조인셋 주식회사 | 전기접속단자 |
KR20210121010A (ko) * | 2019-01-29 | 2021-10-07 | 가부시키가이샤 요코오 | 플런저 및 컨택트 프로브 |
KR102202295B1 (ko) * | 2019-08-29 | 2021-01-13 | 주식회사 피에스개발 | 테스트 소켓용 이형 스프링 어셈블리 및 이를 갖는 테스트 소켓 |
EP4080684A1 (en) * | 2021-04-20 | 2022-10-26 | Preci-Dip Sa | Piston assembly and spring-loaded contact |
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WO2009154421A3 (ko) | 2010-04-01 |
KR101099501B1 (ko) | 2011-12-27 |
KR20090132215A (ko) | 2009-12-30 |
US20110102009A1 (en) | 2011-05-05 |
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