JP2006080542A5 - - Google Patents

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Publication number
JP2006080542A5
JP2006080542A5 JP2005291807A JP2005291807A JP2006080542A5 JP 2006080542 A5 JP2006080542 A5 JP 2006080542A5 JP 2005291807 A JP2005291807 A JP 2005291807A JP 2005291807 A JP2005291807 A JP 2005291807A JP 2006080542 A5 JP2006080542 A5 JP 2006080542A5
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JP
Japan
Prior art keywords
substrate
exposure apparatus
port
gap
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005291807A
Other languages
English (en)
Japanese (ja)
Other versions
JP3997243B2 (ja
JP2006080542A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005291807A priority Critical patent/JP3997243B2/ja
Priority claimed from JP2005291807A external-priority patent/JP3997243B2/ja
Publication of JP2006080542A publication Critical patent/JP2006080542A/ja
Publication of JP2006080542A5 publication Critical patent/JP2006080542A5/ja
Application granted granted Critical
Publication of JP3997243B2 publication Critical patent/JP3997243B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005291807A 2005-10-04 2005-10-04 露光装置及びデバイス製造方法 Expired - Fee Related JP3997243B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005291807A JP3997243B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005291807A JP3997243B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003185389A Division JP3862678B2 (ja) 2003-06-27 2003-06-27 露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2006080542A JP2006080542A (ja) 2006-03-23
JP2006080542A5 true JP2006080542A5 (enExample) 2007-08-23
JP3997243B2 JP3997243B2 (ja) 2007-10-24

Family

ID=36159691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005291807A Expired - Fee Related JP3997243B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP3997243B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG124359A1 (en) 2005-01-14 2006-08-30 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP2008034801A (ja) 2006-06-30 2008-02-14 Canon Inc 露光装置およびデバイス製造方法

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