JP2006038121A - ゲート弁及び真空ゲート弁 - Google Patents
ゲート弁及び真空ゲート弁 Download PDFInfo
- Publication number
- JP2006038121A JP2006038121A JP2004219658A JP2004219658A JP2006038121A JP 2006038121 A JP2006038121 A JP 2006038121A JP 2004219658 A JP2004219658 A JP 2004219658A JP 2004219658 A JP2004219658 A JP 2004219658A JP 2006038121 A JP2006038121 A JP 2006038121A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- processing chamber
- box
- opening
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/02—Feed or outlet devices therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004219658A JP2006038121A (ja) | 2004-07-28 | 2004-07-28 | ゲート弁及び真空ゲート弁 |
TW094113438A TWI287075B (en) | 2004-07-28 | 2005-04-27 | Gate valve and vacuum gate valve |
KR1020050042910A KR100666894B1 (ko) | 2004-07-28 | 2005-05-23 | 게이트밸브 및 진공 게이트밸브 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004219658A JP2006038121A (ja) | 2004-07-28 | 2004-07-28 | ゲート弁及び真空ゲート弁 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006038121A true JP2006038121A (ja) | 2006-02-09 |
Family
ID=35903320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004219658A Pending JP2006038121A (ja) | 2004-07-28 | 2004-07-28 | ゲート弁及び真空ゲート弁 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006038121A (ko) |
KR (1) | KR100666894B1 (ko) |
TW (1) | TWI287075B (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102261516A (zh) * | 2010-04-16 | 2011-11-30 | 亚威科股份有限公司 | 阀门、操作阀门的方法、以及真空处理设备 |
JP5011382B2 (ja) * | 2007-05-08 | 2012-08-29 | 東京エレクトロン株式会社 | バルブおよび該バルブを備えた処理装置 |
CN106907497A (zh) * | 2017-05-09 | 2017-06-30 | 凯阀控股集团有限公司 | 一种陶瓷闸阀 |
CN107575641A (zh) * | 2017-10-10 | 2018-01-12 | 深圳市大成精密设备有限公司 | 一种先导式真空阀门 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008049353A1 (de) | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
TWI385329B (zh) * | 2008-11-21 | 2013-02-11 | V Tex Corp | Vacuum gate valve and its opening and closing method |
KR101065127B1 (ko) * | 2009-02-12 | 2011-09-16 | 지에스칼텍스 주식회사 | 분리탑 및 분리탑 구동 제어 방법 |
US8877001B2 (en) * | 2009-05-07 | 2014-11-04 | Applied Materials, Inc. | Shuttered gate valve |
KR101123299B1 (ko) * | 2010-02-04 | 2012-03-20 | (주)엘티엘 | 진공 차단장치 및 이를 포함하는 영상표시장치 제조설비 |
TWI448635B (zh) * | 2010-04-14 | 2014-08-11 | Wue Shyang Machinery Co Ltd | 雙向控制閥 |
EP2913573A1 (de) * | 2014-02-26 | 2015-09-02 | VAT Holding AG | Vakuumventil |
KR102206551B1 (ko) * | 2019-03-25 | 2021-01-25 | 주식회사 에이씨엔 | 기판 처리 장치 |
-
2004
- 2004-07-28 JP JP2004219658A patent/JP2006038121A/ja active Pending
-
2005
- 2005-04-27 TW TW094113438A patent/TWI287075B/zh active
- 2005-05-23 KR KR1020050042910A patent/KR100666894B1/ko active IP Right Grant
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5011382B2 (ja) * | 2007-05-08 | 2012-08-29 | 東京エレクトロン株式会社 | バルブおよび該バルブを備えた処理装置 |
CN102261516A (zh) * | 2010-04-16 | 2011-11-30 | 亚威科股份有限公司 | 阀门、操作阀门的方法、以及真空处理设备 |
CN106907497A (zh) * | 2017-05-09 | 2017-06-30 | 凯阀控股集团有限公司 | 一种陶瓷闸阀 |
CN107575641A (zh) * | 2017-10-10 | 2018-01-12 | 深圳市大成精密设备有限公司 | 一种先导式真空阀门 |
CN107575641B (zh) * | 2017-10-10 | 2023-12-29 | 深圳市大成精密设备股份有限公司 | 一种先导式真空阀门 |
Also Published As
Publication number | Publication date |
---|---|
KR100666894B1 (ko) | 2007-01-10 |
TW200604457A (en) | 2006-02-01 |
TWI287075B (en) | 2007-09-21 |
KR20060046137A (ko) | 2006-05-17 |
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