TW200604457A - Gate valve and vacuum gate valve - Google Patents

Gate valve and vacuum gate valve

Info

Publication number
TW200604457A
TW200604457A TW094113438A TW94113438A TW200604457A TW 200604457 A TW200604457 A TW 200604457A TW 094113438 A TW094113438 A TW 094113438A TW 94113438 A TW94113438 A TW 94113438A TW 200604457 A TW200604457 A TW 200604457A
Authority
TW
Taiwan
Prior art keywords
valve
discharge port
side discharge
gate valve
opening
Prior art date
Application number
TW094113438A
Other languages
Chinese (zh)
Other versions
TWI287075B (en
Inventor
Yasukazu Ugawa
Masayuki Haga
Original Assignee
Ohno Bellows Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohno Bellows Industry Co Ltd filed Critical Ohno Bellows Industry Co Ltd
Publication of TW200604457A publication Critical patent/TW200604457A/en
Application granted granted Critical
Publication of TWI287075B publication Critical patent/TWI287075B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/02—Feed or outlet devices therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

To provide a gate valve and a vacuum gate valve which prevent the adhesion of foreign matter onto a sealed surface and the occurrence of leakage. A vacuum gate valve 2 for opening/closing opponent sealed surfaces 13a, 14a provided to a process chamber side discharge port 13 and a pump side discharge port 14 is equipped with an opening valve element 28 for abutting to the sealed surfaces 13a, 14a and communicating between the process chamber side discharge port 13 and the pump side discharge port 14 when opening the valve, a closing valve element 31 for abutting to the sealed surfaces 13a, 14a and cutting off the process chamber side discharge port 13 and the pump side discharge port 14 when closing the valve, a valve casing 11 for accommodating the opening valve element 28 and the closing valve element 31, and a handle 22 for exchangeably moving the opening valve element 28 and the closing valve element 31 with respect to the sealed surfaces 13a, 14a in the valve casing 11.
TW094113438A 2004-07-28 2005-04-27 Gate valve and vacuum gate valve TWI287075B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004219658A JP2006038121A (en) 2004-07-28 2004-07-28 Gate valve and vacuum gate valve

Publications (2)

Publication Number Publication Date
TW200604457A true TW200604457A (en) 2006-02-01
TWI287075B TWI287075B (en) 2007-09-21

Family

ID=35903320

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094113438A TWI287075B (en) 2004-07-28 2005-04-27 Gate valve and vacuum gate valve

Country Status (3)

Country Link
JP (1) JP2006038121A (en)
KR (1) KR100666894B1 (en)
TW (1) TWI287075B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102754017A (en) * 2010-02-04 2012-10-24 Ltl株式会社 Vacuum forming apparatus and image display manufacturing facility including same
TWI448635B (en) * 2010-04-14 2014-08-11 Wue Shyang Machinery Co Ltd Two-way control valve
CN106030176A (en) * 2014-02-26 2016-10-12 Vat控股公司 Vacuum valve

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI381470B (en) * 2007-05-08 2013-01-01 Tokyo Electron Ltd And a treatment device provided with the valve
DE102008049353A1 (en) 2008-09-29 2010-04-08 Vat Holding Ag vacuum valve
TWI385329B (en) * 2008-11-21 2013-02-11 V Tex Corp Vacuum gate valve and its opening and closing method
KR101065127B1 (en) * 2009-02-12 2011-09-16 지에스칼텍스 주식회사 Fractionator and drive control method of the same
US8877001B2 (en) * 2009-05-07 2014-11-04 Applied Materials, Inc. Shuttered gate valve
KR101270652B1 (en) * 2010-04-16 2013-06-03 주식회사 아바코 Valve, method for operating valve and vaccuum processing appratus
CN106907497A (en) * 2017-05-09 2017-06-30 凯阀控股集团有限公司 A kind of ceramic gate valve
CN107575641B (en) * 2017-10-10 2023-12-29 深圳市大成精密设备股份有限公司 Pilot-operated vacuum valve
KR102206551B1 (en) * 2019-03-25 2021-01-25 주식회사 에이씨엔 Substrate treating apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102754017A (en) * 2010-02-04 2012-10-24 Ltl株式会社 Vacuum forming apparatus and image display manufacturing facility including same
CN102754017B (en) * 2010-02-04 2015-05-20 Ltl株式会社 Vacuum forming apparatus and image display manufacturing facility including same
TWI448635B (en) * 2010-04-14 2014-08-11 Wue Shyang Machinery Co Ltd Two-way control valve
CN106030176A (en) * 2014-02-26 2016-10-12 Vat控股公司 Vacuum valve

Also Published As

Publication number Publication date
KR20060046137A (en) 2006-05-17
KR100666894B1 (en) 2007-01-10
TWI287075B (en) 2007-09-21
JP2006038121A (en) 2006-02-09

Similar Documents

Publication Publication Date Title
TW200604457A (en) Gate valve and vacuum gate valve
ATE300692T1 (en) PRESSURE ACTUATED DIAPHRAGM SHUT-OFF VALVE
TW200507021A (en) Methods and apparatus for sealing an opening of a processing chamber
TW200738349A (en) Liquid material discharge device with debubbling mechanism
EP1500436A4 (en) Trigger type fluid ejector
WO2005097324A3 (en) Microfluidic device including displaceable material trap, and system
TW200630538A (en) A liquid discharge method and device
TW200502488A (en) Capacity modulated scroll compressor
ATE350763T1 (en) DEVICE FOR TRANSPORTING SUBSTRATES UNDER A CONTROLLED ATMOSPHERE
IL207221A0 (en) Sealing between a cannula part and a fluid path
WO2008123842A3 (en) Ultrasonic liquid delivery device
MY142678A (en) Seal assembly for a fluid pressure control device
WO2009056840A3 (en) Subsea assembly
EP1493682A3 (en) Dispensing closure with automatic sealing valve of single body
MXPA05000624A (en) Pressure protection valve.
ATE377726T1 (en) DIAPHRAGM VALVE WITH COMPREHENSIVE SEAL
DK2004509T3 (en) Self-extinguishing valve
TW200634231A (en) Hermetically sealed compressor
GB2419367B (en) Railway track construction shims and method of constructing railway track
WO2009013467A3 (en) Valve arrangement
MXPA04009493A (en) Rotary barrel gate valve.
ATE448405T1 (en) REFRIGERANT COMPRESSOR
AU2002226336A1 (en) Valve for a food conservation container
TW200728162A (en) Inserts for multiple component containers
WO2009054209A1 (en) Valve plate device