JP2006013526A5 - - Google Patents
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- Publication number
- JP2006013526A5 JP2006013526A5 JP2005201965A JP2005201965A JP2006013526A5 JP 2006013526 A5 JP2006013526 A5 JP 2006013526A5 JP 2005201965 A JP2005201965 A JP 2005201965A JP 2005201965 A JP2005201965 A JP 2005201965A JP 2006013526 A5 JP2006013526 A5 JP 2006013526A5
- Authority
- JP
- Japan
- Prior art keywords
- socket
- substrate
- traces
- substrates
- support substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 10
- 238000012360 testing method Methods 0.000 claims 7
- 239000000523 sample Substances 0.000 claims 4
- 238000002955 isolation Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/108,163 US6033935A (en) | 1997-06-30 | 1998-06-30 | Sockets for "springed" semiconductor devices |
| US09/205,502 US20020004320A1 (en) | 1995-05-26 | 1998-12-04 | Attaratus for socketably receiving interconnection elements of an electronic component |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000557668A Division JP3723079B2 (ja) | 1998-06-30 | 1999-06-30 | バネ式パッケージングを備えた電子部品の組み立て体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006013526A JP2006013526A (ja) | 2006-01-12 |
| JP2006013526A5 true JP2006013526A5 (enExample) | 2006-11-30 |
Family
ID=26805592
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000557668A Expired - Fee Related JP3723079B2 (ja) | 1998-06-30 | 1999-06-30 | バネ式パッケージングを備えた電子部品の組み立て体 |
| JP2005201965A Pending JP2006013526A (ja) | 1998-06-30 | 2005-07-11 | バネ式パッケージングを備えた電子部品の組み立て体 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000557668A Expired - Fee Related JP3723079B2 (ja) | 1998-06-30 | 1999-06-30 | バネ式パッケージングを備えた電子部品の組み立て体 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US20020004320A1 (enExample) |
| EP (1) | EP1092338B1 (enExample) |
| JP (2) | JP3723079B2 (enExample) |
| CN (1) | CN1197443C (enExample) |
| DE (2) | DE69922656T2 (enExample) |
| TW (1) | TW548756B (enExample) |
| WO (1) | WO2000001208A1 (enExample) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5772451A (en) * | 1993-11-16 | 1998-06-30 | Form Factor, Inc. | Sockets for electronic components and methods of connecting to electronic components |
| US20020004320A1 (en) * | 1995-05-26 | 2002-01-10 | David V. Pedersen | Attaratus for socketably receiving interconnection elements of an electronic component |
| WO1999000844A2 (en) * | 1997-06-30 | 1999-01-07 | Formfactor, Inc. | Sockets for semiconductor devices with spring contact elements |
| US6887723B1 (en) * | 1998-12-04 | 2005-05-03 | Formfactor, Inc. | Method for processing an integrated circuit including placing dice into a carrier and testing |
| US6468098B1 (en) * | 1999-08-17 | 2002-10-22 | Formfactor, Inc. | Electrical contactor especially wafer level contactor using fluid pressure |
| US7396236B2 (en) * | 2001-03-16 | 2008-07-08 | Formfactor, Inc. | Wafer level interposer |
| DE10121969C1 (de) * | 2001-05-05 | 2002-08-29 | Semikron Elektronik Gmbh | Schaltungsanordnung in Druckkontaktierung und Verfahren zu seiner Herstellung |
| JP4752157B2 (ja) * | 2001-08-27 | 2011-08-17 | 株式会社村田製作所 | コイル装置 |
| US6764869B2 (en) | 2001-09-12 | 2004-07-20 | Formfactor, Inc. | Method of assembling and testing an electronics module |
| US6891385B2 (en) * | 2001-12-27 | 2005-05-10 | Formfactor, Inc. | Probe card cooling assembly with direct cooling of active electronic components |
| US7064953B2 (en) * | 2001-12-27 | 2006-06-20 | Formfactor, Inc. | Electronic package with direct cooling of active electronic components |
| US6650456B2 (en) * | 2002-04-11 | 2003-11-18 | Triquint Technology Holding Co. | Ultra-high frequency interconnection using micromachined substrates |
| US7694246B2 (en) * | 2002-06-19 | 2010-04-06 | Formfactor, Inc. | Test method for yielding a known good die |
| JP3918708B2 (ja) * | 2002-10-08 | 2007-05-23 | セイコーエプソン株式会社 | 回路基板及びその製造方法、転写チップ、転写元基板、電気光学装置、電子機器 |
| US7135704B2 (en) * | 2003-08-14 | 2006-11-14 | Lockhead Martin Corporation | VCSEL settling fixture |
| US7024763B2 (en) | 2003-11-26 | 2006-04-11 | Formfactor, Inc. | Methods for making plated through holes usable as interconnection wire or probe attachments |
| US20050108875A1 (en) * | 2003-11-26 | 2005-05-26 | Mathieu Gaetan L. | Methods for making vertical electric feed through structures usable to form removable substrate tiles in a wafer test system |
| JP2005311205A (ja) * | 2004-04-23 | 2005-11-04 | Nec Corp | 半導体装置 |
| CN1304189C (zh) * | 2004-08-24 | 2007-03-14 | 宇东电浆科技股份有限公司 | 热塑性固定装置和热塑性固定装置处理方法 |
| JP2006339553A (ja) * | 2005-06-06 | 2006-12-14 | Fuji Electric Device Technology Co Ltd | 薄膜磁気誘導素子およびその製造方法 |
| JP4581864B2 (ja) * | 2005-06-21 | 2010-11-17 | パナソニック電工株式会社 | 半導体基板への貫通配線の形成方法 |
| KR100731351B1 (ko) * | 2006-02-01 | 2007-06-21 | 삼성전자주식회사 | 탄성 표면파 디바이스 웨이퍼 레벨 패키지 및 그 패키징방법 |
| US20080073778A1 (en) * | 2006-09-27 | 2008-03-27 | Texas Instruments Incorporated | Two-way heat extraction from packaged semiconductor chips |
| US7479794B2 (en) * | 2007-02-28 | 2009-01-20 | Sv Probe Pte Ltd | Spring loaded probe pin assembly |
| US7928582B2 (en) * | 2007-03-09 | 2011-04-19 | Micron Technology, Inc. | Microelectronic workpieces and methods for manufacturing microelectronic devices using such workpieces |
| US7688077B2 (en) * | 2007-08-23 | 2010-03-30 | Advantest Corporation | Test system and daughter unit |
| CN101316014B (zh) * | 2007-10-17 | 2012-02-01 | 番禺得意精密电子工业有限公司 | 电连接装置及其组装方法 |
| JP5351071B2 (ja) * | 2009-02-24 | 2013-11-27 | 株式会社アドバンテスト | テスト部ユニット、テストヘッドおよび電子部品試験装置 |
| DE102009022659B4 (de) * | 2009-05-26 | 2012-01-19 | Semikron Elektronik Gmbh & Co. Kg | Kontakteinrichtung für ein Leistungshalbleitermodul |
| TWI405375B (zh) * | 2009-11-13 | 2013-08-11 | Unimicron Technology Corp | 電連接器 |
| JP5798435B2 (ja) | 2011-03-07 | 2015-10-21 | 日本特殊陶業株式会社 | 電子部品検査装置用配線基板およびその製造方法 |
| JP5777997B2 (ja) * | 2011-03-07 | 2015-09-16 | 日本特殊陶業株式会社 | 電子部品検査装置用配線基板およびその製造方法 |
| KR101149759B1 (ko) * | 2011-03-14 | 2012-06-01 | 리노공업주식회사 | 반도체 디바이스의 검사장치 |
| JP5690678B2 (ja) * | 2011-07-19 | 2015-03-25 | 日本特殊陶業株式会社 | 電子部品検査装置用配線基板およびその製造方法 |
| CN102891116B (zh) * | 2011-07-20 | 2015-06-10 | 讯芯电子科技(中山)有限公司 | 内埋元件封装结构及制造方法 |
| CN103325773A (zh) * | 2012-03-22 | 2013-09-25 | 民瑞科技股份有限公司 | 集成电路的封装结构 |
| JP6341634B2 (ja) * | 2013-05-28 | 2018-06-13 | 新光電気工業株式会社 | プローブガイド板及びその製造方法、半導体検査装置 |
| US9252138B2 (en) * | 2014-05-27 | 2016-02-02 | General Electric Company | Interconnect devices for electronic packaging assemblies |
| EP2962799B8 (de) * | 2014-07-04 | 2016-10-12 | ABB Schweiz AG | Halbleitermodul mit Ultraschall geschweißten Anschlüssen |
| CN104251923B (zh) * | 2014-09-17 | 2017-06-30 | 大族激光科技产业集团股份有限公司 | 二线测试探针装置及其应用方法 |
| US9530749B2 (en) * | 2015-04-28 | 2016-12-27 | Invensas Corporation | Coupling of side surface contacts to a circuit platform |
| US10468363B2 (en) | 2015-08-10 | 2019-11-05 | X-Celeprint Limited | Chiplets with connection posts |
| US9958476B2 (en) | 2015-11-25 | 2018-05-01 | Formfactor, Inc. | Floating nest for a test socket |
| JP6706076B2 (ja) * | 2016-01-14 | 2020-06-03 | 新光電気工業株式会社 | プローブガイド板及びその製造方法とプローブ装置 |
| CN106983966B (zh) * | 2017-03-31 | 2022-05-20 | 四川华川工业有限公司 | 一种钢化玻璃自动破碎装置 |
| RU2657460C1 (ru) * | 2017-05-10 | 2018-06-14 | Открытое акционерное общество "ОКБ-Планета" ОАО "ОКБ-Планета" | Контактное устройство |
| US10446729B1 (en) * | 2018-03-22 | 2019-10-15 | Innolux Corporation | Display device having an electronic device disposed on a first pad and a second pad |
| CN109300859B (zh) * | 2018-09-18 | 2020-08-28 | 苏州施密科微电子设备有限公司 | 一种半导体芯片封装框架 |
| KR102080832B1 (ko) * | 2019-10-02 | 2020-02-24 | 황동원 | 스프링 콘택트 및 스프링 콘택트 내장형 테스트 소켓 |
| CN114731019A (zh) * | 2019-11-21 | 2022-07-08 | 株式会社友华 | 插座及工具 |
| TWI799887B (zh) * | 2021-06-08 | 2023-04-21 | 進聯工業股份有限公司 | 接合器及可組合該接合器之導線端子座結構 |
| JP7182817B1 (ja) | 2022-03-14 | 2022-12-05 | ユニコン株式会社 | プローブシート及びその製造方法 |
| EP4261872A1 (en) * | 2022-04-11 | 2023-10-18 | Nexperia B.V. | Molded electronic package with an electronic component encapsulated between two substrates with a spring member between the electronic component and one of the substrates and method for manufacturing the same |
| TWI811005B (zh) | 2022-07-05 | 2023-08-01 | 中華精測科技股份有限公司 | 可拆式測試裝置 |
| JP2024057787A (ja) * | 2022-10-13 | 2024-04-25 | オムロン株式会社 | 検査ソケットおよび検査装置 |
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| DE2936615C2 (de) * | 1979-09-11 | 1985-03-28 | Brown, Boveri & Cie Ag, 6800 Mannheim | Schutzvorrichtung |
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| US6887723B1 (en) | 1998-12-04 | 2005-05-03 | Formfactor, Inc. | Method for processing an integrated circuit including placing dice into a carrier and testing |
| US7694246B2 (en) | 2002-06-19 | 2010-04-06 | Formfactor, Inc. | Test method for yielding a known good die |
| US6920689B2 (en) | 2002-12-06 | 2005-07-26 | Formfactor, Inc. | Method for making a socket to perform testing on integrated circuits |
-
1998
- 1998-12-04 US US09/205,502 patent/US20020004320A1/en not_active Abandoned
-
1999
- 1999-06-30 DE DE69922656T patent/DE69922656T2/de not_active Expired - Fee Related
- 1999-06-30 CN CNB998079707A patent/CN1197443C/zh not_active Expired - Fee Related
- 1999-06-30 WO PCT/US1999/014924 patent/WO2000001208A1/en not_active Ceased
- 1999-06-30 EP EP99933638A patent/EP1092338B1/en not_active Expired - Lifetime
- 1999-06-30 JP JP2000557668A patent/JP3723079B2/ja not_active Expired - Fee Related
- 1999-06-30 DE DE69937416T patent/DE69937416T2/de not_active Expired - Fee Related
- 1999-06-30 TW TW088111317A patent/TW548756B/zh not_active IP Right Cessation
-
2003
- 2003-12-30 US US10/749,028 patent/US7202677B2/en not_active Expired - Fee Related
-
2005
- 2005-07-11 JP JP2005201965A patent/JP2006013526A/ja active Pending
-
2007
- 2007-04-10 US US11/733,562 patent/US7534654B2/en not_active Expired - Fee Related
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