JP2005536744A5 - - Google Patents

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Publication number
JP2005536744A5
JP2005536744A5 JP2004531021A JP2004531021A JP2005536744A5 JP 2005536744 A5 JP2005536744 A5 JP 2005536744A5 JP 2004531021 A JP2004531021 A JP 2004531021A JP 2004531021 A JP2004531021 A JP 2004531021A JP 2005536744 A5 JP2005536744 A5 JP 2005536744A5
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JP
Japan
Prior art keywords
light
light source
light sources
alignment
sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004531021A
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English (en)
Japanese (ja)
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JP2005536744A (ja
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Publication date
Priority claimed from US10/225,325 external-priority patent/US6970245B2/en
Application filed filed Critical
Publication of JP2005536744A publication Critical patent/JP2005536744A/ja
Publication of JP2005536744A5 publication Critical patent/JP2005536744A5/ja
Pending legal-status Critical Current

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JP2004531021A 2002-08-21 2003-08-15 光学位置合せ検出装置 Pending JP2005536744A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/225,325 US6970245B2 (en) 2000-08-02 2002-08-21 Optical alignment detection system
PCT/US2003/025585 WO2004018967A1 (en) 2002-08-21 2003-08-15 Optical alignment detection system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010036079A Division JP2010164573A (ja) 2002-08-21 2010-02-22 光学位置合せ検出装置

Publications (2)

Publication Number Publication Date
JP2005536744A JP2005536744A (ja) 2005-12-02
JP2005536744A5 true JP2005536744A5 (https=) 2006-09-28

Family

ID=31946298

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004531021A Pending JP2005536744A (ja) 2002-08-21 2003-08-15 光学位置合せ検出装置
JP2010036079A Pending JP2010164573A (ja) 2002-08-21 2010-02-22 光学位置合せ検出装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010036079A Pending JP2010164573A (ja) 2002-08-21 2010-02-22 光学位置合せ検出装置

Country Status (6)

Country Link
US (2) US6970245B2 (https=)
EP (1) EP1546651A1 (https=)
JP (2) JP2005536744A (https=)
CN (2) CN100422686C (https=)
AU (1) AU2003259851A1 (https=)
WO (1) WO2004018967A1 (https=)

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