JPWO2023228401A5 - - Google Patents

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Publication number
JPWO2023228401A5
JPWO2023228401A5 JP2024522863A JP2024522863A JPWO2023228401A5 JP WO2023228401 A5 JPWO2023228401 A5 JP WO2023228401A5 JP 2024522863 A JP2024522863 A JP 2024522863A JP 2024522863 A JP2024522863 A JP 2024522863A JP WO2023228401 A5 JPWO2023228401 A5 JP WO2023228401A5
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JP
Japan
Prior art keywords
optical system
light receiving
irradiation
processing
changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024522863A
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English (en)
Japanese (ja)
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JPWO2023228401A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/021729 external-priority patent/WO2023228401A1/ja
Publication of JPWO2023228401A1 publication Critical patent/JPWO2023228401A1/ja
Publication of JPWO2023228401A5 publication Critical patent/JPWO2023228401A5/ja
Pending legal-status Critical Current

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JP2024522863A 2022-05-27 2022-05-27 Pending JPWO2023228401A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/021729 WO2023228401A1 (ja) 2022-05-27 2022-05-27 加工システム

Publications (2)

Publication Number Publication Date
JPWO2023228401A1 JPWO2023228401A1 (https=) 2023-11-30
JPWO2023228401A5 true JPWO2023228401A5 (https=) 2025-05-08

Family

ID=88918830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024522863A Pending JPWO2023228401A1 (https=) 2022-05-27 2022-05-27

Country Status (5)

Country Link
US (1) US20250319544A1 (https=)
EP (1) EP4534228A4 (https=)
JP (1) JPWO2023228401A1 (https=)
CN (1) CN119562877A (https=)
WO (1) WO2023228401A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023181852A (ja) * 2022-06-13 2023-12-25 株式会社ディスコ 加工装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2849455B2 (ja) * 1990-06-25 1999-01-20 株式会社アマダ レーザ加工機
JPH106061A (ja) * 1996-06-18 1998-01-13 Amada Co Ltd 静電容量センサーヘッドを備えたレーザー加工ヘッド
JP3686317B2 (ja) 2000-08-10 2005-08-24 三菱重工業株式会社 レーザ加工ヘッド及びこれを備えたレーザ加工装置
JP4111309B2 (ja) * 2001-12-17 2008-07-02 株式会社アマダ レーザ加工機のレンズ自動交換装置
JP2008119716A (ja) * 2006-11-10 2008-05-29 Marubun Corp レーザ加工装置およびレーザ加工装置における焦点維持方法
JP2010082663A (ja) * 2008-09-30 2010-04-15 Sunx Ltd レーザ加工機
JP6145719B2 (ja) * 2015-04-28 2017-06-14 パナソニックＩｐマネジメント株式会社 レーザ加工装置及びレーザ加工方法
JP6033368B1 (ja) * 2015-06-15 2016-11-30 Dmg森精機株式会社 加工機械
JP7485014B2 (ja) * 2020-04-15 2024-05-16 株式会社ニコン 加工システム及び計測部材

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